Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > CEA-Leti and Edwards Demonstrate Energy-Saving System For Subfab Process-Support Equipment

Abstract:
Controller Puts Vacuum Pumps and Abatement System in Idle Mode When Processing Equipment Is Not Running

CEA-Leti and Edwards Demonstrate Energy-Saving System For Subfab Process-Support Equipment

Grenoble, France | Posted on February 15th, 2011

CEA-Leti and Edwards, a leading supplier of vacuum technology and abatement systems, today announced that they have demonstrated an energy-saving controller system for subfabs that automatically puts process-support equipment in idle mode when fab processes are not running.

The system indirectly monitors the activity of the process tool and signals the tool's sub-systems, vacuum pumps and abatement system to go into standby during non-process time.

The system was successfully tested for reliability and energy savings on two tools at CEA-Leti and showed a 75 percent reduction in fuel and water use when the abatement system was in idle mode. Based on the results, Edwards will develop and launch a new energy-saving system for fab operators this year.

The project was begun after Leti engineers, as part of their involvement in sustainability and green microelectronics, discovered that vacuum pumps and abatement systems in their subfab consumed the same amount of energy whether or not the process tools were working, because there is generally no direct communication on the tool status with the subfab.

Leti and Edwards, for whom energy efficiency is a key research topic, launched a one- year co-development program in January 2010 to develop a controller system capable of monitoring indirectly the status of the process tool and signaling for the process pumps and abatement system to go into idle mode.

Edwards' latest-generation pumps and abatement systems are specifically designed to maximize energy savings by allowing process tools or factory automation systems to automatically switch among various low-energy (Green Mode) or high-performance operating modes to match the real-time requirements of the process.

The co-developed system at Leti uses information from both the load lock and process pumps to determine the process status of the tool and thus can provide a signal for standby control to the subfab abatement equipment with configurable thresholds and wait times.

####

About CEA-Leti
CEA is a French research and technology organisation, with activities in four main areas: energy, information technologies, healthcare technologies and defence and security. Within CEA, the Laboratory for Electronics & Information Technology (CEA-Leti) works with companies in order to increase their competitiveness through technological innovation and transfers. CEA-Leti is focused on micro and nanotechnologies and their applications, from wireless devices and systems, to biology and healthcare or photonics. Nanoelectronics and microsystems (MEMS) are at the core of its activities. As a major player in MINATEC campus, CEA-Leti operates 8,000-m state-of-the-art clean rooms, on 24/7 mode, on 200mm and 300mm wafer standards. With 1,200 employees, CEA-Leti trains more than 190 Ph.D. students and hosts 200 assignees from partner companies. Strongly committed to the creation of value for the industry, CEA-Leti puts a strong emphasis on intellectual property and owns more than 1,700 patent families.

For more information, visit www.leti.fr.

About Edwards
Edwards is a leading global technology and environmental business supplying integrated solutions for the manufacture of semiconductors, flat panel displays, LEDs and solar cells as well as vacuum technology for industrial, scientific, process and R&D applications. The company employs approximately 3,000 people worldwide in the design, manufacture and support of high technology vacuum and exhaust management equipment. Edwards invented the concept of the low-maintenance, cost-effective, commercial oil-free dry vacuum pump, while its abatement systems prevent the emission of harmful greenhouse gases making the Edwards overall carbon footprint negative*. For more information, please visit www.edwardsvacuum.com.

The Edwards name and logo are registered trademarks of Edwards Limited.

* Greenhouse Gas Protocol - Scope 3 Indirect Emissions

For more information, please click here

Contacts:
CEA-Leti
Thierry Bosc
+33 4 38 78 31 95


Agency
Amlie Ravier
+33 1 58 18 59 30

Copyright © CEA-Leti

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

DNA sensor system developed for specific and sensitive measurement of cancer-relevant enzyme activity August 23rd, 2017

Lego proteins revealed: Self-assembling protein complexes based on a single mutation could provide scaffolding for nanostructures August 23rd, 2017

Heating quantum matter: A novel view on topology: Physicists demonstrate how heating up a quantum system can be used as a universal probe for exotic states of matter August 22nd, 2017

A Tougher Tooth: A new dental restoration composite developed by UCSB scientists proves more durable than the conventional material August 22nd, 2017

Announcements

DNA sensor system developed for specific and sensitive measurement of cancer-relevant enzyme activity August 23rd, 2017

Lego proteins revealed: Self-assembling protein complexes based on a single mutation could provide scaffolding for nanostructures August 23rd, 2017

Heating quantum matter: A novel view on topology: Physicists demonstrate how heating up a quantum system can be used as a universal probe for exotic states of matter August 22nd, 2017

A Tougher Tooth: A new dental restoration composite developed by UCSB scientists proves more durable than the conventional material August 22nd, 2017

Tools

Nagoya physicists resolve long-standing mystery of structure-less transition: Nagoya University-led team of physicists use a synchrotron radiation X-ray source to probe a so-called 'structure-less' transition and develop a new understanding of molecular conductors August 21st, 2017

Tokai University research: Nanomaterial wrap for improved tissue imaging August 21st, 2017

Scientists from the University of Manchester and Diamond Light Source work with Deben to develop and test a new compression stage to study irradiated graphite at elevated temperatures August 15th, 2017

FRITSCH Milling and Sizing! Innovations at POWTECH 2017 - Hall 2 Stand 227 August 9th, 2017

Energy

The power of perovskite: OIST researchers improve perovskite-based technology in the entire energy cycle, from solar cells harnessing power to LED diodes to light the screens of future electronic devices and other lighting applications August 18th, 2017

Freeze-dried foam soaks up carbon dioxide: Rice University scientists lead effort to make novel 3-D material August 16th, 2017

Two Scientists Receive Grants to Develop New Materials: Chad Mirkin and Monica Olvera de la Cruz recognized by Sherman Fairchild Foundation August 16th, 2017

Fewer defects from a 2-D approach August 15th, 2017

Alliances/Trade associations/Partnerships/Distributorships

Oxford Instruments Plasma Technology announces a new partner in Korea August 15th, 2017

Moving at the Speed of Light: University of Arizona selected for high-impact, industrial demonstration of new integrated photonic cryogenic datalink for focal plane arrays: Program is major milestone for AIM Photonics August 10th, 2017

Technology Companies Join Forces for TEM Imaging and Analysis August 3rd, 2017

GLOBALFOUNDRIES and VeriSilicon To Enable Single-Chip Solution for Next-Gen IoT Networks: Integrated solution leverages GFs 22FDX technology to decrease power, area, and cost for NB-IoT and LTE-M applications July 14th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project