Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Intel Innovator, PSU Chemistry Ph.D., Finds Green Solution Focused on Planet, Profit

Abstract:
Nabil Mistkawi, a new Portland State University (PSU) chemistry graduate and full-time Intel employee, has invented a one-of-a-kind chemical formulation that enables sub-50 nanometer (nm) process technology for advanced microprocessors manufacturing. This novel and environmentally friendly chemical formulation saves Intel tens of millions of dollars annually.

Intel Innovator, PSU Chemistry Ph.D., Finds Green Solution Focused on Planet, Profit

Portland, OR | Posted on July 29th, 2010

These microprocessors serve as the "brains," or central processing units (CPUs), of today's personal computers. Microprocessors are often comprised of more than ten layers and many different materials. To successfully manufacture sub-50nm semiconductor chips, certain materials must be uniformly removed. To do this, Nabil Mistkawi implemented an elegant solution low in toxicity and high in performance.

His solution was a green chemistry concoction that would selectively dissolve certain metal, while preserving the integrity of electrical wiring components such as copper, and of insulators, that are all sandwiched together on the chip. This wet etching process is much cleaner and significantly more effective for this application than the typical chemical polishing approach to remove materials. The new process is not only effective, but also fast—completed in only two minutes.

For Intel Corporation, this "wet etching" method has served as a great, green leap forward. It was first implemented in 2006, scaled up in 2007, and has been part of the manufacturing process for current generations of Intel microprocessors. This work replaced toxic chemical formulations containing solvents that were harmful to human health as well as the environment, thus requiring strict and controlled usage protocols.

For Mistkawi, a process engineer at Intel's Hillsboro, Ore., facility, it served as the basis for his doctoral dissertation, "Fundamental Studies in Selective Wet Etching and Corrosion Processes for High Performance Semiconductor Devices," six years in the making and successfully defended this winter at Portland State University.

"I like to have students work on projects that actually amount to something tangible," says Shankar Rananavare, faculty adviser to Mistkawi and research associate professor of chemistry at PSU. "It's one thing to make it work in a test tube and beaker. It's quite another to do so at 8,000 gallons each week."

Addressing the environmental and human risks was the driving force to solve the etch selectivity challenge. This challenging task was proposed to a number of outside chemical companies and academic research labs. After one year of research they claimed that it is impossible to achieve the etch selectivity requirements. Three days after Mistkawi was asked to take a look at the problem, he had demonstrated both feasibility and proof of a concept that would prove to be cheaper, faster and cleaner.

Another fortunate byproduct of this process is actually its lack of byproduct. The chemical etching solution is 98 percent water, with fluoride content less than that of toothpaste. This "green chemistry" reduces both disposal and environmental costs. "It was nice to incorporate a green chemistry approach, but ultimately the process had to be robust enough through its performance," says Mistkawi.

The technology had been proven, but fully understanding and demonstrating the science remained important. Mistkawi continued to refine and replicate his work in labs at Intel, located in Hillsboro, Ore. At Portland State he worked to understand the science behind the process, meeting weekly with his adviser and other doctoral students (who agreed to meet on Friday evenings to accommodate Mistkawi's work schedule). Mistkawi also worked closely with the U.S. Department of Energy's National Energy Technology Laboratory in Albany, Ore., (www.netl.doe.gov) to better understand corrosion science of metal thin films.

"As good as the technology was, we wanted to make sure the science behind the process was equally well understood," says PSU's Rananavare.

Nabil Mistkawi received his doctorate at Portland State University commencement ceremonies in June 2010—one of the first ten students to complete this relatively new program. He continues to work full-time for Intel, where he is an inventor on nine patent applications filed since 2003, and is considering joining the component research team, focused on path-finding research challenges. He has received numerous awards, including the 2006 Global Intel Gold Award, given annually to an Intel employee who is engaged in a project that demonstrates exceptional environmental leadership.

Mistkawi earned a double major in biochemistry and chemistry at University of Oregon. He lives with his wife and three children in Keizer, Ore.

Portland State University has long-standing connections with regional industry—PSU already provides more graduates to Intel Oregon than any other university. These connections, with an emphasis on addressing industry challenges, benefit business, while helping expand and refine curriculum. Mistkawi's work in wet etching has already contributed to future coursework for other graduate science and engineering students at PSU.

"This story is a great example of how faculty at Portland State University partner at both an educational and research level with local industry" say Kevin Reynolds, professor and chair of PSU's Department of Chemistry. "It is one of the great strengths of our institution and as this example shows, the results can have a global impact with both positive economic and environmental outcomes."

####

About Portland State University
Portland State University (PSU) serves as a center of opportunity for over 28,000 undergraduate and graduate students. Located in Portland, Oregon, one of the nation’s most livable cities, the University’s innovative approach to education combines academic rigor in the classroom with field-based experiences through internships and classroom projects with community partners. The University’s 49-acre downtown campus provides a living laboratory for Portland State’s commitment to sustainability, with many of the 125 bachelor’s, master’s and doctoral degrees incorporating sustainability into the curriculum. PSU’s motto, “Let Knowledge Serve the City,” inspires the teaching and research of an accomplished faculty whose work and students span the globe.

About Intel
Intel (NASDAQ: INTC), the world leader in silicon innovation, develops technologies, products and initiatives to continually advance how people work and live. Additional information about Intel is available at www.intel.com/pressroom and blogs.intel.com. Intel, Intel Xeon, Core and the Intel logo are trademarks of Intel Corporation in the United States and other countries.

* Other names and brands may be claimed as the property of others.

For more information, please click here

Contacts:
David Santen
Office of University Communications
Portland State University
503-725-8765

Copyright © Portland State University

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Nanoparticles could allow for faster, better medicine: Exposure of nanoparticles in the body allows for more effective delivery November 20th, 2017

ICN2 researchers compute unprecedented values for spin lifetime anisotropy in graphene November 17th, 2017

Math gets real in strong, lightweight structures: Rice University researchers use 3-D printers to turn century-old theory into complex schwarzites November 16th, 2017

The stacked color sensor: True colors meet minimization November 16th, 2017

Chemistry

Dendritic fibrous nanosilica: all-in-one nanomaterial for energy, environment and health November 4th, 2017

Researchers greenlight gas detection at room temperature October 26th, 2017

Creation of coherent states in molecules by incoherent electrons October 21st, 2017

What can be discovered at the junction of physics and chemistry October 6th, 2017

Possible Futures

Nanoparticles could allow for faster, better medicine: Exposure of nanoparticles in the body allows for more effective delivery November 20th, 2017

Math gets real in strong, lightweight structures: Rice University researchers use 3-D printers to turn century-old theory into complex schwarzites November 16th, 2017

The stacked color sensor: True colors meet minimization November 16th, 2017

GLOBALFOUNDRIES Demonstrates Industry-Leading 112G Technology for Next-Generation Connectivity Solutions: High bandwidth, low power SerDes IP portfolio enables ‘connected intelligence’ in data centers and networking applications November 15th, 2017

Academic/Education

Luleĺ University of Technology is using the Deben CT5000TEC stage to perform x-ray microtomography experiments with the ZEISS Xradia 510 Versa to understand deformation and strain inside inhomogeneous materials November 7th, 2017

Park Systems Announces the Grand Opening of the Park NanoScience Center at SUNY Polytechnic Institute November 3rd, 2017

Two Scientists Receive Grants to Develop New Materials: Chad Mirkin and Monica Olvera de la Cruz recognized by Sherman Fairchild Foundation August 16th, 2017

Moving at the Speed of Light: University of Arizona selected for high-impact, industrial demonstration of new integrated photonic cryogenic datalink for focal plane arrays: Program is major milestone for AIM Photonics August 10th, 2017

Chip Technology

ICN2 researchers compute unprecedented values for spin lifetime anisotropy in graphene November 17th, 2017

Nanometrics to Participate in the 6th Annual NYC Investor Summit 2017 November 16th, 2017

GLOBALFOUNDRIES Demonstrates Industry-Leading 112G Technology for Next-Generation Connectivity Solutions: High bandwidth, low power SerDes IP portfolio enables ‘connected intelligence’ in data centers and networking applications November 15th, 2017

Nanometrics Announces $50 Million Share Repurchase Program November 15th, 2017

Nanoelectronics

GLOBALFOUNDRIES, Fudan Team to Deliver Next Generation Dual Interface Smart Card November 14th, 2017

Leti Will Present 11 Papers and Host More-than-Moore Technologies Workshop November 14th, 2017

The next generation of power electronics? Gallium nitride doped with beryllium: How to cut down energy loss in power electronics? The right kind of doping November 9th, 2017

Researchers bring optical communication onto silicon chips: Ultrathin films of a semiconductor that emits and detects light can be stacked on top of silicon wafers October 23rd, 2017

Announcements

Nanoparticles could allow for faster, better medicine: Exposure of nanoparticles in the body allows for more effective delivery November 20th, 2017

ICN2 researchers compute unprecedented values for spin lifetime anisotropy in graphene November 17th, 2017

Math gets real in strong, lightweight structures: Rice University researchers use 3-D printers to turn century-old theory into complex schwarzites November 16th, 2017

The stacked color sensor: True colors meet minimization November 16th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project