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Home > News > Polandís ITE orders sputtering tool from Surrey NanoSystems

October 10th, 2007

Polandís ITE orders sputtering tool from Surrey NanoSystems

Abstract:
Surrey NanoSystems of Newhaven, UK has won an order for its Gamma 1000 thin-film sputtering tool from Poland's Institute of Electron Technology (ITE) in Warsaw, to be delivered by the end of 2007. The system will be a key platform for the institute's microelectronics and optoelectronics fabrication R&D activities. ITE recently established two Centres of Excellence: CEPHONA (Physics and Technology of Photonic Nanostructures) and MANTARC (Micro- and Nanotechnology Applied Research Centre).

Surrey NanoSystems was established in December 2006 with funding from IP Group, and stems from a joint venture formed in 2005 between thin-film tool maker CEVP of Newhaven, UK and The University of Surrey's Advanced Technology Institute (ATI), which had developed a process for manufacturing carbon nanotubes at room temperature. ATI and CEVP contributed staff and intellectual property Surrey NanoSystems.

Source:
semiconductor-today.com

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