Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Nanometrics Introduces Next Generation NanoCD™ Suite Advanced Turnkey Solution for OCD Measurement Capability

Abstract:
Nanometrics Incorporated (Nasdaq: NANO), a leading supplier of advanced process control metrology equipment, today announced the release of its latest NanoCD Suite of solutions for optical critical dimension (OCD) metrology. The new NanoCD Suite Version 2.0 greatly enhances the power of OCD analysis for the most demanding process control applications.

Nanometrics Introduces Next Generation NanoCD™ Suite Advanced Turnkey Solution for OCD Measurement Capability

MILPITAS, CA | Posted on March 11th, 2009

The NanoCD Suite Version 2.0 is composed of key components enabling scalable fab-wide OCD metrology solutions, including the NanoGen, NanoMatch, NanoStation, and NanoDiffract. The suite offers industry-proven modeling methods, as well as a next-generation run time engine, comprehensive offline analysis tools and an intuitive user interface for structure definition and modeling. The NanoGen enterprise class server includes scalable resources that can be deployed and shared between numerous users and systems across the NanoCD Suite environment.

Each component of the NanoCD Suite is designed to take full advantage of the inherent connectivity between Nanometrics' wide metrology product portfolio, including standalone Atlas XP and Atlas-M systems for wafer and reticle metrology, as well as the IMPULSE/9010 integrated metrology product portfolio. When combined with the NanoCD Suite, Nanometrics systems have the broadest scatterometry metrology solution for today's semiconductor factories.

"By continually extending our modeling and analysis performance with innovative application methods, we enable our customers to actively control their most critical processing steps," commented Nagesh Avadhany, Vice President of Applications at Nanometrics. "Additionally, demand for applications support is growing beyond traditional CD measurements and now includes measurements on complex structures including films, coatings, epitaxial fill and post-CMP metal damascene structures. Many customers are applying our NanoCD technology for measurements in every sector of the fab, including thin film, CMP, advanced lithography and etch applications on complex 32nm and 22nm node test structures."

Enhancements in NanoDiffract allow users to control their process based on measurements of key parameters directly on DRAM, Flash, and SRAM cells. This measurement capability, along with new development tools, enable process engineers to optimize their metrology recipe and determine sensitivity even before initial wafers are processed. This highly optimized workflow for OCD applications development results in much faster time to results leading to rapid production deployment, higher productivity and lower cost of ownership.

####

About Nanometrics Incorporated
Nanometrics is a leader in the design, manufacture and marketing of high-performance process control metrology systems used primarily in the manufacturing of semiconductors, solar photovoltaics and high-brightness LEDs, as well as by customers in the silicon wafer and data storage industries. Nanometrics’ standalone and integrated metrology systems measure various thin film properties, critical dimensions, overlay control and optical, electrical and material properties, including the structural composition of silicon, compound semiconductor and photovoltaic devices, during various steps of the manufacturing process. These systems enable device manufacturers to improve yields, increase productivity and lower their manufacturing costs. The company maintains its headquarters in Milpitas, California, with sales and service offices worldwide. Nanometrics is traded on NASDAQ Global Market under the symbol NANO.

For more information, please click here

Contacts:
Company Contact:
Kevin Heidrich
408-545-6000 tel
408-232-5910 fax

Copyright © Nanometrics Incorporated

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Stanford breakthrough heralds super-efficient light-based computers: Light can transmit more data while consuming far less power than electricity, and an engineering feat brings optical data transport closer to replacing wires May 29th, 2015

Donuts, math, and superdense teleportation of quantum information May 29th, 2015

OSU researchers prove magnetism can control heat, sound: Team leverages OSC services to help confirm, interpret experimental findings May 29th, 2015

Two UCSB Professors Receive Early Career Research Awards: The Department of Energy’s award for young scientists acknowledges UC Santa Barbara’s standing as a top tier research institution May 29th, 2015

Software

New JEOL E-Beam Lithography System to Enhance Quantum NanoFab Capabilities May 6th, 2015

Time Dependant Spectroscopy of Microscopic Samples: CRAIC TimePro™ software is used with CRAIC Technologies microspectrometers to measure the kinetic UV-visible-NIR, Raman and fluorescence spectra of microscopic sample areas May 2nd, 2015

Lifeboat Foundation launches Interactive Friendly AI April 6th, 2015

State-of-the-art online system unveiled to pinpoint metrology software accuracy March 27th, 2015

Chip Technology

Stanford breakthrough heralds super-efficient light-based computers: Light can transmit more data while consuming far less power than electricity, and an engineering feat brings optical data transport closer to replacing wires May 29th, 2015

New chip makes testing for antibiotic-resistant bacteria faster, easier: Researchers at the University of Toronto design diagnostic chip to reduce testing time from days to one hour, allowing doctors to pick the right antibiotic the first time May 28th, 2015

Collaboration could lead to biodegradable computer chips May 28th, 2015

Physicists solve quantum tunneling mystery: ANU media release: An international team of scientists studying ultrafast physics have solved a mystery of quantum mechanics, and found that quantum tunneling is an instantaneous process May 27th, 2015

Announcements

Stanford breakthrough heralds super-efficient light-based computers: Light can transmit more data while consuming far less power than electricity, and an engineering feat brings optical data transport closer to replacing wires May 29th, 2015

Donuts, math, and superdense teleportation of quantum information May 29th, 2015

OSU researchers prove magnetism can control heat, sound: Team leverages OSC services to help confirm, interpret experimental findings May 29th, 2015

Two UCSB Professors Receive Early Career Research Awards: The Department of Energy’s award for young scientists acknowledges UC Santa Barbara’s standing as a top tier research institution May 29th, 2015

Tools

Two UCSB Professors Receive Early Career Research Awards: The Department of Energy’s award for young scientists acknowledges UC Santa Barbara’s standing as a top tier research institution May 29th, 2015

Seeing the action: UCSB researchers develop a novel device to image the minute forces and actions involved in cell membrane hemifusion May 27th, 2015

Physicists solve quantum tunneling mystery: ANU media release: An international team of scientists studying ultrafast physics have solved a mystery of quantum mechanics, and found that quantum tunneling is an instantaneous process May 27th, 2015

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project