Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Carbon Nanotubes and Semiconductor Nanowires for Microelectronics

Abstract:
The continuous downscaling of feature sizes in microelectronics according to Moore's law has already required the introduction of several "non-conventional" materials into the semiconductor manufacturing industry in recent years, such as Cu, high- and low- k dielectrics, etc.

Carbon Nanotubes and Semiconductor Nanowires for Microelectronics

UK | Posted on December 9th, 2009

For very advanced technology nodes (i.e.towards the 16nm node), bottom-up grown nanomaterials are also being considered for their potential as building blocks of devices and interconnections. Nanomaterials would not necessarily directly contribute to higher device densities, but their unique properties may solve specific issues linked to downscaling and would certainly enable a number of new device concepts and architectures.

Carbon Nanotubes (CNTs) and semiconductor Nanowires (NWs) are generally bottomup grown in a catalysed chemical vapour deposition (CCVD) fashion, i.e. with the mediation of metal nanoparticles. The formation of such nanoparticles by breaking up a thin catalyst film on the substrate, and the particle pre-growth treatment are key steps of the global growth process, which would literally only start when the precursor gases are brought into the chamber (Fig.1).

For microelectronics applications, it is essential that the growth process stays compatible with Si technology in terms of materials, tools and processes used, and also that it can be realised on wafer -scale. CNTs are mostly being considered as possible interconnects material, as replacement of Cu interconnects. The characteristic ballistic conduction of metallic CNTs, together with their high thermal conductivity (about 6000 W K m-1, compared to 400 W K m-1 for Cu), makes them particularly interesting for vertical interconnects in small vias (10 nm diameter and below) with high aspect ratios. The most favourable configuration would be the growth of high density single wall carbon nanotubes, although also multi-wall nanotubes would lead to an improvement as compared to Cu.

As shown in Fig.2, a high density (~1012 CNTs/cm2) carpet of aligned CNTs with a few nm diameter was grown at 650ºC in a PlasmalabSystem100, starting from a Fe/Ti bilayer catalyst. The plasma pre-treatment of the particles is key to such high density growth.

Semiconductor nanowires are ideal building blocks for both logics and memory devices. Their vertical wire geometry allows excellent control on the electrical field in the channel of a nanowire-based transistor thanks to the all-around gate. Also, the growth of segmented nanowires would enable the formation of high quality hetero-junctions of mismatched semiconductors, thanks to favourable elastic and plastic relaxation phenomena at the nanoscale. On the other hand, NWs are generally grown using Au catalyst particles. Au is a killer impurity in Si technology, and trials to use other metal catalysts have not been as successful. In Fig.3 we show the feasibility of Si NWs growth from indium nanoparticles, again in a PlasmalabSystem100. Indium is not an efficient chemical catalyst for the Si precursor dissociation, so the use of plasma-enhanced CVD growth, following a plasma-based particle pre-growth treatment of the In particles, is essential for a successful In -mediated nanowire growth.

Author: Francesca Iacopi, PhD, Senior Scientist, IMEC

(see full release for all three figures)

####

About Oxford Instruments
Oxford Instruments is a worldwide business supplying high technology tools and systems for the analysis and manipulation of matter at the smallest scale. Our diverse markets include industrial analysis, research, education, space, and energy.

For more information, please click here

Copyright © Oxford Instruments

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Ultracold atom waves may shed light on rogue ocean killers: Rice quantum experiments probe underlying physics of rogue ocean waves April 27th, 2017

Looking for the quantum frontier: Beyond classical computing without fault-tolerance? April 27th, 2017

Metal nanoparticles induced visible-light photocatalysis: Mechanisms, applications, ways of promoting catalytic activity and outlook April 27th, 2017

Arrowhead Pharmaceuticals to Webcast Fiscal 2017 Second Quarter Results April 27th, 2017

Thin films

Nanomechanics, Inc. Unveils New Product at ICMCTF Show April 25th: Nanoindentation experts will launch the new Gemini that measures the interaction of two objects that are sliding across each other – not merely making contact April 21st, 2017

Nanomechanics Inc. President Warren Oliver, PhD to Present at ICMCTF: Nanoindentation experts will discuss new testing system that measures the interaction of two objects that are sliding across each other – not merely making contact April 17th, 2017

Bio-inspired energy storage: A new light for solar power: Graphene-based electrode prototype, inspired by fern leaves, could be the answer to solar energy storage challenge April 2nd, 2017

Dual-function nanorod LEDs could make multifunctional displays February 11th, 2017

Chip Technology

Geoffrey Beach: Drawn to explore magnetism: Materials researcher is working on the magnetic memory of the future April 25th, 2017

'Neuron-reading' nanowires could accelerate development of drugs for neurological diseases April 12th, 2017

Nanometrics to Announce First Quarter Financial Results on May 2, 2017 April 11th, 2017

AIM Photonics Presents Cutting-Edge Integrated Photonics Technology Developments to Packed House at OFC 2017, the Optical Networking and Communication Conference & Exhibition April 11th, 2017

Nanotubes/Buckyballs/Fullerenes

Nanotubes that build themselves April 14th, 2017

Intertronics introduce new nanoparticle deagglomeration technology March 15th, 2017

Boron atoms stretch out, gain new powers: Rice University simulations demonstrate 1-D material's stiffness, electrical versatility January 26th, 2017

New stem cell technique shows promise for bone repair January 25th, 2017

Nanoelectronics

Researchers “iron out” graphene’s wrinkles: New technique produces highly conductive graphene wafers April 3rd, 2017

A big leap toward tinier lines: Self-assembly technique could lead to long-awaited, simple method for making smaller microchip patterns March 27th, 2017

Scientists discover new 'boat' form of promising semiconductor: GeSe Uncommon form attenuates semiconductor's band gap size March 23rd, 2017

UC researchers use gold coating to control luminescence of nanowires: University of Cincinnati physicists manipulate nanowire semiconductors in pursuit of making electronics smaller, faster and cheaper March 17th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project