Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Imec installs ASML’s pre-production EUV scanner NXE:3100

ASML’s NXE:3100 tool on its way to imec Leuven.
ASML’s NXE:3100 tool on its way to imec Leuven.

Abstract:
At today's SPIE advanced lithography conference, Luc Van den hove, President and CEO of imec, announces during his keynote speech that imec has started the installation of ASML's pre-production Extreme UltraViolet Lithography (EUVL) scanner, the NXE:3100, in its Leuven facility. The installation of the NXE:3100, featuring a considerably higher source power and optimized optics, underscores imec's ambition to bring EUVL to production level.

Imec installs ASML’s pre-production EUV scanner NXE:3100

Leuven, Belgium | Posted on February 28th, 2011

With the installation of ASML's NXE:3100, imec's EUVL research program moves to the preproduction stage, shifting the focus from mainly an infrastructure study to include now also a manufacturability study. The NXE:3100 at imec uses a DPP (Discharge Produced Plasma) EUV light source from Extreme Technologies (Ushio). At comparable process conditions the NXE:3100 has recently demonstrated a throughput performance increase of a factor of 20 over the EUV Alpha Demo Tool at imec. This increase is based on increased power, higher transmission and dual stages.

Imec's EUVL research program will tackle scanner-specific issues correlated to the difference between EUV lithography and optical lithography through the integration of 14nm logic and 2xnm and 1xnm memory processes. Research will also focus on resists that allow to optimally exploit the resolution of EUV by tackling line-edge roughness and pattern collapse, and on reticle defectivity.

"We rejoice at the acquisition of ASML's NXE:3100 in our research facilities as the new tool will enable us to continue to offer our partners the research they need to bring EUVL to production;" said Luc Van den hove, President and CEO at imec. "Our strategic relations with equipment suppliers such as ASML allow us to offer our partners research on the most advanced equipment."

"As reflected in some of our 28 papers at the SPIE advanced lithography conference this week, together with our partners we have achieved important progress in EUV resists and reticle defectivity;" added Kurt Ronse, director of the lithography department at imec.

####

About IMEC
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China and Japan. Its staff of more than 1,750 people includes over 550 industrial residents and guest researchers. In 2009, imec's revenue (P&L) was 275 million euro. Further information on imec can be found at www.imec.be.
Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.).

For more information, please click here

Contacts:
Hanne Degans
External Communications Officer
T: +32 16 28 17 69
Mobile: +32 486 065 175

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

Movie on the arrival of the NXE:3100 at imec

Related News Press

News and information

HP Supercomputer at NREL Garners Top Honor October 19th, 2014

First Canada Excellence Research Chair gets $10 million from the federal government for oilsands research at the University of Calgary: Federal government announces prestigious research chair to study improving oil production efficiency October 19th, 2014

Ucore's McKenzie to Deliver Presentation to Rare Earths Conference in Singapore as Highlight of Fall 2014 Marketplace Schedule October 19th, 2014

Non-Toxic Nanocatalysts Open New Window for Significant Decrease in Reaction Process October 19th, 2014

Chip Technology

Superconducting circuits, simplified: New circuit design could unlock the power of experimental superconducting computer chips October 18th, 2014

3DXNano™ ESD Carbon Nanotube 3D Printing Filament - optimized for demanding 3D printing applications in the semi-con and electronics industry October 16th, 2014

Future computers could be built from magnetic 'tornadoes' October 14th, 2014

Australian teams set new records for silicon quantum computing October 12th, 2014

Tools

New Grand ARM Transmission Electron Microscope Offers Highest Commercially-Available Atomic Resolution of 63 Picometers October 17th, 2014

Nanodevices for clinical diagnostic with potential for the international market: The development is based on optical principles and provides precision and allows saving vital time for the patient October 15th, 2014

Nanotronics Imaging Releases nSPEC® 3D, Powerful Microscope That Captures 3D Images at Nanoscale, in Lightning Speed: Company Unveils Design at American Chemical Society 2014 International Elastomer Conference October 14th, 2014

Unique catalysts for hydrogen fuel cells synthesized in ordinary kitchen microwave oven October 14th, 2014

Events/Classes

Ucore's McKenzie to Deliver Presentation to Rare Earths Conference in Singapore as Highlight of Fall 2014 Marketplace Schedule October 19th, 2014

Aspen Aerogels, Inc. Schedules Third Quarter 2014 Earnings Release and Conference Call for November 6, 2014 October 17th, 2014

New VDMA Association "Electronics, Micro and Nano Technologies" founded: Inaugural Meeting in Frankfurt/Main, Germany October 15th, 2014

Nanotronics Imaging Releases nSPEC® 3D, Powerful Microscope That Captures 3D Images at Nanoscale, in Lightning Speed: Company Unveils Design at American Chemical Society 2014 International Elastomer Conference October 14th, 2014

Alliances/Partnerships/Distributorships

European Commission opens the gate towards the implementation of Nanomedicine Translation Hub October 16th, 2014

IRLYNX and CEA-Leti to Streamline New CMOS-based Infrared Sensing Modules Dedicated to Human-activities Characterization October 15th, 2014

New VDMA Association "Electronics, Micro and Nano Technologies" founded: Inaugural Meeting in Frankfurt/Main, Germany October 15th, 2014

VDMA photonics steering committee with new members stronger than ever October 14th, 2014

New-Contracts/Sales/Customers

Dyesol Signs Letter of Intent with Tata Steel October 13th, 2014

HZO Teams With Deutsche Telekom to Unveil the Waterproof Tolino Vision 2 eReader: The New HZO Protected eReader Ushers in a New Era of Waterproof Electronics, Providing a Seamless User Experience Without the Risk of Using Port Doors and Mechanical Seals October 10th, 2014

Fullerex: Talga Resources Joins INSCX™ Exchange September 4th, 2014

Global Energy Systems Signs Master Sales Agreement with China Aviation Supplies Group September 4th, 2014

NanoNews-Digest
The latest news from around the world, FREE





  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE