Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Carbon Nanotubes and Semiconductor Nanowires for Microelectronics

Abstract:
The continuous downscaling of feature sizes in microelectronics according to Moore's law has already required the introduction of several "non-conventional" materials into the semiconductor manufacturing industry in recent years, such as Cu, high- and low- k dielectrics, etc.

Carbon Nanotubes and Semiconductor Nanowires for Microelectronics

UK | Posted on December 9th, 2009

For very advanced technology nodes (i.e.towards the 16nm node), bottom-up grown nanomaterials are also being considered for their potential as building blocks of devices and interconnections. Nanomaterials would not necessarily directly contribute to higher device densities, but their unique properties may solve specific issues linked to downscaling and would certainly enable a number of new device concepts and architectures.

Carbon Nanotubes (CNTs) and semiconductor Nanowires (NWs) are generally bottomup grown in a catalysed chemical vapour deposition (CCVD) fashion, i.e. with the mediation of metal nanoparticles. The formation of such nanoparticles by breaking up a thin catalyst film on the substrate, and the particle pre-growth treatment are key steps of the global growth process, which would literally only start when the precursor gases are brought into the chamber (Fig.1).

For microelectronics applications, it is essential that the growth process stays compatible with Si technology in terms of materials, tools and processes used, and also that it can be realised on wafer -scale. CNTs are mostly being considered as possible interconnects material, as replacement of Cu interconnects. The characteristic ballistic conduction of metallic CNTs, together with their high thermal conductivity (about 6000 W K m-1, compared to 400 W K m-1 for Cu), makes them particularly interesting for vertical interconnects in small vias (10 nm diameter and below) with high aspect ratios. The most favourable configuration would be the growth of high density single wall carbon nanotubes, although also multi-wall nanotubes would lead to an improvement as compared to Cu.

As shown in Fig.2, a high density (~1012 CNTs/cm2) carpet of aligned CNTs with a few nm diameter was grown at 650C in a PlasmalabSystem100, starting from a Fe/Ti bilayer catalyst. The plasma pre-treatment of the particles is key to such high density growth.

Semiconductor nanowires are ideal building blocks for both logics and memory devices. Their vertical wire geometry allows excellent control on the electrical field in the channel of a nanowire-based transistor thanks to the all-around gate. Also, the growth of segmented nanowires would enable the formation of high quality hetero-junctions of mismatched semiconductors, thanks to favourable elastic and plastic relaxation phenomena at the nanoscale. On the other hand, NWs are generally grown using Au catalyst particles. Au is a killer impurity in Si technology, and trials to use other metal catalysts have not been as successful. In Fig.3 we show the feasibility of Si NWs growth from indium nanoparticles, again in a PlasmalabSystem100. Indium is not an efficient chemical catalyst for the Si precursor dissociation, so the use of plasma-enhanced CVD growth, following a plasma-based particle pre-growth treatment of the In particles, is essential for a successful In -mediated nanowire growth.

Author: Francesca Iacopi, PhD, Senior Scientist, IMEC

(see full release for all three figures)

####

About Oxford Instruments
Oxford Instruments is a worldwide business supplying high technology tools and systems for the analysis and manipulation of matter at the smallest scale. Our diverse markets include industrial analysis, research, education, space, and energy.

For more information, please click here

Copyright © Oxford Instruments

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

In borophene, boundaries are no barrier: Rice U., Northwestern researchers make and test atom-thick boron's unique domains July 17th, 2018

Tuning into quantum: Scientists unlock signal frequency control of precision atom qubits July 16th, 2018

Nano-kirigami: 'Paper-cut' provides model for 3D intelligent nanofabrication July 13th, 2018

UMBC researchers develop nanoparticles to reduce internal bleeding caused by blast trauma July 13th, 2018

Thin films

New optical sensor can determine if molecules are left or right 'handed' June 13th, 2018

Organic solar cells reach record efficiency, benchmark for commercialization April 23rd, 2018

High efficiency solar power conversion allowed by a novel composite material: A composite thin film developed at INRS improves significantly solar cells' power conversion efficiency April 10th, 2018

Researchers develop nanoparticle films for high-density data storage: April 3rd, 2018

Chip Technology

Tuning into quantum: Scientists unlock signal frequency control of precision atom qubits July 16th, 2018

Nanometrics to Announce Second Quarter Financial Results on July 31, 2018 July 12th, 2018

Leti and Soitec Launch a New Substrate Innovation Center to Develop Engineered Substrate Solutions: Industry-inclusive hub promotes early collaboration and learning from substrate to system level July 11th, 2018

GLOBALFOUNDRIES Surpasses $2 Billion in Design Win Revenue on 22FDX Technology : With 50 client designs and growing, 22FDX proves its value as a cost-effective solution for power-sensitive applications July 9th, 2018

Nanotubes/Buckyballs/Fullerenes/Nanorods

Carbon is the new black: Researchers use carbon nanotubes to develop clothing that can double as batteries July 10th, 2018

Nano-saturn: Supramolecular complex formation: Anthracene macrocycle and C60 fullerene June 8th, 2018

Unzipping graphene nanotubes into nanoribbons: New study shows elegant mathematical solution to understand how the flow of electrons changes when carbon nanotubes turn into zigzag nanoribbons June 6th, 2018

Making carbon nanotubes as usable as common plastics: Researchers discover that cresols disperse carbon nanotubes at unprecedentedly high concentrations May 15th, 2018

Nanoelectronics

GLOBALFOUNDRIES Surpasses $2 Billion in Design Win Revenue on 22FDX Technology : With 50 client designs and growing, 22FDX proves its value as a cost-effective solution for power-sensitive applications July 9th, 2018

High-power electronics keep their cool with new heat-conducting crystals July 6th, 2018

Leti Presenting Strategic Vision and Hosting a Workshop at SEMICON West: From Electrons to Photons Leti Workshop and CEO Media Briefing Set for Tuesday, July 10 in W Hotel, San Francisco June 12th, 2018

Quantum Interference May Be Key to Smaller Insulators: Breakthrough could jumpstart further miniaturization of transistors June 6th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project