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Home > Press > Air Liquide and ASM sign agreement on advanced high-k ALD precursors

Abstract:
Collaboration led to license and preferred supplier agreement for ALOHA advanced precursors

Air Liquide and ASM sign agreement on advanced high-k ALD precursors

Houston, TX | Posted on December 10th, 2009

ASM International N.V. and the Air Liquide Group announce that their collaboration has led to the signature of a license and preferred supplier agreement for ALOHATM advanced precursors. Under the terms of the agreement, Air Liquide will have access to ASM's key processes and material intellectual property related to the deposition of advanced ultra-high-k insulator films such as Yttrium-doped Zirconia, STO and BST. ASM and Air Liquide's customers will benefit from Air Liquide's ALOHA global research, manufacturing and supply chain capability, with ASM's well known Pulsar® atomic layer deposition (ALD) system.

The first high-k materials were introduced in mainstream DRAM manufacturing in the mid 2000's, and more recently as a gate insulator material in logic manufacturing. The materials are expected to be used in both types of devices to further enhance transistor and capacitor performance.

Ivo Raaijmakers, chief technology officer of ASM stated, "It is essential that the whole supply chain, including chemicals, their transportation and storage, deposition equipment and source containers reaches maturity before new materials will be adopted by our customers. The agreement with Air Liquide is a key step to enable ultra high-k materials for the industry." Jean-Marc Girard, chief technology officer of Air Liquide Electronics commented, "We are proud to become a preferred supplier of the leader in high-k ALD technology for these advanced thin film products. It is essential for chemical suppliers to closely cooperate with tool suppliers on an ongoing basis. High-Tech is a growth driver of Air Liquide."

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About Air Liquide
Air Liquide Electronics serves the semiconductor industry worldwide with activities in ultra-pure and specialty gases, new molecules, related equipment and customized services. The Electronics division management is based in Tokyo to enhance its proximity to the semiconductor, TFT-LCD and PV markets in Asia.

Air Liquide is the world leader in gases for industry, health and the environment, and is present in over 75 countries with 43,000 employees. Oxygen, nitrogen, hydrogen and rare gases have been at the core of Air Liquide’s activities since its creation in 1902. Using these molecules, Air Liquide continuously reinvents its business, anticipating the needs of current and future markets. The Group innovates to enable progress, to achieve dynamic growth and a consistent performance.

Innovative technologies that curb polluting emissions, lower industry’s energy use, recover and reuse natural resources or develop the energies of tomorrow, such as hydrogen, biofuels or photovoltaic energy… Oxygen for hospitals, homecare, fighting nosocomial infections… Air Liquide combines many products and technologies to develop valuable applications and services not only for its customers but also for society.

A partner for the long term, Air Liquide relies on employee commitment, customer trust and shareholder support to pursue its vision of sustainable, competitive growth. The diversity of Air Liquide’s teams, businesses, markets and geographic presence provides a solid and sustainable base for its development and strengthens its ability to push back its own limits, conquer new territories and build its future.

About ASM International

ASM International N.V., headquartered in Almere, the Netherlands, and its subsidiaries design and manufacture equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing (front-end segment) as well as assembly and packaging (Back-end segment) through facilities in the United States, Europe, Japan and Asia. ASM International's common stock trades on NASDAQ (symbol ASMI) and the Euronext Amsterdam Stock Exchange (symbol ASM). For more information, visit ASMI's website at www.asm.com.

Contacts:
Press Relations
(877) 256-8601
(713) 624-8594

Copyright © Air Liquide

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