Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > New Photolithography Technique Advances Nanofabrication Process

Schematic depictions of RAPID lithography, the technique developed by John Fourkas and colleagues which enables the creation of features 2500 times smaller than the width of a human hair.
Schematic depictions of RAPID lithography, the technique developed by John Fourkas and colleagues which enables the creation of features 2500 times smaller than the width of a human hair.

Abstract:
The ability to create tiny patterns is essential to the fabrication of computer chips as well as to many other current and potential applications of nanotechnology. Yet, creating ever smaller features, through a process called photolithography, has required the use of ultraviolet light, which is difficult and expensive to work with. John Fourkas, Professor of Chemistry and Biochemistry in the University of Maryland College of Chemical and Life Sciences, and his research group have developed a new, table-top technique called RAPID (Resolution Augmentation through Photo-Induced Deactivation) lithography that makes it possible to create small features without the use of ultraviolet light. This research is to be published in Science magazine and released on Science Express on April 9, 2009.

New Photolithography Technique Advances Nanofabrication Process

College Park, MD | Posted on April 15th, 2009

Photolithography uses light to deposit or remove material and create patterns on a surface. There is usually a direct relationship between the wavelength of light used and the feature size created. Therefore, nanofabrication has depended on short wavelength ultraviolet light to generate ever smaller features.

"The RAPID lithography technique we have developed enables us to create patterns twenty times smaller than the wavelength of light employed," explains Dr. Fourkas, "which means that it streamlines the nanofabrication process. We expect RAPID to find many applications in areas such as electronics, optics, and biomedical devices."

"If you have gotten a filling at the dentist in recent years," says Fourkas, "you have seen that a viscous liquid is squirted into the cavity and a blue light is then used to harden it. A similar process of hardening using light is the first element of RAPID. Now imagine that your dentist could use a second light source to sculpt the filling by preventing it from hardening in certain places. We have developed a way of using a second light source to perform this sculpting, and it allows us to create features that are 2500 times smaller than the width of a human hair."

Both of the laser light sources used by Fourkas and his team were of the same color, the only difference being that the laser used to harden the material produced short bursts of light while the laser used to prevent hardening was on constantly. The second laser beam also passed through a special optic that allowed for sculpting of the hardened features in the desired shape.

"The fact that one laser is on constantly in RAPID makes this technique particularly easy to implement," says Fourkas, "because there is no need to control the timing between two different pulsed lasers."

Fourkas and his team are currently working on improvements to RAPID lithography that they believe will make it possible to create features that are half of the size of the ones they have demonstrated to date.

Achieving lambda/20 Resolution by One-Color Initiation and Deactivation of Polymerization was written by Linjie Li, Rafael R. Gattass, Erez Gershgorem, Hana Hwang and John T. Fourkas.

####

For more information, please click here

Contacts:
College of Chemical & Life Science
University of Maryland
College Park, MD 20742

Copyright © University of Maryland

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Future flexible electronics based on carbon nanotubes: Study in Applied Physics Letters show how to improve nanotube transistor and circuit performance with fluoropolymers September 23rd, 2014

Nanotubes help healing hearts keep the beat: Rice University, Texas Children’s Hospital patch for defects enhances electrical connections between cells September 23rd, 2014

Immune system is key ally in cyberwar against cancer: Rice University study yields new two-step strategy for weakening cancer September 23rd, 2014

Los Alamos Researchers Uncover New Properties in Nanocomposite Oxide Ceramics for Reactor Fuel, Fast-Ion Conductors: Misfit dislocations are key to transport properties across material interfaces September 23rd, 2014

Videos/Movies

Smallest possible diamonds form ultra-thin nanothreads: Diamond nanothreads are likely to have extraordinary properties, including strength and stiffness greater than that of today's strongest nanotubes and polymers September 22nd, 2014

Next-Gen Luxury RV From Global Caravan Technologies Will Offer MagicView Roof and Windshield Using SPD-SmartGlass Technology From Research Frontiers: Recreational Vehicle Manufacturer Global Caravan Technologies (GCT) Features 28 Square Feet of MagicView™ SPD-SmartGlass September 17th, 2014

Scientists refine formula for nanotube types: Rice University theorists determine factors that give tubes their chiral angles September 17th, 2014

RMIT delivers $30m boost to micro and nano-tech August 26th, 2014

Chip Technology

Future flexible electronics based on carbon nanotubes: Study in Applied Physics Letters show how to improve nanotube transistor and circuit performance with fluoropolymers September 23rd, 2014

Twisted graphene chills out: When two sheets of graphene are stacked in a special way, it is possible to cool down the graphene with a laser instead of heating it up, University of Manchester researchers have shown September 22nd, 2014

SouthWest NanoTechnologies (SWeNT) Receives NIST Small Business Innovation Research (SBIR) Phase 1 Award to Produce Greater than 99% Semiconducting Single-Wall Carbon Nanotubes September 19th, 2014

Toward optical chips: A promising light source for optoelectronic chips can be tuned to different frequencies September 19th, 2014

Discoveries

Future flexible electronics based on carbon nanotubes: Study in Applied Physics Letters show how to improve nanotube transistor and circuit performance with fluoropolymers September 23rd, 2014

Nanotubes help healing hearts keep the beat: Rice University, Texas Children’s Hospital patch for defects enhances electrical connections between cells September 23rd, 2014

Immune system is key ally in cyberwar against cancer: Rice University study yields new two-step strategy for weakening cancer September 23rd, 2014

Los Alamos Researchers Uncover New Properties in Nanocomposite Oxide Ceramics for Reactor Fuel, Fast-Ion Conductors: Misfit dislocations are key to transport properties across material interfaces September 23rd, 2014

Announcements

Future flexible electronics based on carbon nanotubes: Study in Applied Physics Letters show how to improve nanotube transistor and circuit performance with fluoropolymers September 23rd, 2014

Nanotubes help healing hearts keep the beat: Rice University, Texas Children’s Hospital patch for defects enhances electrical connections between cells September 23rd, 2014

Immune system is key ally in cyberwar against cancer: Rice University study yields new two-step strategy for weakening cancer September 23rd, 2014

Los Alamos Researchers Uncover New Properties in Nanocomposite Oxide Ceramics for Reactor Fuel, Fast-Ion Conductors: Misfit dislocations are key to transport properties across material interfaces September 23rd, 2014

Printing/Lithography/Inkjet/Inks

RMIT delivers $30m boost to micro and nano-tech August 26th, 2014

SouthWest NanoTechnologies Appoints Matteson-Ridolfi for U.S. Distribution of its SMW™ Specialty Multiwall Carbon Nanotubes August 13th, 2014

An Inkjet-Printed Field-Effect Transistor for Label-Free Biosensing August 11th, 2014

SEMATECH and Newly Merged SUNY CNSE/SUNYIT Launch New Patterning Center to Further Advance Materials Development: Center to Provide Access to Critical Tools that Support Semiconductor Technology Node Development August 7th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE