Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Semiconductor Research Corporation and Stanford University Demonstrate Advance That Could Extend Life of Cost-Effective Semiconductor Manufacturing

Abstract:
Semiconductor Research Corporation (SRC), the world's leading university-research consortium for semiconductors and related technologies, and researchers from Stanford University and Taiwan Semiconductor Manufacturing Company (TSMC) today announced they have developed the industry's first top-gated field effect transistor (FETs) and CMOS inverters featuring 20 nanometer (nm) contact holes using diblock copolymer lithography. This advance could help extend the manufacturability of semiconductors beyond conventional lithography methods, with the potential for enabling electronics makers to meet the demand for smaller, faster and cheaper devices.

Semiconductor Research Corporation and Stanford University Demonstrate Advance That Could Extend Life of Cost-Effective Semiconductor Manufacturing

Research Triangle Park, NC | Posted on December 7th, 2009

The ever-shrinking lithography processes for semiconductors have produced dramatic size, speed and cost benefits for the electronics industry. However, the industry faces certain physical and economic constraints as it moves to smaller transistor scales, or nodes. In particular, the industry has yet to find a manufacturing solution to patterning feature sizes beyond the 22nm node.

In recent years, researchers have begun to look at block copolymers, an organic material that is compatible with conventional semiconductor manufacturing processes, because a thin film of it, under the right conditions, can self-assemble into regular arrays of holes on the order of 20nm or smaller in diameter. This tiny, self-assembled swiss cheese of block copolymer can act as a stencil for creating electrical contacts to very small semiconductor devices.

Previous attempts at using block polymers have fallen short because the self-assembled holes were not aligned to existing electrical features on the semiconductor wafer. Now, the SRC-sponsored work by researchers from Stanford University and TSMC has produced the industry's first functional devices and circuits that employ diblock copolymer patterning for sub-22nm CMOS technologies on a full wafer scale.

"We believe this development will help to bring self-assembly closer to broad application in the semiconductor industry and will help increase the use of nanotechnology for advancements in electronics for years to come," said H.-S. Philip Wong, a professor of Electrical Engineering at Stanford University.

"Professor Wong's work demonstrates that diblock copolymers, via directed self-assembly, can enable several key integration steps in the fabrication of nanoscale devices," said Dan Herr, SRC director of Nanomanufacturing Sciences.

The research is expected to catalyze further innovations in the area of extensible nanomanufacturing and possibly be integrated into the manufacturing process in the next seven to 10 years.

More information about the research and results will be published in a paper entitled "Top-Gated FETs/Inverters with Diblock Copolymer Self-Assembled 20nm Contact Holes" and presented at IEEE's 2009 International Electron Devices Meeting in Baltimore, Md., on December 9. The paper is co-authored by graduate student, Li-Wen Chang and H.-S. Philip Wong of Stanford University, and T.L. Lee, Clement H. Wann, and C.Y. Chang of TSMC.

####

About Semiconductor Research Corporation
Celebrating 27 years of collaborative research for the semiconductor industry, SRC defines industry needs, invests in and manages the research that gives its members a competitive advantage in the dynamic global marketplace. Awarded the National Medal of Technology, America’s highest recognition for contributions to technology, SRC expands the industry knowledge base and attracts premier students to help innovate and transfer semiconductor technology to the commercial industry.

For more information, please click here

Contacts:
Semiconductor Research Corporation
PO Box 12053
Research Triangle Park, NC 27709-2053
Phone: (919) 941-9400
Fax: (919) 941-9450

Copyright © Business Wire

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

The random raman laser: A new light source for the microcosmos May 4th, 2015

Defects in atomically thin semiconductor emit single photons: Researchers create optically active quantum dots in 2-D semiconductor for the first time; may have applications for integrated photonics May 4th, 2015

Arrowhead to Report Fiscal 2015 Second Quarter Financial Results May 4th, 2015

From brittle to plastic in 1 breath: Rice University theorists show environments can alter 2-D materials' basic properties May 4th, 2015

Possible Futures

Printing Silicon on Paper, with Lasers April 21st, 2015

A glass fiber that brings light to a standstill: By coupling photons to atoms, light in a glass fiber can be slowed down to the speed of an express train; for a short while it can even be brought to a complete stop April 9th, 2015

Nanotechnology in Medical Devices Market is expected to reach $8.5 Billion by 2019 March 25th, 2015

Nanotechnology Enabled Drug Delivery to Influence Future Diagnosis and Treatments of Diseases March 21st, 2015

Chip Technology

Defects in atomically thin semiconductor emit single photons: Researchers create optically active quantum dots in 2-D semiconductor for the first time; may have applications for integrated photonics May 4th, 2015

From brittle to plastic in 1 breath: Rice University theorists show environments can alter 2-D materials' basic properties May 4th, 2015

Nanometrics to Present at the B. Riley & Co. 16th Annual Investor Conference May 2nd, 2015

SUNY Poly and Sematech Announce Air Products Joins Cutting-Edge CMP Center At Albany Nanotech Complex April 28th, 2015

Self Assembly

Scientists Use Nanoscale Building Blocks and DNA 'Glue' to Shape 3D Superlattices: New approach to designing ordered composite materials for possible energy applications April 23rd, 2015

Advances in molecular electronics: Lights on -- molecule on: Researchers from Dresden and Konstanz succeed in light-controlled molecule switching April 20th, 2015

Carnegie Mellon chemists create tiny gold nanoparticles that reflect nature's patterns April 9th, 2015

DWI scientists program the lifetime of self-assembled nanostructures April 9th, 2015

Nanoelectronics

Surface matters: Huge reduction of heat conduction observed in flat silicon channels April 23rd, 2015

New class of 3D-printed aerogels improve energy storage April 22nd, 2015

‘Oxford Instruments Young Nanoscientist India Award 2015’ to Prof. Arindam Ghosh April 20th, 2015

Advances in molecular electronics: Lights on -- molecule on: Researchers from Dresden and Konstanz succeed in light-controlled molecule switching April 20th, 2015

Announcements

Defects in atomically thin semiconductor emit single photons: Researchers create optically active quantum dots in 2-D semiconductor for the first time; may have applications for integrated photonics May 4th, 2015

Arrowhead to Report Fiscal 2015 Second Quarter Financial Results May 4th, 2015

From brittle to plastic in 1 breath: Rice University theorists show environments can alter 2-D materials' basic properties May 4th, 2015

Nanoparticles in consumer products can significantly alter normal gut microbiome May 4th, 2015

Alliances/Partnerships/Distributorships

How can you see an atom? (video) April 10th, 2015

FibeRio and VF Corporation Form Strategic Partnership to Lead the Apparel and Footwear Markets in Nanofiber Technology April 8th, 2015

UK National Graphene Institute Selects Bruker as Official Partner: World-Leading Graphene Research Facility Purchases Multiple Bruker AFMs April 7th, 2015

NXP and GLOBALFOUNDRIES Announce Production of 40nm Embedded Non-Volatile Memory Technology: Co-developed technology to leverage GLOBALFOUNDRIES 40nm process technology platform March 24th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project