Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Semiconductor Research Corporation and Stanford University Demonstrate Advance That Could Extend Life of Cost-Effective Semiconductor Manufacturing

Abstract:
Semiconductor Research Corporation (SRC), the world's leading university-research consortium for semiconductors and related technologies, and researchers from Stanford University and Taiwan Semiconductor Manufacturing Company (TSMC) today announced they have developed the industry's first top-gated field effect transistor (FETs) and CMOS inverters featuring 20 nanometer (nm) contact holes using diblock copolymer lithography. This advance could help extend the manufacturability of semiconductors beyond conventional lithography methods, with the potential for enabling electronics makers to meet the demand for smaller, faster and cheaper devices.

Semiconductor Research Corporation and Stanford University Demonstrate Advance That Could Extend Life of Cost-Effective Semiconductor Manufacturing

Research Triangle Park, NC | Posted on December 7th, 2009

The ever-shrinking lithography processes for semiconductors have produced dramatic size, speed and cost benefits for the electronics industry. However, the industry faces certain physical and economic constraints as it moves to smaller transistor scales, or nodes. In particular, the industry has yet to find a manufacturing solution to patterning feature sizes beyond the 22nm node.

In recent years, researchers have begun to look at block copolymers, an organic material that is compatible with conventional semiconductor manufacturing processes, because a thin film of it, under the right conditions, can self-assemble into regular arrays of holes on the order of 20nm or smaller in diameter. This tiny, self-assembled swiss cheese of block copolymer can act as a stencil for creating electrical contacts to very small semiconductor devices.

Previous attempts at using block polymers have fallen short because the self-assembled holes were not aligned to existing electrical features on the semiconductor wafer. Now, the SRC-sponsored work by researchers from Stanford University and TSMC has produced the industry's first functional devices and circuits that employ diblock copolymer patterning for sub-22nm CMOS technologies on a full wafer scale.

"We believe this development will help to bring self-assembly closer to broad application in the semiconductor industry and will help increase the use of nanotechnology for advancements in electronics for years to come," said H.-S. Philip Wong, a professor of Electrical Engineering at Stanford University.

"Professor Wong's work demonstrates that diblock copolymers, via directed self-assembly, can enable several key integration steps in the fabrication of nanoscale devices," said Dan Herr, SRC director of Nanomanufacturing Sciences.

The research is expected to catalyze further innovations in the area of extensible nanomanufacturing and possibly be integrated into the manufacturing process in the next seven to 10 years.

More information about the research and results will be published in a paper entitled "Top-Gated FETs/Inverters with Diblock Copolymer Self-Assembled 20nm Contact Holes" and presented at IEEE's 2009 International Electron Devices Meeting in Baltimore, Md., on December 9. The paper is co-authored by graduate student, Li-Wen Chang and H.-S. Philip Wong of Stanford University, and T.L. Lee, Clement H. Wann, and C.Y. Chang of TSMC.

####

About Semiconductor Research Corporation
Celebrating 27 years of collaborative research for the semiconductor industry, SRC defines industry needs, invests in and manages the research that gives its members a competitive advantage in the dynamic global marketplace. Awarded the National Medal of Technology, America’s highest recognition for contributions to technology, SRC expands the industry knowledge base and attracts premier students to help innovate and transfer semiconductor technology to the commercial industry.

For more information, please click here

Contacts:
Semiconductor Research Corporation
PO Box 12053
Research Triangle Park, NC 27709-2053
Phone: (919) 941-9400
Fax: (919) 941-9450

Copyright © Business Wire

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Relieving electric vehicle range anxiety with improved batteries: Lithium-sulfur batteries last longer with nanomaterial-packed cathode April 16th, 2014

Aerotech X-Y ball-screw stage for economical high performance Planar positioning April 16th, 2014

Energy Research Facility Construction Project at Brookhaven Lab Wins U.S. Energy Secretary's Achievement Award April 16th, 2014

Malvern reports on the publication of the 1000th peer-reviewed paper to cite NanoSight’s Nanoparticle Tracking Analysis, NTA April 16th, 2014

Possible Futures

Virus structure inspires novel understanding of onion-like carbon nanoparticles April 10th, 2014

Local girl does good March 22nd, 2014

Surface Characteristics Influence Cellular Growth on Semiconductor Material March 12th, 2014

The "Tipping Point" February 12th, 2014

Chip Technology

Scientists open door to better solar cells, superconductors and hard-drives: Research enhances understanding of materials interfaces April 14th, 2014

Obducat has launched a new generation of SINDRE® Nano Imprint production system April 11th, 2014

Scientists in Singapore develop novel ultra-fast electrical circuits using light-generated tunneling currents April 10th, 2014

Clean Shot at Manufacturing Course…For Less April 9th, 2014

Self Assembly

Roomy cages built from DNA: Self-assembling cages are the largest standalone 3-D DNA structures yet, and could one day deliver drugs, or house tiny bioreactors or photonic devices March 13th, 2014

Cypress’s TrueTouch® Touchscreen Controllers Compatible with Cima NanoTech’s SANTE® Silver Nanoparticle-Based Touch Sensors: Supporting Designs for Advanced Touch Applications March 5th, 2014

Coupled carbon and peptide nanotubes achieved for the first time: twins nanotubes March 1st, 2014

A potentially revolutionnary material: Scientists produce a novel form of artificial graphene February 15th, 2014

Nanoelectronics

Better solar cells, better LED light and vast optical possibilities April 12th, 2014

Catching the (Invisible) Wave: UC Santa Barbara researchers create a unique semiconductor that manipulates light in the invisible infrared/terahertz range, paving the way for new and enhanced applications April 11th, 2014

Nanotech Business Review 2013-2014 April 9th, 2014

Preview of Hands-on Nanotechnology Demos at ‘Chemistry of Wine’ Fundraiser to Show Nanotech Magic April 8th, 2014

Announcements

Relieving electric vehicle range anxiety with improved batteries: Lithium-sulfur batteries last longer with nanomaterial-packed cathode April 16th, 2014

Aerotech X-Y ball-screw stage for economical high performance Planar positioning April 16th, 2014

Energy Research Facility Construction Project at Brookhaven Lab Wins U.S. Energy Secretary's Achievement Award April 16th, 2014

Malvern reports on the publication of the 1000th peer-reviewed paper to cite NanoSight’s Nanoparticle Tracking Analysis, NTA April 16th, 2014

Alliances/Partnerships/Distributorships

Virus structure inspires novel understanding of onion-like carbon nanoparticles April 10th, 2014

Peer Reviewed and Approved for Science by the the Washington Academy of Sciences April 3rd, 2014

New JEOL-Nikon MiXcroscopy Correlative Imaging Solution March 27th, 2014

Quantum Dots Take Center Stage at Inaugural Event: QD Vision Co-Founder and CTO Dr. Seth Coe-Sullivan to Chair First Quantum Dots Forum, March 26, 2014, San Diego, CA March 25th, 2014

NanoNews-Digest
The latest news from around the world, FREE







  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE