Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Semiconductor Research Corporation and Stanford University Demonstrate Advance That Could Extend Life of Cost-Effective Semiconductor Manufacturing

Abstract:
Semiconductor Research Corporation (SRC), the world's leading university-research consortium for semiconductors and related technologies, and researchers from Stanford University and Taiwan Semiconductor Manufacturing Company (TSMC) today announced they have developed the industry's first top-gated field effect transistor (FETs) and CMOS inverters featuring 20 nanometer (nm) contact holes using diblock copolymer lithography. This advance could help extend the manufacturability of semiconductors beyond conventional lithography methods, with the potential for enabling electronics makers to meet the demand for smaller, faster and cheaper devices.

Semiconductor Research Corporation and Stanford University Demonstrate Advance That Could Extend Life of Cost-Effective Semiconductor Manufacturing

Research Triangle Park, NC | Posted on December 7th, 2009

The ever-shrinking lithography processes for semiconductors have produced dramatic size, speed and cost benefits for the electronics industry. However, the industry faces certain physical and economic constraints as it moves to smaller transistor scales, or nodes. In particular, the industry has yet to find a manufacturing solution to patterning feature sizes beyond the 22nm node.

In recent years, researchers have begun to look at block copolymers, an organic material that is compatible with conventional semiconductor manufacturing processes, because a thin film of it, under the right conditions, can self-assemble into regular arrays of holes on the order of 20nm or smaller in diameter. This tiny, self-assembled swiss cheese of block copolymer can act as a stencil for creating electrical contacts to very small semiconductor devices.

Previous attempts at using block polymers have fallen short because the self-assembled holes were not aligned to existing electrical features on the semiconductor wafer. Now, the SRC-sponsored work by researchers from Stanford University and TSMC has produced the industry's first functional devices and circuits that employ diblock copolymer patterning for sub-22nm CMOS technologies on a full wafer scale.

"We believe this development will help to bring self-assembly closer to broad application in the semiconductor industry and will help increase the use of nanotechnology for advancements in electronics for years to come," said H.-S. Philip Wong, a professor of Electrical Engineering at Stanford University.

"Professor Wong's work demonstrates that diblock copolymers, via directed self-assembly, can enable several key integration steps in the fabrication of nanoscale devices," said Dan Herr, SRC director of Nanomanufacturing Sciences.

The research is expected to catalyze further innovations in the area of extensible nanomanufacturing and possibly be integrated into the manufacturing process in the next seven to 10 years.

More information about the research and results will be published in a paper entitled "Top-Gated FETs/Inverters with Diblock Copolymer Self-Assembled 20nm Contact Holes" and presented at IEEE's 2009 International Electron Devices Meeting in Baltimore, Md., on December 9. The paper is co-authored by graduate student, Li-Wen Chang and H.-S. Philip Wong of Stanford University, and T.L. Lee, Clement H. Wann, and C.Y. Chang of TSMC.

####

About Semiconductor Research Corporation
Celebrating 27 years of collaborative research for the semiconductor industry, SRC defines industry needs, invests in and manages the research that gives its members a competitive advantage in the dynamic global marketplace. Awarded the National Medal of Technology, America’s highest recognition for contributions to technology, SRC expands the industry knowledge base and attracts premier students to help innovate and transfer semiconductor technology to the commercial industry.

For more information, please click here

Contacts:
Semiconductor Research Corporation
PO Box 12053
Research Triangle Park, NC 27709-2053
Phone: (919) 941-9400
Fax: (919) 941-9450

Copyright © Business Wire

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Using ultrathin sheets to discover new class of wrapped shapes: UMass Amherst materials researchers describe a new regime of wrapped shapes August 31st, 2015

New material science research may advance tech tools August 31st, 2015

Efficiency of Nanodrug Containing Antibiotics in Treatment of Infectious Diseases Evaluated August 31st, 2015

Researchers use DNA 'clews' to shuttle CRISPR-Cas9 gene-editing tool into cells August 30th, 2015

Possible Futures

Sediment dwelling creatures at risk from nanoparticles in common household products August 13th, 2015

Harris & Harris Group Reports Financial Statements as of June 30, 2015, and Announces a Stock Repurchase Program August 10th, 2015

Molecular trick alters rules of attraction for non-magnetic metals August 5th, 2015

Global Carbon Nanotubes Industry 2015: Acute Market Reports August 4th, 2015

Chip Technology

Nanometrics to Participate in the Citi 2015 Global Technology Conference August 26th, 2015

Kwansei Gakuin University in Hyogo, Japan, uses Raman microscopy to study crystallographic defects in silicon carbide wafers August 25th, 2015

A little light interaction leaves quantum physicists beaming August 25th, 2015

'Magic' sphere for information transfer: Professor at the Lomonosov Moscow State University made the «magic» sphere for information transfer August 24th, 2015

Self Assembly

Louisiana Tech University researchers discover synthesis of a new nanomaterial: Interdisciplinary team creates biocomposite for first time using physiological conditions August 24th, 2015

Novel nanostructures for efficient long-range energy transport August 21st, 2015

Biophysics: Formation of swarms in nanosystems August 18th, 2015

Self-assembling, biomimetic membranes may aid water filtration August 1st, 2015

Nanoelectronics

Nanotechnology that will impact the Security & Defense sectors to be discussed at NanoSD2015 conference August 25th, 2015

'Quantum dot' technology may help light the future August 19th, 2015

Surprising discoveries about 2-D molybdenum disulfide: Berkeley Lab researchers use award-winning campanile probe on promising semiconductor August 15th, 2015

Better together: Graphene-nanotube hybrid switches August 3rd, 2015

Announcements

Using ultrathin sheets to discover new class of wrapped shapes: UMass Amherst materials researchers describe a new regime of wrapped shapes August 31st, 2015

An engineered surface unsticks sticky water droplets August 31st, 2015

New material science research may advance tech tools August 31st, 2015

Efficiency of Nanodrug Containing Antibiotics in Treatment of Infectious Diseases Evaluated August 31st, 2015

Alliances/Trade associations/Partnerships/Distributorships

National Space Society Welcomes Janet Ivey As New NSS Governor: Janet Ivey of Janet's Planet is NOW IN ORBIT as a member of the Board of Governors of the National Space Society August 27th, 2015

National Space Society Welcomes Geoff Notkin As New NSS Governor August 26th, 2015

XEI Scientific appoints EM Resolutions as Distributor for the UK & Irish markets August 11th, 2015

Omni Nano and Time Warner Cable Partner to Provide Nanotechnology Education to the Boys & Girls Clubs of Los Angeles: A $10,000 Donation to Benefit Youth of Los Angeles County's Boys & Girls Clubs August 4th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic