Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > New Photolithography Technique Advances Nanofabrication Process

Schematic depictions of RAPID lithography, the technique developed by John Fourkas and colleagues which enables the creation of features 2500 times smaller than the width of a human hair.
Schematic depictions of RAPID lithography, the technique developed by John Fourkas and colleagues which enables the creation of features 2500 times smaller than the width of a human hair.

Abstract:
The ability to create tiny patterns is essential to the fabrication of computer chips as well as to many other current and potential applications of nanotechnology. Yet, creating ever smaller features, through a process called photolithography, has required the use of ultraviolet light, which is difficult and expensive to work with. John Fourkas, Professor of Chemistry and Biochemistry in the University of Maryland College of Chemical and Life Sciences, and his research group have developed a new, table-top technique called RAPID (Resolution Augmentation through Photo-Induced Deactivation) lithography that makes it possible to create small features without the use of ultraviolet light. This research is to be published in Science magazine and released on Science Express on April 9, 2009.

New Photolithography Technique Advances Nanofabrication Process

College Park, MD | Posted on April 15th, 2009

Photolithography uses light to deposit or remove material and create patterns on a surface. There is usually a direct relationship between the wavelength of light used and the feature size created. Therefore, nanofabrication has depended on short wavelength ultraviolet light to generate ever smaller features.

"The RAPID lithography technique we have developed enables us to create patterns twenty times smaller than the wavelength of light employed," explains Dr. Fourkas, "which means that it streamlines the nanofabrication process. We expect RAPID to find many applications in areas such as electronics, optics, and biomedical devices."

"If you have gotten a filling at the dentist in recent years," says Fourkas, "you have seen that a viscous liquid is squirted into the cavity and a blue light is then used to harden it. A similar process of hardening using light is the first element of RAPID. Now imagine that your dentist could use a second light source to sculpt the filling by preventing it from hardening in certain places. We have developed a way of using a second light source to perform this sculpting, and it allows us to create features that are 2500 times smaller than the width of a human hair."

Both of the laser light sources used by Fourkas and his team were of the same color, the only difference being that the laser used to harden the material produced short bursts of light while the laser used to prevent hardening was on constantly. The second laser beam also passed through a special optic that allowed for sculpting of the hardened features in the desired shape.

"The fact that one laser is on constantly in RAPID makes this technique particularly easy to implement," says Fourkas, "because there is no need to control the timing between two different pulsed lasers."

Fourkas and his team are currently working on improvements to RAPID lithography that they believe will make it possible to create features that are half of the size of the ones they have demonstrated to date.

Achieving lambda/20 Resolution by One-Color Initiation and Deactivation of Polymerization was written by Linjie Li, Rafael R. Gattass, Erez Gershgorem, Hana Hwang and John T. Fourkas.

####

For more information, please click here

Contacts:
College of Chemical & Life Science
University of Maryland
College Park, MD 20742

Copyright © University of Maryland

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

University of Tehran Researchers Invent Non-Enzyme Sensor to Detect Blood Sugar April 23rd, 2014

Gold nanoparticles help target, quantify breast cancer gene segments in a living cell April 23rd, 2014

Study finds long-term survival of human neural stem cells transplanted into primate brain April 23rd, 2014

High-Performance, Low-Cost Ultracapacitors Built with Graphene and Carbon Nanotubes: Future devices based on technology could bridge gap between batteries and conventional capacitors in portable electronics and hybrid electric vehicles April 23rd, 2014

Videos/Movies

Like a hall of mirrors, nanostructures trap photons inside ultrathin solar cells April 22nd, 2014

Tiny particles could help verify goods: Chemical engineers hope smartphone-readable microparticles could crack down on counterfeiting April 15th, 2014

Biologists Develop Nanosensors to Visualize Movements and Distribution of Plant Stress Hormone April 15th, 2014

Director Wally Pfister joins UC Berkeley neuroengineers to discuss the science behind ‘Transcendence’ April 7th, 2014

Chip Technology

Harris & Harris Group Notes the Receipt of Proceeds From the Sale of Molecular Imprints' Semiconductor Business to Canon April 22nd, 2014

Progress made in developing nanoscale electronics: New research directs charges through single molecules April 21st, 2014

'Exotic' material is like a switch when super thin April 18th, 2014

Scientists open door to better solar cells, superconductors and hard-drives: Research enhances understanding of materials interfaces April 14th, 2014

Discoveries

University of Tehran Researchers Invent Non-Enzyme Sensor to Detect Blood Sugar April 23rd, 2014

Gold nanoparticles help target, quantify breast cancer gene segments in a living cell April 23rd, 2014

Atomic switcheroo explains origins of thin-film solar cell mystery April 23rd, 2014

Characterizing inkjet inks: Malvern Instruments presents new rheological research April 23rd, 2014

Announcements

Characterizing inkjet inks: Malvern Instruments presents new rheological research April 23rd, 2014

NanoSafe, Inc. announces the addition of the Labconco Protector® Glove Box to its NanoSafe Tested™ registry April 23rd, 2014

Study finds long-term survival of human neural stem cells transplanted into primate brain April 23rd, 2014

High-Performance, Low-Cost Ultracapacitors Built with Graphene and Carbon Nanotubes: Future devices based on technology could bridge gap between batteries and conventional capacitors in portable electronics and hybrid electric vehicles April 23rd, 2014

Printing/Lithography/Inkjet

Characterizing inkjet inks: Malvern Instruments presents new rheological research April 23rd, 2014

Conductive Inks: booming to $2.8 billion by 2024 April 17th, 2014

Transparent Conductive Films and Sensors Are Hot Segments in Printed Electronics: Start-ups in these fields show above-average momentum, while companies working on emissive displays such as OLED are fading, Lux Research says April 17th, 2014

Obducat has launched a new generation of SINDRE® Nano Imprint production system April 11th, 2014

NanoNews-Digest
The latest news from around the world, FREE







  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE