Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > It's a fine line

Abstract:
New method could lead to narrower chip patterns

It's a fine line

Cambridge, MA | Posted on April 11th, 2009

David Chandler: Researchers at MIT have found a novel method for etching extremely narrow lines on a microchip, using a material that can be switched from transparent to opaque, and vice versa, just by exposing it to certain wavelengths of light.

Such materials are not new, but the researchers found a novel way of harnessing that property to create a mask with exceptionally fine lines of transparency. This mask can then be used to create a correspondingly fine line on the underlying material.

Producing such fine lines is crucial to many new technologies, from microchip manufacturing that is constantly seeking ways to cram more components onto a single chip, to a whole host of emerging fields based on nano-scale patterns. But these technologies have faced fundamental limits because they tend to rely on light to produce these patterns, and most techniques cannot produce patterns much smaller than the wavelengths of light itself. This method is a way of overcoming that limit.

The key is using interference patterns, in which different wavelengths of light sometimes reinforce each other and in other places cancel each other out. The researchers exposed the photochromic material -- one that changes its color, and therefore its transparency, in response to light -- to a pair of such patterns, each of a different wavelength, simultaneously. When the bright lines at one wavelength coincide with the dark lines at the other wavelength, extremely narrow lines of clear material are formed interspersed with the opaque material. This banded layer then serves as a mask through which the first wavelength illuminates a layer of material underneath, similarly to the way a photographic negative is used to make a print by shining light through it onto a sheet of photo paper underneath.

The research was carried out by research engineer Rajesh Menon of the Research Laboratory of Electronics and graduate students Trisha Andrew in the Department of Chemistry and Hsin-Yu Tsai in the Department of Electrical Engineering and Computer Science, and is being reported in a paper published in the April 10 issue of Science.

Remarkably, the new technique, which the researchers call absorbance modulation, makes it possible to create lines that are only about one-tenth as wide as the wavelength of light used to create them. Part of the trick was to find a suitable photochromic material whose clear and opaque parts would remain stable after the initial exposure to light.

Using this method, the team produced lines just 36 nanometers wide, and say they could also place many such lines spaced a similar distance apart.

Such a technique "could have a significant impact on chip making," Menon says, and could also help to enable new work in a variety of emerging fields that rely on nano-scale patterning, including nanophotonics, nanofluidics, nanoelectronics, and nano-biological systems.

Already, a company has been formed to develop this technology, and Menon says he expects it to lead to commercial production within five years.

But that's not the only potential application of the approach. Menon says his team is pursuing possible use of the same system for imaging systems, which could enable new kinds of microscopes for observing at nanoscale resolution, with possible applications in biology and in materials science. At the same time, he is pursuing ways of using the technique to create even smaller patterns, down to the scale of individual molecules.

The work was partly funded by grants from LumArray Inc., where Menon is co-founder, the MIT Deshpande Center for Technological Innovation, and DARPA.

####

About MIT
The mission of MIT is to advance knowledge and educate students in science, technology, and other areas of scholarship that will best serve the nation and the world in the 21st century.

For more information, please click here

Contacts:
Elizabeth A. Thomson
MIT News Office
Phone: 617-258-5402
E-mail:

Copyright © MIT

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

The mysterious 'action at a distance' between liquid containers November 26th, 2014

'Giant' charge density disturbances discovered in nanomaterials: Juelich researchers amplify Friedel oscillations in thin metallic films November 26th, 2014

Vegetable oil ingredient key to destroying gastric disease bacteria: In mice, therapeutic nanoparticles dampen H. pylori bacteria and inflammation that lead to ulcers and gastric cancer November 25th, 2014

Research yields material made of single-atom layers that snap together like Legos November 25th, 2014

Possible Futures

A novel method for identifying the body’s ‘noisiest’ networks November 19th, 2014

Researchers discern the shapes of high-order Brownian motions November 17th, 2014

VDMA Electronics Production Equipment: Growth track for 2014 and 2015 confirmed: Business climate survey shows robust industry sector November 14th, 2014

Open Materials Development Will Be Key for HP's Success in 3D Printing: HP can make a big splash in 3D printing, but it needs to shore up technology claims and avoid the temptation of the razor/razor blade business model in order to flourish November 11th, 2014

Chip Technology

'Giant' charge density disturbances discovered in nanomaterials: Juelich researchers amplify Friedel oscillations in thin metallic films November 26th, 2014

Nanometrics Announces Upcoming Investor Events November 19th, 2014

A novel method for identifying the body’s ‘noisiest’ networks November 19th, 2014

Researchers create & control spin waves, lifting prospects for enhanced info processing November 17th, 2014

Nanomedicine

Vegetable oil ingredient key to destroying gastric disease bacteria: In mice, therapeutic nanoparticles dampen H. pylori bacteria and inflammation that lead to ulcers and gastric cancer November 25th, 2014

Research reveals how our bodies keep unwelcome visitors out of cell nuclei November 24th, 2014

ASU, IBM move ultrafast, low-cost DNA sequencing technology a step closer to reality November 24th, 2014

An Inside Job: UC-Designed Nanoparticles Infiltrate, Kill Cancer Cells From Within November 24th, 2014

Nanoelectronics

'Giant' charge density disturbances discovered in nanomaterials: Juelich researchers amplify Friedel oscillations in thin metallic films November 26th, 2014

Leti Will Present 17 Papers at 2014 IEDM; the Highest-ever Total Includes Four Invited Papers: Institute also Will Present its Latest Results in Key Technologies and Its Roadmap for Silicon Nano-technologies at Workshop November 13th, 2014

Breakthrough in molecular electronics paves the way for DNA-based computer circuits in the future: DNA-based programmable circuits could be more sophisticated, cheaper and simpler to make October 27th, 2014

NIST offers electronics industry 2 ways to snoop on self-organizing molecules October 22nd, 2014

Discoveries

The mysterious 'action at a distance' between liquid containers November 26th, 2014

'Giant' charge density disturbances discovered in nanomaterials: Juelich researchers amplify Friedel oscillations in thin metallic films November 26th, 2014

Vegetable oil ingredient key to destroying gastric disease bacteria: In mice, therapeutic nanoparticles dampen H. pylori bacteria and inflammation that lead to ulcers and gastric cancer November 25th, 2014

Research yields material made of single-atom layers that snap together like Legos November 25th, 2014

Announcements

The mysterious 'action at a distance' between liquid containers November 26th, 2014

'Giant' charge density disturbances discovered in nanomaterials: Juelich researchers amplify Friedel oscillations in thin metallic films November 26th, 2014

Vegetable oil ingredient key to destroying gastric disease bacteria: In mice, therapeutic nanoparticles dampen H. pylori bacteria and inflammation that lead to ulcers and gastric cancer November 25th, 2014

Research yields material made of single-atom layers that snap together like Legos November 25th, 2014

Nanobiotechnology

Quantum mechanical calculations reveal the hidden states of enzyme active sites November 20th, 2014

Tokyo Institute of Technology research: Protein-engineered cages aid studies of cell functions November 19th, 2014

A novel method for identifying the body’s ‘noisiest’ networks November 19th, 2014

Implementation of DNA Chains in Designing Nanospin Pieces November 9th, 2014

Photonics/Optics/Lasers

NRL Scientists Discover Novel Metamaterial Properties within Hexagonal Boron Nitride November 20th, 2014

Penn engineers efficiently 'mix' light at the nanoscale November 17th, 2014

'Direct writing' of diamond patterns from graphite a potential technological leap November 5th, 2014

Outsmarting Thermodynamics in Self-assembly of Nanostructures: Berkeley Lab reports method for symmetry-breaking in feedback-driven self-assembly of optical metamaterials November 4th, 2014

Printing/Lithography/Inkjet/Inks

Canatu Launches CNB In-Mold Film for Transparent Touch on 3D Surfaces –in Cars, Household Appliances, Wearables, Portables November 20th, 2014

SouthWest NanoTechnologies to Demonstrate 3D Capacitive Touch Sensor Featuring Transparent, Thermoformed Carbon Nanotube Ink at Printed Electronics USA 2014 (Booth J25) -- “Conductive and Semiconducting Single-Wall Carbon Nanotube Inks” will be Topic of Company Presentation November 10th, 2014

Longhorn beetle inspires ink to fight counterfeiting November 5th, 2014

'Nanomotor lithography' answers call for affordable, simpler device manufacturing October 31st, 2014

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More












ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE