Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Imec installs ASMLís pre-production EUV scanner NXE:3100

ASMLís NXE:3100 tool on its way to imec Leuven.
ASMLís NXE:3100 tool on its way to imec Leuven.

Abstract:
At today's SPIE advanced lithography conference, Luc Van den hove, President and CEO of imec, announces during his keynote speech that imec has started the installation of ASML's pre-production Extreme UltraViolet Lithography (EUVL) scanner, the NXE:3100, in its Leuven facility. The installation of the NXE:3100, featuring a considerably higher source power and optimized optics, underscores imec's ambition to bring EUVL to production level.

Imec installs ASMLís pre-production EUV scanner NXE:3100

Leuven, Belgium | Posted on February 28th, 2011

With the installation of ASML's NXE:3100, imec's EUVL research program moves to the preproduction stage, shifting the focus from mainly an infrastructure study to include now also a manufacturability study. The NXE:3100 at imec uses a DPP (Discharge Produced Plasma) EUV light source from Extreme Technologies (Ushio). At comparable process conditions the NXE:3100 has recently demonstrated a throughput performance increase of a factor of 20 over the EUV Alpha Demo Tool at imec. This increase is based on increased power, higher transmission and dual stages.

Imec's EUVL research program will tackle scanner-specific issues correlated to the difference between EUV lithography and optical lithography through the integration of 14nm logic and 2xnm and 1xnm memory processes. Research will also focus on resists that allow to optimally exploit the resolution of EUV by tackling line-edge roughness and pattern collapse, and on reticle defectivity.

"We rejoice at the acquisition of ASML's NXE:3100 in our research facilities as the new tool will enable us to continue to offer our partners the research they need to bring EUVL to production;" said Luc Van den hove, President and CEO at imec. "Our strategic relations with equipment suppliers such as ASML allow us to offer our partners research on the most advanced equipment."

"As reflected in some of our 28 papers at the SPIE advanced lithography conference this week, together with our partners we have achieved important progress in EUV resists and reticle defectivity;" added Kurt Ronse, director of the lithography department at imec.

####

About IMEC
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China and Japan. Its staff of more than 1,750 people includes over 550 industrial residents and guest researchers. In 2009, imec's revenue (P&L) was 275 million euro. Further information on imec can be found at www.imec.be.
Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nutĒ), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.).

For more information, please click here

Contacts:
Hanne Degans
External Communications Officer
T: +32 16 28 17 69
Mobile: +32 486 065 175

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

Movie on the arrival of the NXE:3100 at imec

Related News Press

News and information

Nanobiotix establishes promising preclinical proof-of-concept in Immuno Oncology May 31st, 2016

UK NANOSAFETY GROUP publishes 2nd Edition of guidance to support safe working with nanomaterials May 30th, 2016

Fast, stretchy circuits could yield new wave of wearable electronics May 30th, 2016

Automating DNA origami opens door to many new uses: Like 3-D printing did for larger objects, method makes it easy to build nanoparticles out of DNA May 30th, 2016

Chip Technology

Fast, stretchy circuits could yield new wave of wearable electronics May 30th, 2016

Gigantic ultrafast spin currents: Scientists from TU Wien (Vienna) are proposing a new method for creating extremely strong spin currents. They are essential for spintronics, a technology that could replace today's electronics May 25th, 2016

Diamonds closer to becoming ideal semiconductors: Researchers find new method for doping single crystals of diamond May 25th, 2016

Dartmouth team creates new method to control quantum systems May 24th, 2016

Tools

Scientists illuminate a hidden regulator in gene transcription: New super-resolution technique visualizes important role of short-lived enzyme clusters May 27th, 2016

Light can 'heal' defects in new solar cell materials: Defects in some new electronic materials can be removed by making ions move under illumination May 24th, 2016

More light on cancer: Scientists created nanoparticles to highlight cancer cells May 21st, 2016

Nanotubes are beacons in cancer-imaging technique: Rice University researchers use spectral triangulation to pinpoint location of tumors May 21st, 2016

Events/Classes

Novel gene therapy shows potential for lung repair in asthma May 18th, 2016

Arrowhead Pharmaceuticals' Preclinical Candidate ARC-LPA Achieves 98% Knockdown and Long Duration of Effect after Subcutaneous Administration May 10th, 2016

Nanometrics Announces Upcoming Investor Events May 10th, 2016

Oxford Instruments Asylum Research and McGill University Announce the McGill AFM Summer School and Workshop, May 12-13, 2016 May 4th, 2016

Alliances/Trade associations/Partnerships/Distributorships

UK NANOSAFETY GROUP publishes 2nd Edition of guidance to support safe working with nanomaterials May 30th, 2016

The CEA Announces Expanded Collaboration with Intel to Advance Cutting-edge Research and Innovation in Key Digital Areas May 17th, 2016

Solliance realizes first up-scaled Perovskite based PV modules with 10% efficiency: Holst Centre, imec and ECN pave the road to upscaling Perovskite PV modules May 10th, 2016

Industrial Nanotech, Inc. Expands Distribution Network in US and Internationally May 9th, 2016

New-Contracts/Sales/Customers

Deep Space Industries and SFL selected to provide satellites for HawkEye 360ís Pathfinder mission: The privately-funded space-based global wireless signal monitoring system will be developed by Deep Space Industries and UTIAS Space Flight Laboratory May 26th, 2016

Nanometrics Achieves Record 3D-NAND Bookings Quarter: A Record 3D-NAND Bookings Quarter, both in Aggregate and for Each of Three Key Customers March 28th, 2016

Keystone Nano selected by National Cancer Institute to participate in BIO March 23rd, 2016

Heriot-Watt's Institute of Photonics & Quantum Sciences uses the Deben Microtest 2 kN tensile stage to characterise ceramics and engineering plastics January 21st, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic