Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > New Photolithography Technique Advances Nanofabrication Process

Schematic depictions of RAPID lithography, the technique developed by John Fourkas and colleagues which enables the creation of features 2500 times smaller than the width of a human hair.
Schematic depictions of RAPID lithography, the technique developed by John Fourkas and colleagues which enables the creation of features 2500 times smaller than the width of a human hair.

Abstract:
The ability to create tiny patterns is essential to the fabrication of computer chips as well as to many other current and potential applications of nanotechnology. Yet, creating ever smaller features, through a process called photolithography, has required the use of ultraviolet light, which is difficult and expensive to work with. John Fourkas, Professor of Chemistry and Biochemistry in the University of Maryland College of Chemical and Life Sciences, and his research group have developed a new, table-top technique called RAPID (Resolution Augmentation through Photo-Induced Deactivation) lithography that makes it possible to create small features without the use of ultraviolet light. This research is to be published in Science magazine and released on Science Express on April 9, 2009.

New Photolithography Technique Advances Nanofabrication Process

College Park, MD | Posted on April 15th, 2009

Photolithography uses light to deposit or remove material and create patterns on a surface. There is usually a direct relationship between the wavelength of light used and the feature size created. Therefore, nanofabrication has depended on short wavelength ultraviolet light to generate ever smaller features.

"The RAPID lithography technique we have developed enables us to create patterns twenty times smaller than the wavelength of light employed," explains Dr. Fourkas, "which means that it streamlines the nanofabrication process. We expect RAPID to find many applications in areas such as electronics, optics, and biomedical devices."

"If you have gotten a filling at the dentist in recent years," says Fourkas, "you have seen that a viscous liquid is squirted into the cavity and a blue light is then used to harden it. A similar process of hardening using light is the first element of RAPID. Now imagine that your dentist could use a second light source to sculpt the filling by preventing it from hardening in certain places. We have developed a way of using a second light source to perform this sculpting, and it allows us to create features that are 2500 times smaller than the width of a human hair."

Both of the laser light sources used by Fourkas and his team were of the same color, the only difference being that the laser used to harden the material produced short bursts of light while the laser used to prevent hardening was on constantly. The second laser beam also passed through a special optic that allowed for sculpting of the hardened features in the desired shape.

"The fact that one laser is on constantly in RAPID makes this technique particularly easy to implement," says Fourkas, "because there is no need to control the timing between two different pulsed lasers."

Fourkas and his team are currently working on improvements to RAPID lithography that they believe will make it possible to create features that are half of the size of the ones they have demonstrated to date.

Achieving lambda/20 Resolution by One-Color Initiation and Deactivation of Polymerization was written by Linjie Li, Rafael R. Gattass, Erez Gershgorem, Hana Hwang and John T. Fourkas.

####

For more information, please click here

Contacts:
College of Chemical & Life Science
University of Maryland
College Park, MD 20742

Copyright © University of Maryland

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Haydale and Goodfellow Announce Major Distribution Agreement for Functionalised Graphene Materials July 21st, 2014

Relaunch of the Nanoscribe Website New design, optimized research, and impressive gallery of applications July 21st, 2014

Dongbu HiTek Unveils Low-Voltage BCDMOS Process for Efficient Power Management in Smart Phones and Tablet Computers July 21st, 2014

Iran to Host 1st Asian Congress on Nanostructures on Kish Island July 21st, 2014

Carbyne morphs when stretched: Rice University calculations show carbon-atom chain would go metal to semiconductor July 21st, 2014

Videos/Movies

More than glitter: Scientists explain how gold nanoparticles easily penetrate cells, making them useful for delivering drugs July 21st, 2014

"Nanocamera" takes pictures at distances smaller than light's own wavelength: How is it possible to record optically encoded information for distances smaller than the wavelength of light? July 17th, 2014

Chip Technology

Dongbu HiTek Unveils Low-Voltage BCDMOS Process for Efficient Power Management in Smart Phones and Tablet Computers July 21st, 2014

Oregon chemists eye improved thin films with metal substitution: Solution-based inorganic process could drive more efficient electronics and solar devices July 21st, 2014

Carbyne morphs when stretched: Rice University calculations show carbon-atom chain would go metal to semiconductor July 21st, 2014

Martini Tech Inc. becomes the exclusive distributor for Yoshioka Seiko Co. porous chucks for Europe and North America July 20th, 2014

Discoveries

Oregon chemists eye improved thin films with metal substitution: Solution-based inorganic process could drive more efficient electronics and solar devices July 21st, 2014

Steam from the sun: New spongelike structure converts solar energy into steam July 21st, 2014

More than glitter: Scientists explain how gold nanoparticles easily penetrate cells, making them useful for delivering drugs July 21st, 2014

Carbyne morphs when stretched: Rice University calculations show carbon-atom chain would go metal to semiconductor July 21st, 2014

Announcements

Oxford Instruments Asylum Research Opens an Atomic Force Microscopy Demonstration Lab in Mumbai, India July 21st, 2014

Steam from the sun: New spongelike structure converts solar energy into steam July 21st, 2014

More than glitter: Scientists explain how gold nanoparticles easily penetrate cells, making them useful for delivering drugs July 21st, 2014

Iran to Host 1st Asian Congress on Nanostructures on Kish Island July 21st, 2014

Printing/Lithography/Inkjet/Inks

Martini Tech Inc. becomes the exclusive distributor for Yoshioka Seiko Co. porous chucks for Europe and North America July 20th, 2014

University of Illinois researchers demonstrate novel, tunable nanoantennas July 14th, 2014

Haydale Announces Collaboration Agreement with Swansea University’s Welsh Centre for Printing and Coatings (WCPC) July 12th, 2014

Leti to Present Technological Platforms Targeting Industry’s Needs for the Future at Semicon West Workshop: Presentation at STS Session to Focus on Leti Advanced Lithography Programs for 1x Nodes and on Silicon Photonics at TechXPot June 25th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE