Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > It's a fine line

Abstract:
New method could lead to narrower chip patterns

It's a fine line

Cambridge, MA | Posted on April 11th, 2009

David Chandler: Researchers at MIT have found a novel method for etching extremely narrow lines on a microchip, using a material that can be switched from transparent to opaque, and vice versa, just by exposing it to certain wavelengths of light.

Such materials are not new, but the researchers found a novel way of harnessing that property to create a mask with exceptionally fine lines of transparency. This mask can then be used to create a correspondingly fine line on the underlying material.

Producing such fine lines is crucial to many new technologies, from microchip manufacturing that is constantly seeking ways to cram more components onto a single chip, to a whole host of emerging fields based on nano-scale patterns. But these technologies have faced fundamental limits because they tend to rely on light to produce these patterns, and most techniques cannot produce patterns much smaller than the wavelengths of light itself. This method is a way of overcoming that limit.

The key is using interference patterns, in which different wavelengths of light sometimes reinforce each other and in other places cancel each other out. The researchers exposed the photochromic material -- one that changes its color, and therefore its transparency, in response to light -- to a pair of such patterns, each of a different wavelength, simultaneously. When the bright lines at one wavelength coincide with the dark lines at the other wavelength, extremely narrow lines of clear material are formed interspersed with the opaque material. This banded layer then serves as a mask through which the first wavelength illuminates a layer of material underneath, similarly to the way a photographic negative is used to make a print by shining light through it onto a sheet of photo paper underneath.

The research was carried out by research engineer Rajesh Menon of the Research Laboratory of Electronics and graduate students Trisha Andrew in the Department of Chemistry and Hsin-Yu Tsai in the Department of Electrical Engineering and Computer Science, and is being reported in a paper published in the April 10 issue of Science.

Remarkably, the new technique, which the researchers call absorbance modulation, makes it possible to create lines that are only about one-tenth as wide as the wavelength of light used to create them. Part of the trick was to find a suitable photochromic material whose clear and opaque parts would remain stable after the initial exposure to light.

Using this method, the team produced lines just 36 nanometers wide, and say they could also place many such lines spaced a similar distance apart.

Such a technique "could have a significant impact on chip making," Menon says, and could also help to enable new work in a variety of emerging fields that rely on nano-scale patterning, including nanophotonics, nanofluidics, nanoelectronics, and nano-biological systems.

Already, a company has been formed to develop this technology, and Menon says he expects it to lead to commercial production within five years.

But that's not the only potential application of the approach. Menon says his team is pursuing possible use of the same system for imaging systems, which could enable new kinds of microscopes for observing at nanoscale resolution, with possible applications in biology and in materials science. At the same time, he is pursuing ways of using the technique to create even smaller patterns, down to the scale of individual molecules.

The work was partly funded by grants from LumArray Inc., where Menon is co-founder, the MIT Deshpande Center for Technological Innovation, and DARPA.

####

About MIT
The mission of MIT is to advance knowledge and educate students in science, technology, and other areas of scholarship that will best serve the nation and the world in the 21st century.

For more information, please click here

Contacts:
Elizabeth A. Thomson
MIT News Office
Phone: 617-258-5402
E-mail:

Copyright © MIT

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Bosch announces high-performance MEMS acceleration sensors for wearables June 27th, 2017

Nanometrics to Participate in the 9th Annual CEO Investor Summit 2017: Accredited investor and publishing research analyst event held concurrently with SEMICON West and Intersolar 2017 in San Francisco June 27th, 2017

NMRC, University of Nottingham chooses the Quorum Q150 coater for its reliable and reproducible film thickness when coating samples with iridium June 27th, 2017

Picosun’s ALD solutions enable novel high-speed memories June 27th, 2017

Possible Futures

Physicists make quantum leap in understanding life's nanoscale machinery June 27th, 2017

Atomic imperfections move quantum communication network closer to reality June 25th, 2017

Research accelerates quest for quicker, longer-lasting electronics: UC Riverside-led research makes topological insulators magnetic well above room temperatures June 25th, 2017

U.S. Air Force Research Lab Taps IBM to Build Brain-Inspired AI Supercomputing System: Equal to 64 million neurons, new neurosynaptic supercomputing system will power complex AI tasks at unprecedented speed and energy efficiency June 23rd, 2017

Chip Technology

Nanometrics to Participate in the 9th Annual CEO Investor Summit 2017: Accredited investor and publishing research analyst event held concurrently with SEMICON West and Intersolar 2017 in San Francisco June 27th, 2017

New TriboLab CMP Provides Cost-Effective Characterization of Chemical Mechanical Wafer Polishing Processes: Bruker Updates Industry-Standard CP-4 Platform for Most Flexible and Reliable Testing June 27th, 2017

Atomic imperfections move quantum communication network closer to reality June 25th, 2017

Research accelerates quest for quicker, longer-lasting electronics: UC Riverside-led research makes topological insulators magnetic well above room temperatures June 25th, 2017

Nanomedicine

Physicists make quantum leap in understanding life's nanoscale machinery June 27th, 2017

Researchers developed nanoparticle based contrast agent for dual modal imaging of cancer June 21st, 2017

Learning with light: New system allows optical “deep learning”: Neural networks could be implemented more quickly using new photonic technology June 12th, 2017

Mussels add muscle to biocompatible fibers: Rice University chemists develop hydrogel strings using compound found in sea creatures June 9th, 2017

Nanoelectronics

Research accelerates quest for quicker, longer-lasting electronics: UC Riverside-led research makes topological insulators magnetic well above room temperatures June 25th, 2017

GLOBALFOUNDRIES on Track to Deliver Leading-Performance 7nm FinFET Technology: New 7LP technology offers 40 percent performance boost over 14nm FinFET June 13th, 2017

Seeing the invisible with a graphene-CMOS integrated device June 6th, 2017

IBM Research Alliance Builds New Transistor for 5nm Technology: Less than two years since announcing a 7nm test chip, scientists have achieved another breakthrough June 5th, 2017

Discoveries

Physicists make quantum leap in understanding life's nanoscale machinery June 27th, 2017

Picosun’s ALD solutions enable novel high-speed memories June 27th, 2017

Atomic imperfections move quantum communication network closer to reality June 25th, 2017

Research accelerates quest for quicker, longer-lasting electronics: UC Riverside-led research makes topological insulators magnetic well above room temperatures June 25th, 2017

Announcements

Bosch announces high-performance MEMS acceleration sensors for wearables June 27th, 2017

Nanometrics to Participate in the 9th Annual CEO Investor Summit 2017: Accredited investor and publishing research analyst event held concurrently with SEMICON West and Intersolar 2017 in San Francisco June 27th, 2017

NMRC, University of Nottingham chooses the Quorum Q150 coater for its reliable and reproducible film thickness when coating samples with iridium June 27th, 2017

Picosun’s ALD solutions enable novel high-speed memories June 27th, 2017

Nanobiotechnology

Physicists make quantum leap in understanding life's nanoscale machinery June 27th, 2017

Researchers developed nanoparticle based contrast agent for dual modal imaging of cancer June 21st, 2017

Mussels add muscle to biocompatible fibers: Rice University chemists develop hydrogel strings using compound found in sea creatures June 9th, 2017

Making vessels leaky on demand could aid drug delivery:Rice University scientists use magnets and nanoparticles to open, close gaps in blood vessels June 8th, 2017

Photonics/Optics/Lasers

Rice U. chemists create 3-D printed graphene foam June 22nd, 2017

New carbon nitride material coupled with ruthenium enhances visible-light CO2 reduction in water June 15th, 2017

Changing the color of laser light on the femtosecond time scale: How BiCoO3 achieves second harmonic generation June 14th, 2017

Learning with light: New system allows optical “deep learning”: Neural networks could be implemented more quickly using new photonic technology June 12th, 2017

Printing/Lithography/Inkjet/Inks/Bio-printing

Carbodeon demonstrates NanoDiamond nickel coatings with enhanced tribological properties June 7th, 2017

Liquid metal nano printing set to revolutionize electronics: Creating integrated circuits just atoms thick February 18th, 2017

New stem cell technique shows promise for bone repair January 25th, 2017

NUS researchers achieve major breakthrough in flexible electronics: New classes of printable electrically conducting polymer materials make better electrodes for plastic electronics and advanced semiconductor devices January 14th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project