Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > News > BOC affiliate to develop processes using CO2 cryogenic cleaning systems

September 17th, 2007

BOC affiliate to develop processes using CO2 cryogenic cleaning systems

Abstract:
Eco-Snow Systems, one of the leading suppliers of dry, CO2-based wafer-cleaning tools and process equipment, has formed a joint venture development programme with Belgian nanoelectronics research centre IMEC, to develop and study photoresist and particle removal processes using CO2-based cryogenic cleaning systems.

An affiliate of the Linde acquired BOC Group plc, Eco-Snow will partner IMEC to assess the effectiveness of solid aerosol cleaning in conjunction with solvent-based, non-oxidizing wet chemistries in removing ion-implanted photoresist and post low-k etch resist in front-and-back-end-of-line integrated device manufacturing process.

Source:
gasworld.com

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

Basque researchers turn light upside down February 23rd, 2018

Imaging individual flexible DNA 'building blocks' in 3-D: Berkeley Lab researchers generate first images of 129 DNA structures February 22nd, 2018

'Memtransistor' brings world closer to brain-like computing: Combined memristor and transistor can process information and store memory with one device February 22nd, 2018

Photonic chip guides single photons, even when there are bends in the road February 16th, 2018

Announcements

Basque researchers turn light upside down February 23rd, 2018

Stiffness matters February 23rd, 2018

Histology in 3-D: New staining method enables Nano-CT imaging of tissue samples February 22nd, 2018

Developing reliable quantum computers February 22nd, 2018

Tools

Basque researchers turn light upside down February 23rd, 2018

Histology in 3-D: New staining method enables Nano-CT imaging of tissue samples February 22nd, 2018

Imaging individual flexible DNA 'building blocks' in 3-D: Berkeley Lab researchers generate first images of 129 DNA structures February 22nd, 2018

MEMS chips get metatlenses: Combining metasurface lenses with MEMS technology could add high-speed scanning and enhance focusing capability of optical systems February 21st, 2018

Alliances/Trade associations/Partnerships/Distributorships

New era in high field superconducting magnets – opening new frontiers in science, nanotechnology and materials discovery January 9th, 2018

Leti Field Trials Demonstrate New Multicarrier Waveform for Rural, Maritime Broadband Radio: Field Trial in Orkney Islands Used New Filtered Multicarrier Waveform at 700MHz Band with Flexible Bandwidth Usage (Fragmented and Continuous Spectrum) December 18th, 2017

A new product to help combat mouldy walls, thanks to technology developed at the ICN2 December 14th, 2017

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Research partnerships

Basque researchers turn light upside down February 23rd, 2018

Computers aid discovery of new, inexpensive material to make LEDs with high color quality February 20th, 2018

Rutgers-Led Innovation Could Spur Faster, Cheaper, Nano-Based Manufacturing: Scalable and cost-effective manufacturing of thin film devices February 14th, 2018

Understanding brain functions using upconversion nanoparticles: Researchers can now send light deep into the brain to study neural activities February 14th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project