Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Synopsys and Mattson Collaborate on Advanced TCAD Process Simulation of Technology

Abstract:
Mattson Technology, Inc. (Nasdaq: MTSN), a leading supplier of advanced semiconductor process equipment used to manufacture integrated circuits (ICs), and Synopsys, Inc. (Nasdaq: SNPS), a world leader in software and IP for semiconductor design and manufacturing, today announced a collaboration to offer calibrated process models for flash annealing equipment used on the 45-nanometer (nm) node and beyond. Through this collaboration, Synopsys' Sentaurus Process models will be calibrated to the Mattson Millios(TM) flash-assist Rapid Thermal Process (fRTP(TM)) system. As a result, engineers will be able to simulate and optimize process conditions before costly silicon processing, thus lowering development time and cost.

Synopsys and Mattson Collaborate on Advanced TCAD Process Simulation of Technology

SAN FRANCISCO, CA | Posted on July 15th, 2008

The continual scaling of CMOS technology demands new processing techniques to meet the strict International Technology Roadmap for Semiconductor (ITRS) targets for junction depth and sheet resistance in the source and drain extensions of CMOS transistors -- one of the critical device regions requiring precise process control. To meet this challenge, Mattson has developed the Millios fRTP system, which features a powerful flash lamp and highly accurate temperature control and monitoring that allow engineers to optimize process conditions for simultaneous achievement of shallow junction depth and low sheet resistance. The Millios system combines high throughput, precise process control and process flexibility to provide a high-volume IC manufacturing solution for milli-second annealing.

Sentaurus Process is Synopsys' multi-dimensional process simulator that is part of the TCAD Sentaurus suite. It is equipped with a set of advanced process models that include default parameters calibrated with data from equipment vendors and provides a predictive framework for simulating a broad range of technologies from nanoscale CMOS to large-scale high-voltage power devices. The combination of these technologies creates a powerful solution for optimizing the flash-annealing process using the Millios fRTP system.

"Process technologies are increasingly complex and costly to develop, and therefore TCAD tools with models calibrated to specific process conditions are very important to guide experimentation and process optimization," said Howard Ko, senior vice president and general manager of the Silicon Engineering Group at Synopsys. "Collaborations with leading equipment vendors such as Mattson Technology are a critical component of our strategy to deliver advanced and accurate TCAD tools to the market."

Jeff Gelpey, Mattson fellow, added, "Process development with advanced tools such as Millios becomes very time consuming and expensive if done only with experimentation. This collaboration between Synopsys and us enables the use of Sentaurus TCAD in conjunction with models calibrated to our equipment so that the development engineer can optimize the process more quickly and explore many more options."

About Millios

In the nanotechnology era, where chips have features 1000 times smaller than the diameter of a human hair, advanced RTP applications will require annealing that is fractions of, to a few thousandths of, a second in duration. Mattson's Millios Flash-Assist RTP (fRTP) is a next-generation millisecond annealing tool featuring advanced process control and high throughput to meet manufacturing and development needs. The technique offers effective process times of 1-3 milliseconds. The system features a patented arc lamp technology that processes the wafers through millisecond "flashes" (similar to a camera flash), providing improved thermal control for ultra-shallow junction (USJ) anneal and other advanced applications through the 22 nm regime. Millios also combines fully automated wafer handling hardware and software from Mattson's production-proven Helios(TM) RTP system. Millios was qualified in 2007 by semiconductor and leading nanoelectronics research centers in Europe and the United States.

####

About Mattson Technology, Inc.
Mattson Technology, Inc. is a leading supplier of dry strip equipment and the second largest supplier of rapid thermal processing equipment in the global semiconductor industry. The company’s strip and RTP equipment utilize innovative technology to deliver advanced processing performance and productivity gains to semiconductor manufacturers worldwide for the fabrication of current- and next-generation devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, Calif. 94538. Telephone: (800) MATTSON/(510) 657-5900. Fax: (510) 492-5911. Internet: www.mattson.com.

About Synopsys TCAD

Technology CAD (TCAD) refers to the use of computer simulation to model semiconductor processing and device operation. TCAD provides insight into the fundamental physical phenomena that ultimately impacts performance and yield.

About Synopsys

Synopsys, Inc. (Nasdaq: SNPS) is a world leader in electronic design automation (EDA), supplying the global electronics market with the software, intellectual property (IP) and services used in semiconductor design and manufacturing. Synopsys’ comprehensive, integrated portfolio of implementation, verification, IP, manufacturing and field-programmable gate array (FPGA) solutions helps address the key challenges designers and manufacturers face today, such as power and yield management, system-to-silicon verification and time-to-results. These technology-leading solutions help give Synopsys customers a competitive edge in bringing the best products to market quickly while reducing costs and schedule risk. Synopsys is headquartered in Mountain View, California, and has more than 60 offices located throughout North America, Europe, Japan, Asia and India. Visit Synopsys online at www.synopsys.com.

Forward Looking Statements

This press release contains forward-looking statements within the meaning of the safe harbor provisions of Section 21E of the Securities Exchange Act of 1934, including statements regarding the expected benefits and results of the collaboration, on advanced TCAD process simulation of CMOS technology, between Synopsys and Mattson. These statements are based on Synopsys’ and Mattson’s current expectations and beliefs. Actual results could differ materially from these statements as a result of unforeseen difficulties in completing the collaboration and the other factors contained in Synopsys’ Quarterly Report on Form 10-Q for the fiscal quarter ended April 30, 2008 and Mattson’s Quarterly Report on Form 10-Q for the fiscal quarter ended March 30, 2008.

Synopsys is a registered trademark of Synopsys, Inc. fRTP, Millios and
Helios are trademarks of Mattson Technology, Inc. Any other trademarks or
registered trademarks mentioned in this release are the intellectual property
of their respective owners.

For more information, please click here

Contacts:
Editorial Contacts:
Sheryl Gulizia
Synopsys, Inc.
650-584-8635


Lisa Gillette-Martin
MCA, Inc.
650-968-8900 x115


Jeff Gelpey
Mattson Technology, Inc.
510-492-2765


Laura Guerrant
Guerrant Associates
808-882-1467

Copyright © PR Newswire Association LLC.

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Chip Technology

Researchers managed to prevent the disappearing of quantum information September 14th, 2018

New devices based on rust could reduce excess heat in computers: Physicists explore long-distance information transmission in antiferromagnetic iron oxide September 14th, 2018

New photonic chip promises more robust quantum computers September 14th, 2018

How a tetrahedral substance can be more symmetrical than a spherical atom: A new type of symmetry September 14th, 2018

Announcements

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Tools

Carbon nanodots do an ultrafine job with in vitro lung tissue: New experiments highlight the role of charge and size when it comes to carbon nanodots that mimic the effect of nanoscale pollution particles on the human lung. September 12th, 2018

Terahertz spectroscopy enters the single-molecule regime September 7th, 2018

Mirrorcle Demonstrates MEMS-based Programmable Light Source at CES and PW18 August 30th, 2018

Stress-free ALD from Picosun August 28th, 2018

Alliances/Trade associations/Partnerships/Distributorships

Leti Announces EU Project to Develop Powerful, Inexpensive Sensors with Photonic Integrated Circuits: REDFINCH Members Initially Targeting Applications for Gas Detection and Analysis For Refineries & Petrochemical Industry and Protein Analysis for Dairy Industry September 19th, 2018

Leti & EFI Aim to Dramatically Improve Reliability & Speed of Low-Cost Electronic Devices for Autos: Project Will Extend Model Predictive Control Technique to Microcontrollers, Digital Signal Processors and Other Devices that Lack Powerful Computation Capabilities September 18th, 2018

Silvaco, Purdue team up to bring scalable atomistic TCAD solutions for next generation semiconductor devices and materials August 24th, 2018

Leti & CMP Announce World’s First Multi-Project-Wafer Service with Integrated Silicon OxRAM: Oxide-Based Resistive Ram Memory Platform Development for Backend Memories To Offer Non-Volatility Associated with Embedded Designs August 2nd, 2018

Research partnerships

Leti Announces EU Project to Develop Powerful, Inexpensive Sensors with Photonic Integrated Circuits: REDFINCH Members Initially Targeting Applications for Gas Detection and Analysis For Refineries & Petrochemical Industry and Protein Analysis for Dairy Industry September 19th, 2018

Researchers develop microbubble scrubber to destroy dangerous biofilms September 19th, 2018

Leti & EFI Aim to Dramatically Improve Reliability & Speed of Low-Cost Electronic Devices for Autos: Project Will Extend Model Predictive Control Technique to Microcontrollers, Digital Signal Processors and Other Devices that Lack Powerful Computation Capabilities September 18th, 2018

Tiny camera lens may help link quantum computers to network September 14th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project