Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > New Laser Technique Advances Nanofabrication Process

Schematic depictions of RAPID lithography, the technique developed by John Fourkas and colleagues which enables the creation of features 2500 times smaller than the width of a human hair.
Schematic depictions of RAPID lithography, the technique developed by John Fourkas and colleagues which enables the creation of features 2500 times smaller than the width of a human hair.

Abstract:
The ability to create tiny patterns is essential to the fabrication of computer chips and many other current and potential applications of nanotechnology. Yet, creating ever smaller features, through a widely-used process called photolithography, has required the use of ultraviolet light, which is difficult and expensive to work with.

New Laser Technique Advances Nanofabrication Process

College Park, MD | Posted on April 10th, 2009

John Fourkas, Professor of Chemistry and Biochemistry in the University of Maryland College of Chemical and Life Sciences, and his research group have developed a new, table-top technique called RAPID (Resolution Augmentation through Photo-Induced Deactivation) lithography that makes it possible to create small features without the use of ultraviolet light. This research is to be published in Science magazine and released on Science Express on April 9, 2009.

Photolithography uses light to deposit or remove material and create patterns on a surface. There is usually a direct relationship between the wavelength of light used and the feature size created. Therefore, nanofabrication has depended on short wavelength ultraviolet light to generate ever smaller features.

"The RAPID lithography technique we have developed enables us to create patterns twenty times smaller than the wavelength of light employed,"explains Dr. Fourkas, "which means that it streamlines the nanofabrication process. We expect RAPID to find many applications in areas such as electronics, optics, and biomedical devices."

"If you have gotten a filling at the dentist in recent years,"says Fourkas, "you have seen that a viscous liquid is squirted into the cavity and a blue light is then used to harden it. A similar process of hardening using light is the first element of RAPID. Now imagine that your dentist could use a second light source to sculpt the filling by preventing it from hardening in certain places. We have developed a way of using a second light source to perform this sculpting, and it allows us to create features that are 2500 times smaller than the width of a human hair."

Both of the laser light sources used by Fourkas and his team were of the same color, the only difference being that the laser used to harden the material produced short bursts of light while the laser used to prevent hardening was on constantly. The second laser beam also passed through a special optic that allowed for sculpting of the hardened features in the desired shape.

"The fact that one laser is on constantly in RAPID makes this technique particularly easy to implement,"says Fourkas, "because there is no need to control the timing between two different pulsed lasers."

Fourkas and his team are currently working on improvements to RAPID lithography that they believe will make it possible to create features that are half of the size of the ones they have demonstrated to date.

Achieving lambda/20 Resolution by One-Color Initiation and Deactivation of Polymerization was written by Linjie Li, Rafael R. Gattass, Erez Gershgorem, Hana Hwang and John T. Fourkas.

####

About University of Maryland, College Park
The University of Maryland, College Park (often referred to as The University of Maryland, UMD, UMCP, College Park, or simply Maryland) is a public research university located in the city of College Park in Prince George's County, Maryland outside Washington, D.C. Founded in 1856, the University of Maryland is the flagship institution of the University System of Maryland. The university is considered to be a Public Ivy. At a total enrollment of 36,014 students, Maryland is the largest university in the state as well as the Washington Metropolitan Area. It is a member of the Association of American Universities and a founding member of the Atlantic Coast Conference athletic league.

Source: Wikipedia

Contacts:
Kelly Blake
301-405-8203

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Berkeley Lab Researchers Demonstrate First Size-based Chromatography Technique for the Study of Living Cells April 22nd, 2014

PETA science consortium to present hazard testing strategy at nanotoxicology meeting: High tech field ripe for use of sophisticated non-animal testing strategies April 22nd, 2014

Harris & Harris Group Notes the Receipt of Proceeds From the Sale of Molecular Imprints' Semiconductor Business to Canon April 22nd, 2014

National Space Society Congratulates SpaceX on the Success of CRS-3 and the First Flight of the Falcon 9R April 22nd, 2014

Possible Futures

Virus structure inspires novel understanding of onion-like carbon nanoparticles April 10th, 2014

Local girl does good March 22nd, 2014

Surface Characteristics Influence Cellular Growth on Semiconductor Material March 12th, 2014

The "Tipping Point" February 12th, 2014

Chip Technology

Harris & Harris Group Notes the Receipt of Proceeds From the Sale of Molecular Imprints' Semiconductor Business to Canon April 22nd, 2014

Progress made in developing nanoscale electronics: New research directs charges through single molecules April 21st, 2014

'Exotic' material is like a switch when super thin April 18th, 2014

Scientists open door to better solar cells, superconductors and hard-drives: Research enhances understanding of materials interfaces April 14th, 2014

Nanoelectronics

Progress made in developing nanoscale electronics: New research directs charges through single molecules April 21st, 2014

Better solar cells, better LED light and vast optical possibilities April 12th, 2014

Catching the (Invisible) Wave: UC Santa Barbara researchers create a unique semiconductor that manipulates light in the invisible infrared/terahertz range, paving the way for new and enhanced applications April 11th, 2014

Nanotech Business Review 2013-2014 April 9th, 2014

Announcements

Berkeley Lab Researchers Demonstrate First Size-based Chromatography Technique for the Study of Living Cells April 22nd, 2014

PETA science consortium to present hazard testing strategy at nanotoxicology meeting: High tech field ripe for use of sophisticated non-animal testing strategies April 22nd, 2014

Harris & Harris Group Notes the Receipt of Proceeds From the Sale of Molecular Imprints' Semiconductor Business to Canon April 22nd, 2014

National Space Society Congratulates SpaceX on the Success of CRS-3 and the First Flight of the Falcon 9R April 22nd, 2014

Photonics/Optics/Lasers

High-temperature plasmonics eyed for solar, computer innovation April 17th, 2014

Scientists Capture Ultrafast Snapshots of Light-Driven Superconductivity: X-rays reveal how rapidly vanishing 'charge stripes' may be behind laser-induced high-temperature superconductivity April 16th, 2014

Lumerical files a provisional patent that extends the standard eigenmode expansion propagation technique to better address waveguide component design. Lumericalís EME propagation tool will address a wide set of waveguide applications in silicon photonics and integrated optics April 16th, 2014

Near-field Nanophotonics Workshop in Boston April 14th, 2014

NanoNews-Digest
The latest news from around the world, FREE







  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE