Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > It's a fine line

Abstract:
New method could lead to narrower chip patterns

It's a fine line

Cambridge, MA | Posted on April 11th, 2009

David Chandler: Researchers at MIT have found a novel method for etching extremely narrow lines on a microchip, using a material that can be switched from transparent to opaque, and vice versa, just by exposing it to certain wavelengths of light.

Such materials are not new, but the researchers found a novel way of harnessing that property to create a mask with exceptionally fine lines of transparency. This mask can then be used to create a correspondingly fine line on the underlying material.

Producing such fine lines is crucial to many new technologies, from microchip manufacturing that is constantly seeking ways to cram more components onto a single chip, to a whole host of emerging fields based on nano-scale patterns. But these technologies have faced fundamental limits because they tend to rely on light to produce these patterns, and most techniques cannot produce patterns much smaller than the wavelengths of light itself. This method is a way of overcoming that limit.

The key is using interference patterns, in which different wavelengths of light sometimes reinforce each other and in other places cancel each other out. The researchers exposed the photochromic material -- one that changes its color, and therefore its transparency, in response to light -- to a pair of such patterns, each of a different wavelength, simultaneously. When the bright lines at one wavelength coincide with the dark lines at the other wavelength, extremely narrow lines of clear material are formed interspersed with the opaque material. This banded layer then serves as a mask through which the first wavelength illuminates a layer of material underneath, similarly to the way a photographic negative is used to make a print by shining light through it onto a sheet of photo paper underneath.

The research was carried out by research engineer Rajesh Menon of the Research Laboratory of Electronics and graduate students Trisha Andrew in the Department of Chemistry and Hsin-Yu Tsai in the Department of Electrical Engineering and Computer Science, and is being reported in a paper published in the April 10 issue of Science.

Remarkably, the new technique, which the researchers call absorbance modulation, makes it possible to create lines that are only about one-tenth as wide as the wavelength of light used to create them. Part of the trick was to find a suitable photochromic material whose clear and opaque parts would remain stable after the initial exposure to light.

Using this method, the team produced lines just 36 nanometers wide, and say they could also place many such lines spaced a similar distance apart.

Such a technique "could have a significant impact on chip making," Menon says, and could also help to enable new work in a variety of emerging fields that rely on nano-scale patterning, including nanophotonics, nanofluidics, nanoelectronics, and nano-biological systems.

Already, a company has been formed to develop this technology, and Menon says he expects it to lead to commercial production within five years.

But that's not the only potential application of the approach. Menon says his team is pursuing possible use of the same system for imaging systems, which could enable new kinds of microscopes for observing at nanoscale resolution, with possible applications in biology and in materials science. At the same time, he is pursuing ways of using the technique to create even smaller patterns, down to the scale of individual molecules.

The work was partly funded by grants from LumArray Inc., where Menon is co-founder, the MIT Deshpande Center for Technological Innovation, and DARPA.

####

About MIT
The mission of MIT is to advance knowledge and educate students in science, technology, and other areas of scholarship that will best serve the nation and the world in the 21st century.

For more information, please click here

Contacts:
Elizabeth A. Thomson
MIT News Office
Phone: 617-258-5402
E-mail:

Copyright © MIT

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Forces of nature: Interview with microscopy innovators Gerd Binnig and Christoph Gerber August 26th, 2016

A promising route to the scalable production of highly crystalline graphene films August 26th, 2016

Graphene under pressure August 26th, 2016

Stretchy supercapacitors power wearable electronics August 25th, 2016

Possible Futures

A promising route to the scalable production of highly crystalline graphene films August 26th, 2016

Graphene under pressure August 26th, 2016

Nanofiber scaffolds demonstrate new features in the behavior of stem and cancer cells August 25th, 2016

Nanofur for oil spill cleanup: Materials researchers learn from aquatic ferns: Hairy plant leaves are highly oil-absorbing / publication in bioinspiration & biomimetics / video on absorption capacity August 25th, 2016

Chip Technology

A promising route to the scalable production of highly crystalline graphene films August 26th, 2016

Analog DNA circuit does math in a test tube: DNA computers could one day be programmed to diagnose and treat disease August 25th, 2016

Silicon nanoparticles trained to juggle light: Research findings prove the capabilities of silicon nanoparticles for flexible data processing in optical communication systems August 25th, 2016

AIM Photonics Announces Release of Process Design Kit (PDK) for Integrated Silicon Photonics Design August 25th, 2016

Nanomedicine

Nanofiber scaffolds demonstrate new features in the behavior of stem and cancer cells August 25th, 2016

Johns Hopkins scientists track metabolic pathways to find drug combination for pancreatic cancer August 25th, 2016

50 years after the release of the film 'Fantastic Voyage,' science upstages fiction: Science upstages fiction with nanorobotic agents designed to travel in the human body to treat cancer August 25th, 2016

Tunneling nanotubes between neurons enable the spread of Parkinson's disease via lysosomes August 24th, 2016

Nanoelectronics

Light and matter merge in quantum coupling: Rice University physicists probe photon-electron interactions in vacuum cavity experiments August 24th, 2016

New microchip demonstrates efficiency and scalable design: Increased power and slashed energy consumption for data centers August 24th, 2016

Down to the wire: ONR researchers and new bacteria August 18th, 2016

Smarter self-assembly opens new pathways for nanotechnology: Brookhaven Lab scientists discover a way to create billionth-of-a-meter structures that snap together in complex patterns with unprecedented efficiency August 9th, 2016

Discoveries

A promising route to the scalable production of highly crystalline graphene films August 26th, 2016

Graphene under pressure August 26th, 2016

Johns Hopkins scientists track metabolic pathways to find drug combination for pancreatic cancer August 25th, 2016

New electrical energy storage material shows its power: Nanomaterial combines attributes of both batteries and supercapacitors August 25th, 2016

Announcements

Forces of nature: Interview with microscopy innovators Gerd Binnig and Christoph Gerber August 26th, 2016

A promising route to the scalable production of highly crystalline graphene films August 26th, 2016

Graphene under pressure August 26th, 2016

New electrical energy storage material shows its power: Nanomaterial combines attributes of both batteries and supercapacitors August 25th, 2016

Nanobiotechnology

Analog DNA circuit does math in a test tube: DNA computers could one day be programmed to diagnose and treat disease August 25th, 2016

Nanofiber scaffolds demonstrate new features in the behavior of stem and cancer cells August 25th, 2016

Johns Hopkins scientists track metabolic pathways to find drug combination for pancreatic cancer August 25th, 2016

50 years after the release of the film 'Fantastic Voyage,' science upstages fiction: Science upstages fiction with nanorobotic agents designed to travel in the human body to treat cancer August 25th, 2016

Photonics/Optics/Lasers

Silicon nanoparticles trained to juggle light: Research findings prove the capabilities of silicon nanoparticles for flexible data processing in optical communication systems August 25th, 2016

AIM Photonics Announces Release of Process Design Kit (PDK) for Integrated Silicon Photonics Design August 25th, 2016

New theory could lead to new generation of energy friendly optoelectronics: Researchers at Queen's University Belfast and ETH Zurich, Switzerland, have created a new theoretical framework which could help physicists and device engineers design better optoelectronics August 23rd, 2016

Hexagonal boron nitride semiconductors enable cost-effective detection of neutron signals: Texas Tech University researchers demonstrate hexagonal boron nitride semiconductors as a cost-effective alternative for inspecting overseas cargo containers entering US ports August 17th, 2016

Printing/Lithography/Inkjet/Inks

Tailored probes for atomic force microscopes: 3-D laser lithography enhances microscope for studying nanostructures in biology and engineering/ publication in Applied Physics Letters August 11th, 2016

Smarter self-assembly opens new pathways for nanotechnology: Brookhaven Lab scientists discover a way to create billionth-of-a-meter structures that snap together in complex patterns with unprecedented efficiency August 9th, 2016

Nanoscientists develop the 'ultimate discovery tool': Rapid discovery power is similar to what gene chips offer biology June 25th, 2016

Perovskite solar cells surpass 20 percent efficiency: EPFL researchers are pushing the limits of perovskite solar cell performance by exploring the best way to grow these crystals June 13th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic