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Home > News > Tweezers tap into nanolithography

March 18th, 2009

Tweezers tap into nanolithography

Abstract:
Optical nanolithography receives a boost as researchers claim that their new approach is a major step forward in generating arbitrary nanopatterns. Researchers at Princeton University, US, have unveiled a parallel process that writes patterns of nanoscale features directly into a substrate. Their simple optical technique uses one laser to trap an array of microlenses and then another to fabricate 100 nm structures with both a feature size uniformity and relative positional accuracy of 15 nm.

Source:
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