Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > It's a fine line

Abstract:
New method could lead to narrower chip patterns

It's a fine line

Cambridge, MA | Posted on April 11th, 2009

David Chandler: Researchers at MIT have found a novel method for etching extremely narrow lines on a microchip, using a material that can be switched from transparent to opaque, and vice versa, just by exposing it to certain wavelengths of light.

Such materials are not new, but the researchers found a novel way of harnessing that property to create a mask with exceptionally fine lines of transparency. This mask can then be used to create a correspondingly fine line on the underlying material.

Producing such fine lines is crucial to many new technologies, from microchip manufacturing that is constantly seeking ways to cram more components onto a single chip, to a whole host of emerging fields based on nano-scale patterns. But these technologies have faced fundamental limits because they tend to rely on light to produce these patterns, and most techniques cannot produce patterns much smaller than the wavelengths of light itself. This method is a way of overcoming that limit.

The key is using interference patterns, in which different wavelengths of light sometimes reinforce each other and in other places cancel each other out. The researchers exposed the photochromic material -- one that changes its color, and therefore its transparency, in response to light -- to a pair of such patterns, each of a different wavelength, simultaneously. When the bright lines at one wavelength coincide with the dark lines at the other wavelength, extremely narrow lines of clear material are formed interspersed with the opaque material. This banded layer then serves as a mask through which the first wavelength illuminates a layer of material underneath, similarly to the way a photographic negative is used to make a print by shining light through it onto a sheet of photo paper underneath.

The research was carried out by research engineer Rajesh Menon of the Research Laboratory of Electronics and graduate students Trisha Andrew in the Department of Chemistry and Hsin-Yu Tsai in the Department of Electrical Engineering and Computer Science, and is being reported in a paper published in the April 10 issue of Science.

Remarkably, the new technique, which the researchers call absorbance modulation, makes it possible to create lines that are only about one-tenth as wide as the wavelength of light used to create them. Part of the trick was to find a suitable photochromic material whose clear and opaque parts would remain stable after the initial exposure to light.

Using this method, the team produced lines just 36 nanometers wide, and say they could also place many such lines spaced a similar distance apart.

Such a technique "could have a significant impact on chip making," Menon says, and could also help to enable new work in a variety of emerging fields that rely on nano-scale patterning, including nanophotonics, nanofluidics, nanoelectronics, and nano-biological systems.

Already, a company has been formed to develop this technology, and Menon says he expects it to lead to commercial production within five years.

But that's not the only potential application of the approach. Menon says his team is pursuing possible use of the same system for imaging systems, which could enable new kinds of microscopes for observing at nanoscale resolution, with possible applications in biology and in materials science. At the same time, he is pursuing ways of using the technique to create even smaller patterns, down to the scale of individual molecules.

The work was partly funded by grants from LumArray Inc., where Menon is co-founder, the MIT Deshpande Center for Technological Innovation, and DARPA.

####

About MIT
The mission of MIT is to advance knowledge and educate students in science, technology, and other areas of scholarship that will best serve the nation and the world in the 21st century.

For more information, please click here

Contacts:
Elizabeth A. Thomson
MIT News Office
Phone: 617-258-5402
E-mail:

Copyright © MIT

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Superconductivity: Footballs with no resistance - Indications of light-induced lossless electricity transmission in fullerenes contribute to the search for superconducting materials for practical applications February 9th, 2016

SUNY Poly and GLOBALFOUNDRIES Announce New $500M R&D Program in Albany To Accelerate Next Generation Chip Technology: Arrival of Second Cutting Edge EUV Lithography Tool Launches New Patterning Center That Will Generate Over 100 New High Tech Jobs at SUNY Poly February 9th, 2016

Making sense of metallic glass February 9th, 2016

Electron's 1-D metallic surface state observed: A step for the prediction of electronic properties of extremely-fine metal nanowires in next-generation semiconductors February 9th, 2016

Possible Futures

Electron's 1-D metallic surface state observed: A step for the prediction of electronic properties of extremely-fine metal nanowires in next-generation semiconductors February 9th, 2016

Scientists create laser-activated superconductor February 8th, 2016

Nanoscale cavity strongly links quantum particles: Single photons can quickly modify individual electrons embedded in a semiconductor chip and vice versa February 8th, 2016

A fast solidification process makes material crackle February 8th, 2016

Chip Technology

SUNY Poly and GLOBALFOUNDRIES Announce New $500M R&D Program in Albany To Accelerate Next Generation Chip Technology: Arrival of Second Cutting Edge EUV Lithography Tool Launches New Patterning Center That Will Generate Over 100 New High Tech Jobs at SUNY Poly February 9th, 2016

Electron's 1-D metallic surface state observed: A step for the prediction of electronic properties of extremely-fine metal nanowires in next-generation semiconductors February 9th, 2016

Metal oxide sandwiches: New option to manipulate properties of interfaces February 8th, 2016

The iron stepping stones to better wearable tech without semiconductors February 8th, 2016

Nanomedicine

Nanoparticle therapy that uses LDL and fish oil kills liver cancer cells February 9th, 2016

Leading bugs to the death chamber: A kinder face of cholesterol February 8th, 2016

UTHealth research looks at nanotechnology to help prevent preterm birth February 7th, 2016

Scientists take key step toward custom-made nanoscale chemical factories: Berkeley Lab researchers part of team that creates new function in tiny protein shell structures February 6th, 2016

Nanoelectronics

Electron's 1-D metallic surface state observed: A step for the prediction of electronic properties of extremely-fine metal nanowires in next-generation semiconductors February 9th, 2016

The iron stepping stones to better wearable tech without semiconductors February 8th, 2016

Spin dynamics in an atomically thin semi-conductor February 1st, 2016

New type of nanowires, built with natural gas heating: UNIST research team developed a new simple nanowire manufacturing technique February 1st, 2016

Discoveries

Making sense of metallic glass February 9th, 2016

Electron's 1-D metallic surface state observed: A step for the prediction of electronic properties of extremely-fine metal nanowires in next-generation semiconductors February 9th, 2016

Nanoparticle therapy that uses LDL and fish oil kills liver cancer cells February 9th, 2016

Leading bugs to the death chamber: A kinder face of cholesterol February 8th, 2016

Announcements

Superconductivity: Footballs with no resistance - Indications of light-induced lossless electricity transmission in fullerenes contribute to the search for superconducting materials for practical applications February 9th, 2016

SUNY Poly and GLOBALFOUNDRIES Announce New $500M R&D Program in Albany To Accelerate Next Generation Chip Technology: Arrival of Second Cutting Edge EUV Lithography Tool Launches New Patterning Center That Will Generate Over 100 New High Tech Jobs at SUNY Poly February 9th, 2016

Making sense of metallic glass February 9th, 2016

Electron's 1-D metallic surface state observed: A step for the prediction of electronic properties of extremely-fine metal nanowires in next-generation semiconductors February 9th, 2016

Nanobiotechnology

Nanoparticle therapy that uses LDL and fish oil kills liver cancer cells February 9th, 2016

Leading bugs to the death chamber: A kinder face of cholesterol February 8th, 2016

UTHealth research looks at nanotechnology to help prevent preterm birth February 7th, 2016

Scientists take key step toward custom-made nanoscale chemical factories: Berkeley Lab researchers part of team that creates new function in tiny protein shell structures February 6th, 2016

Photonics/Optics/Lasers

Scientists create laser-activated superconductor February 8th, 2016

Nanoscale cavity strongly links quantum particles: Single photons can quickly modify individual electrons embedded in a semiconductor chip and vice versa February 8th, 2016

Organic crystals allow creating flexible electronic devices: The researchers from the Faculty of Physics of the Moscow State University have grown organic crystals that allow creating flexible electronic devices February 5th, 2016

Scientists guide gold nanoparticles to form 'diamond' superlattices: DNA scaffolds cage and coax nanoparticles into position to form crystalline arrangements that mimic the atomic structure of diamond February 4th, 2016

Printing/Lithography/Inkjet/Inks

Teijin to Participate in Nano Tech 2016 January 21st, 2016

New bimetallic alloy nanoparticles for printed electronic circuits: Production of oxidation-resistant copper alloy nanoparticles by electrical explosion of wire for printed electronics January 5th, 2016

Photonic “sintering” may create new solar, electronics manufacturing technologies December 1st, 2015

Screen Printable Functionalised Graphene Ink November 3rd, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic