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Home > News > New equipment marks milestone in Mountbatten construction

October 11th, 2007

New equipment marks milestone in Mountbatten construction

Abstract:
Another significant milestone has been reached in the reconstruction of the Mountbatten clean room. The Head of School, Professor Harvey Rutt, has just signed off orders for some key pieces of equipment that will support the research to be carried out in the new complex.

The total value of the equipment purchased is £6.6M (including VAT) and includes 11 items of equipment. The most significant equipment is the Jeol JBX 9300 FS electron beam lithography system, which cost £3.3M. It is used to write very small patterns in resist, with an ultimate resolution below 10nm, making it a very important tool for top-down nanotechnology research.

Source:
ecs.soton.ac.uk

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