Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Imec reports ultra-thin solar blind EUV imager

Abstract:
Today at the International Electron Devices Meeting in San Francisco imec presents an ultra-thin hybrid AlGaN-on-Si-based extreme ultraviolet (EUV) imager with only 10m pixel-to-pixel pitch.

Imec reports ultra-thin solar blind EUV imager

San Francisco, CA | Posted on December 8th, 2010

The wide-bandgap material (AlGaN) provides insensitivity to visible wavelengths and enhanced UV radiation hardness compared to silicon. Backside illumination in a hybrid design was used to achieve a very small pitch-to-pitch (10m only). The novel imager shows an excellent detection down to a wavelength of 1nm.

Ultraviolet detection is of particular interest for solar science, EUV microscopy and advanced EUV lithography tools. Sensors using wide-bandgap materials overcome the drawbacks of Si-based sensors such as their sensitivity to UV radiation damage and the need for filters to block the unnecessary visible and infrared radiation.

Imec's backside illuminated EUV imager is based on a state-of-the-art hybrid design integrating an AlGaN sensor on a silicon readout chip. A submicron thick AlGaN layer was grown on a Si(111) wafer using molecular beam epitaxy and a focal plane array of 256x256 pixels with a pixel-to-pixel pitch of 10 micron was processed. Each pixel contains a Schottky diode optimized for backside illumination. A custom read-out chip, based on capacitance transimpedance amplifiers, was fabricated in 0.35m CMOS technology. The AlGaN wafer and read-out chip were post-processed with indium solder bumps with 10m pixel-to-pixel pitch achieving excellent uniformity. The focal plane array and read-out chip were assembled using flip-chip bonding and subsequently the silicon substrate was locally removed to enable backside illumination of the active AlGaN layer. Finally, the imager was packaged and wire-bonded. Measurements demonstrated an excellent response down to a wavelength of 1nm.

These results were obtained in collaboration with CRHEA/CNRS (France) and the Royal Observatory of Belgium in the framework of the BOLD project of the European Space Agency (ESA).

####

About imec
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society.

Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China and Japan. Its staff of more than 1,750 people includes over 550 industrial residents and guest researchers. In 2009, imec's revenue (P&L) was 275 million euro. Further information on imec can be found at www.imec.be.

NOTE: Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut), imec Belgium (imec vzw supported by the Flemish Government), imec the Netherlands (Stichting imec Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (imec Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) C. Ltd.).

For more information, please click here

Contacts:
Katrien Marent, Imec Director of External Communications, T: +32 16 28 18 80, M: +32 474 30 28 66,

Barbara Kalkis, Maestro Marketing & PR, T: +1 408 996 9975, M: +1 408 529 4210,

Copyright © imec

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Smaller, faster, cheaper: A new type of modulator for the future of data transmission July 27th, 2015

Researchers predict material with record-setting melting point July 27th, 2015

Reshaping the solar spectrum to turn light to electricity: UC Riverside researchers find a way to use the infrared region of the sun's spectrum to make solar cells more efficient July 27th, 2015

Industrial Nanotech, Inc. Provides Update on PCAOB Audited Financials July 27th, 2015

Thin films

Iranian Scientists Create Best Conditions for Synthesis of Gold Nanolayers July 23rd, 2015

ORNL researchers make scalable arrays of 'building blocks' for ultrathin electronics July 22nd, 2015

Industrial Nanotech, Inc. Introduces Ultra Thin High Performance Thermal Insulation Film for Cooling Personal Electronic Devices July 21st, 2015

Imec Makes Steady Progress on Perovskite Photovoltaic Module reaching a Record 11 Percent Conversion Efficiency July 16th, 2015

Chip Technology

Superfast fluorescence sets new speed record: Plasmonic device has speed and efficiency to serve optical computers July 27th, 2015

Spintronics: Molecules stabilizing magnetism: Organic molecules fixing the magnetic orientation of a cobalt surface/ building block for a compact and low-cost storage technology/ publication in Nature Materials July 25th, 2015

Penn researchers discover new chiral property of silicon, with photonic applications July 25th, 2015

Global Nano Barium Sulfate Industry 2015 Market Research Report July 23rd, 2015

Announcements

Researchers predict material with record-setting melting point July 27th, 2015

Reshaping the solar spectrum to turn light to electricity: UC Riverside researchers find a way to use the infrared region of the sun's spectrum to make solar cells more efficient July 27th, 2015

Industrial Nanotech, Inc. Provides Update on PCAOB Audited Financials July 27th, 2015

Global Corrosion Resistant Nano Coatings Market To 2015: Acute Market Reports July 27th, 2015

Tools

Reshaping the solar spectrum to turn light to electricity: UC Riverside researchers find a way to use the infrared region of the sun's spectrum to make solar cells more efficient July 27th, 2015

Superfast fluorescence sets new speed record: Plasmonic device has speed and efficiency to serve optical computers July 27th, 2015

Ultra-thin hollow nanocages could reduce platinum use in fuel cell electrodes July 24th, 2015

Deben reports on the use of their CT500 in the X-ray microtomography laboratory at La Trobe University, Melbourne, Australia July 22nd, 2015

Energy

Smaller, faster, cheaper: A new type of modulator for the future of data transmission July 27th, 2015

Reshaping the solar spectrum to turn light to electricity: UC Riverside researchers find a way to use the infrared region of the sun's spectrum to make solar cells more efficient July 27th, 2015

Industrial Nanotech, Inc. Provides Update on PCAOB Audited Financials July 27th, 2015

Ultra-thin hollow nanocages could reduce platinum use in fuel cell electrodes July 24th, 2015

Events/Classes

Albany College of Pharmacy and Health Sciences to Host One Week Symposium on Nanomedicine July 23rd, 2015

Photonex 2015 - The annual Nano-Spectroscopy and Bio-Imaging meeting is announced July 21st, 2015

IEEE ROBIO 2015 Call for Papers: 2015 IEEE International Conference on Robotics and Biomimetics - December 6-9, 2015, Zhuhai, China July 19th, 2015

Industrial Forum organized within Graphene Canada 2015: Recent advances in technology developments and business opportunities in graphene commercialization July 16th, 2015

Research partnerships

Spintronics: Molecules stabilizing magnetism: Organic molecules fixing the magnetic orientation of a cobalt surface/ building block for a compact and low-cost storage technology/ publication in Nature Materials July 25th, 2015

Stretching the limits on conducting wires July 25th, 2015

Ultra-thin hollow nanocages could reduce platinum use in fuel cell electrodes July 24th, 2015

UT Dallas nanotechnology research leads to super-elastic conducting fibers July 24th, 2015

Solar/Photovoltaic

Reshaping the solar spectrum to turn light to electricity: UC Riverside researchers find a way to use the infrared region of the sun's spectrum to make solar cells more efficient July 27th, 2015

Rice University finding could lead to cheap, efficient metal-based solar cells: Plasmonics study suggests how to maximize production of 'hot electrons' July 22nd, 2015

Perovskite solar technology shows quick energy returns: New technology beats current solar panel technology in life-cycle energy assessment July 20th, 2015

Nanowires give 'solar fuel cell' efficiency a tenfold boost: Eindhoven researchers make important step towards a solar cell that generates hydrogen July 17th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project