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Home > News > Picosun and Nagoya University Announce Co-operation in Atomic Layer Deposition

October 26th, 2007

Picosun and Nagoya University Announce Co-operation in Atomic Layer Deposition

Abstract:
Picosun Oy, Finland has entered into a demonstration agreement with Nagoya University, Japan. Professor Zaima's laboratory at Nagoya University has recently purchased a SUNALE™ R-150B ALD reactor manufactured by Picosun. The ALD reactor is equipped with advanced Picosolid™ Booster precursor delivery system, which will make possible the use of a variety of low volatility solid and liquid precursors.

Source:
nanowerk.com

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