Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Vibrating nanorods measure thin films for microcircuits

Abstract:
A key step in many nanofabrication processes is to create thin films, sometimes only one molecule thick, by a method known as atomic layer deposition. Researchers at Cornell and Tel Aviv University have developed a new tool for nanofabricators to test the physical properties of such films.

By Bill Steele

Vibrating nanorods measure thin films for microcircuits

Ithaca, NY | Posted on December 11th, 2010

Ultrathin films are increasingly important in constructing microcircuits. Their physical characteristics often determine their electronic behavior as well as their resistance to wear.

The researchers have shown that tiny resonant cantilevers -- silicon rods anchored at one end, like a tiny diving board -- can determine the density of a film and its Young's modulus, a measure of resistance to bending. The method offers several advantages over other methods of measuring these characteristics of thin films, the researchers said, and can be used by any researchers with access to nanofabrication capabilities comparable to those at the Cornell Nanoscale Facility.

The work was reported in the Aug. 15 issue of the Journal of Applied Physics by Cornell research associate Rob Ilic, Slava Krylov, senior lecturer at Tel Aviv University and former visiting professor at Cornell, and Harold Craighead, the C.W. Lake Jr. Professor of Engineering at Cornell.

Cornell researchers have previously used tiny vibrating cantilevers just a few nanometers (billionths of a meter) thick to detect the mass of objects as small as a virus. Just as a thick guitar string vibrates at a lower note than a thinner one, adding mass to a vibrating rod changes its frequency of vibration. Coating the rod with a thin film adds detectable mass, and from the mass and thickness of the film, density can be determined.

The film also changes the cantilever's resistance to bending. To separate out this characteristic, the researchers compared in-plane (side to side) and out-of-plane (up and down) vibrations. The resistance to bending in different directions is noticeably different when the vibrating rod is wide and thin. When the cross-section of the rod is square, there is no difference between up and down and side-to-side movement.

To test their idea, the researchers fabricated a variety of cantilevers six to 10 microns (millionths of a meter) long, 45 nanometers thick and with widths varying from 45 nanometers to 1 micron. In various experiments, they applied films of aluminum, aluminum nitride and hafnium from 21.2 to 21.5 nanometers thick to the surface of the cantilevers.

A laser beam focused on the base of a cantilever supplies energy to set it vibrating, and another laser aimed at the end measures the vibration. Like a tuning fork, each rod has a resonant frequency at which it vibrates, and that depends on the dimensions and physical characteristics of the device. Comparing the resonant frequency and some of its harmonics before and after a film was applied enabled the researchers to calculate the density and Young's modulus of the film.

Over many experiments, the calculations agreed well with theoretical predictions and characteristics of films measured by other methods. Some aspects of the method of fabricating the nanocantilevers could affect the results, the researchers found, but they said accuracy could be improved.

The work was supported by the Defense Advanced Projects Research Administration, the National Science Foundation and the state of New York.

####

For more information, please click here

Contacts:
Media Contact:
Joe Schwartz
(607) 254-6235


Cornell Chronicle:
Bill Steele
(607) 255-7164

Copyright © Cornell University

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

East China University of Science and Technology Purchases Nanonex Advanced Nanoimprint Tool NX-B200 July 30th, 2014

Watching Schrödinger's cat die (or come to life): Steering quantum evolution & using probes to conduct continuous error correction in quantum computers July 30th, 2014

From Narrow to Broad July 30th, 2014

FLAG-ERA and TNT2014 join efforts: Graphene Networking at its higher level in Barcelona: Encourage the participation in a joint transnational call July 30th, 2014

Thin films

Oregon chemists eye improved thin films with metal substitution: Solution-based inorganic process could drive more efficient electronics and solar devices July 21st, 2014

Even geckos can lose their grip July 9th, 2014

Shrinky Dinks close the gap for nanowires July 1st, 2014

Micro-manufacturing breakthrough is wired for sound June 24th, 2014

Govt.-Legislation/Regulation/Funding/Policy

New imaging agent provides better picture of the gut July 30th, 2014

Watching Schrödinger's cat die (or come to life): Steering quantum evolution & using probes to conduct continuous error correction in quantum computers July 30th, 2014

Nature inspires a greener way to make colorful plastics July 30th, 2014

Tough foam from tiny sheets: Rice University lab uses atom-thick materials to make ultralight foam July 29th, 2014

Academic/Education

University of Manchester selects Anasys AFM-IR for coatings and corrosion research July 30th, 2014

Haydale Announces Collaboration Agreement with Swansea University’s Welsh Centre for Printing and Coatings (WCPC) July 12th, 2014

STFC takes delivery of the 100th Hitachi Tabletop SEM in the UK July 3rd, 2014

Innovation Management and the Emergence of the Nanobiotechnology Industry July 1st, 2014

Chip Technology

Nanometrics Reports Second Quarter 2014 Financial Results July 30th, 2014

A*STAR and industry form S$200M semiconductor R&D July 25th, 2014

A Crystal Wedding in the Nanocosmos July 23rd, 2014

Penn Study: Understanding Graphene’s Electrical Properties on an Atomic Level July 22nd, 2014

Nanomedicine

New imaging agent provides better picture of the gut July 30th, 2014

Zenosense, Inc. July 29th, 2014

Optimum inertial design for self-propulsion: A new study investigates the effects of small but finite inertia on the propulsion of micro and nano-scale swimming machines July 29th, 2014

FEI adds Phase Plate Technology and Titan Halo TEM to its Structural Biology Product Portfolio: New solutions provide the high-quality imaging and contrast necessary to analyze the 3D structure of molecules and molecular complexes July 28th, 2014

Announcements

University of Manchester selects Anasys AFM-IR for coatings and corrosion research July 30th, 2014

Nature inspires a greener way to make colorful plastics July 30th, 2014

Analytical solutions from Malvern Instruments support University of Wisconsin-Milwaukee researchers in understanding environmental effects of nanomaterials July 30th, 2014

FEI Unveils New Solutions for Faster Time-to-Analysis in Metals Research July 30th, 2014

Tools

New imaging agent provides better picture of the gut July 30th, 2014

Nanometrics Reports Second Quarter 2014 Financial Results July 30th, 2014

New Objective Focusing Nanopositioner from nPoint July 30th, 2014

University of Manchester selects Anasys AFM-IR for coatings and corrosion research July 30th, 2014

Research partnerships

New imaging agent provides better picture of the gut July 30th, 2014

Breakthrough laser experiment reveals liquid-like motion of atoms in an ultra-cold cluster: University of Leicester research team unlocks insights into creation of new nano-materials July 25th, 2014

A*STAR and industry form S$200M semiconductor R&D July 25th, 2014

A Crystal Wedding in the Nanocosmos July 23rd, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE