Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button

Home > Press > Applied Materials' New SEMVision G4 System Sets the Benchmark with Defect-Per-Second Review at 2nm Resolution

Applied Materials' SEMVision G4 sets new standards for image quality and productivity while adding new technologies to accelerate defect root cause analysis and boost yield in volume manufacturing. (Photo: Business Wire)
Applied Materials' SEMVision G4 sets new standards for image quality and productivity while adding new technologies to accelerate defect root cause analysis and boost yield in volume manufacturing. (Photo: Business Wire)

Abstract:
Applied Materials, Inc. today unveiled its most advanced defect review SEM1, the Applied SEMVision™ G4, which extends the technology and productivity of Applied's highly successful SEMVision system to 45 nm and beyond applications. Key to the SEMVision G4 are its new SEM column technology and enhanced multi-perspective SEM imaging system (MPSI) that deliver state-of-the-art 2nm physical resolution for unmatched image quality at a benchmark one defect-per-second review rate.

Applied Materials' New SEMVision G4 System Sets the Benchmark with Defect-Per-Second Review at 2nm Resolution

SANTA CLARA, CA | Posted on December 5th, 2007

"The task of reliable and high productivity defect review and classification at 45nm in high-aspect ratio and densely packed memory and logic structures requires unprecedented SEM performance," said Ronen Benzion, general manager of the SEM division of Applied Materials' Process Diagnostics and Control business unit. "The SEMVision G4 sets new standards for image quality and productivity while adding new technologies that allow customers to accelerate defect root cause analysis and boost yield."

"The SEMVision G4 has recently been put into production and is expected to have a significant role in our in-line defect root cause analysis strategy," said Tomoharu Watanabe, senior manager of Yokkaichi Operations Manufacturing Engineering Department, Semiconductor Company, Toshiba Corporation.

The SEMVision G4 brings several advanced defect monitoring capabilities from the engineering floor to in-line volume manufacturing. These vital analytical tools enable customers to rapidly analyze and classify defects as small as 30nm in the most sensitive device layers, such as immersion photoresist and low-k dielectrics. Featuring EDXtreme, a revolution in EDX1-based material analysis, the SEMVision G4 extends the chemical characterization of defects to sub-50nm particle sizes. The system's new SEM column can rotate and tilt up to 45° relative to the wafer to provide complete 3-D data for superior defect visualization and classification. In addition, wafer edge and bevel analysis technology address a new frontier of yield enhancement, enabling customers to successfully address immersion-related defectivity issues.

Additional information on the SEMVision G4 will be presented at Applied Materials' booth #3D-1001 at SEMICON Japan, taking place on December 5-7, 2007 in Chiba, as part of Applied's integrated 45nm portfolio. Also, please visit http://www.appliedmaterials.com/products/semvision_g4_4.html .

1 SEM=scanning electron microscope

EDX = Energy-dispersive X-ray spectroscopy

####

About Applied Materials, Inc.
Applied Materials, Inc. (Nasdaq:AMAT) is the global leader in Nanomanufacturing Technology™ solutions with a broad portfolio of innovative equipment, service and software products for the fabrication of semiconductor chips, flat panel displays, solar photovoltaic cells, flexible electronics and energy efficient glass. At Applied Materials, we apply Nanomanufacturing Technology to improve the way people live.

For more information, please click here

Contacts:
Applied Materials, Inc.
Betty Newboe
408-563-0647 (editorial/media)
Randy Bane
408-986-7977 (financial community)

Copyright © Business Wire 2007

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Announcements

Borrowing from pastry chefs, engineers create nanolayered composites: Method to stack hundreds of nanoscale layers could open new vistas in materials science July 25th, 2016

Integration of novel materials with silicon chips makes new 'smart' devices possible July 25th, 2016

Accurate design of large icosahedral protein nanocages pushes bioengineering boundaries: Scientists used computational methods to build ten large, two-component, co-assembling icosahedral protein complexes the size of small virus coats July 25th, 2016

XEI Scientific Partners with Electron Microscopy Sciences to Promote and Sell its Products in North and South America July 25th, 2016

Tools

Attosecond physics: Mapping electromagnetic waveforms July 25th, 2016

XEI Scientific Partners with Electron Microscopy Sciences to Promote and Sell its Products in North and South America July 25th, 2016

An accelerated pipeline to open materials research: ORNL workflow system unites imaging, algorithms, and HPC to advance materials discovery and design July 24th, 2016

New superconducting coil improves MRI performance: UH-led research offers higher resolution, shorter scan time July 23rd, 2016

Events/Classes

Nanometrics Announces Upcoming Investor Events July 20th, 2016

n-tech Research Announces August 3, 2016 Date for Smart Coatings Webinar July 18th, 2016

Instrumented Indentation Expert Addresses Trends with Industry Leaders: Leading nanoindentation expert hosts webinar discussing theory and practice of instrumented indentation July 14th, 2016

SUNY Poly Celebrates Its 10th Year Exhibiting at SEMICON West with Cutting Edge Developments in Integrated Photonics and Power Electronics July 8th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic