Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Speedier and less expensive production of nano-geometries

Abstract:
VTT and SUSS MicroTec have developed an advanced nano imprinting stepper.

Speedier and less expensive production of nano-geometries

Finland | Posted on March 15th, 2007

VTT and SUSS MicroTec S.A.S. have developed the most versatile nano imprinting stepper on the market. The stepper and new methods form enabling technology for fast, low-cost production of flexible solar cells and nano-scale bio analysis platforms (Lab on a Chip). The stepper was developed within the framework of the Emerging Nanopatterning Methods project. VTT is already using a prototype of the NPS300 stepper at its laboratory in Micronova in Espoo Finland.

Based on Step and Stamp Imprint Lithography (SSIL), the stepper uses a patterned chip as a stamp; the stamp pattern is transferred to a polymer layer by imprinting. Large-scale replication of patterns is done by means of Step and Stamp imprinting. The stepper enables multi-layer imprinting with high-accuracy alignment. Both thermoplastic and UV cured material may be used. The patterned polymer layer can be used as an engraving mask when printing patterns on silicon or quartz. The method enables quick, low-cost replication of sub-100 nm geometries on a large area.

Traditionally, nano-scale geometries have been printed using e-beam lithography. This method has one weakness: it is slow. While other microelectronics equipment and methods may be used to produce sub-100 nm line widths, such equipment is extremely highly priced. Furthermore, traditional methods are not easily adaptable for printing on new functional materials or using 3D geometries.

E-beam lithography will continue to be used for the tiniest stamp patters also in the future. However, Step and Stamp patterning can be used for large area processes. It can also be applied to produce stamps for roll-to-roll nanopatterning.

Suitable for new materials and 3D geometries

The new stepper is suitable for nanopatterning of optical and electronic materials and biomaterials as well as 3-dimensional replication. VTT has even been able to produce sub-10 nm geometries. Thanks to its high-accuracy alignment, nanopatterning can be performed on the same platform with other patterning methods. The method is cost-efficient and fast, which makes it ideal for mass-scale production.

Nanopatterning is an enabling technology, with applications such as biotechnology, photonics, nano- and polymer electronics, hard drives, sensors, etc. Micronova's cleanroom equipment and process can cover the entire process chain from stamp manufacture to characterisation.

Emerging Nanopatterning Methods - VTT's biggest EU project

Coordinated by VTT, the Emerging Nanopatterning Methods (NaPa) project reinforces nanotechnology research in Europe. Launched in 2004 with a budget of EUR 31 million, the project is the largest EU project coordinated by VTT, as well as one of the EU's largest nanotechnology projects. The project aims at standardising the nano- imprinting processes and establishing a process library. In order to promote the feasibility of solutions developed the within the project, special focus is paid to cost-efficiency. The environmental friendliness of the process is another key aspect. One of the most significant project outcomes is the NPS300 nano imprinting stepper.

The project has also been concerned with developing roll-to-roll methods for the production of nano-geometries. A printer designed by VTT combines the new nanopatterning method with gravure printing and flexo techniques in one process run. This printer is already used by VTT as well.

####

About VTT
VTT has been engaged in nanopatterning development and research since 1997.
VTT is an impartial expert organisation. Its objective is to develop new technologies, create new innovations and value added thus increasing customer's competencies. With its know how VTT produces research, development, testing and information services to public sector and companies as well as international organisations.

For more information, please click here

Contacts:
Jouni Ahopelto
Research Professor
+358 20 722 6644
Päivi Majander

Research Scientist, Technology Manager, NaPa-project
+358 20 722 7295

Copyright © VTT

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

Plasmon-powered upconversion nanocrystals for enhanced bioimaging and polarized emission: Plasmonic gold nanorods brighten lanthanide-doped upconversion superdots for improved multiphoton bioimaging contrast and enable polarization-selective nonlinear emissions for novel nanoscal May 19th, 2017

Oddball enzyme provides easy path to synthetic biomaterials May 17th, 2017

Racyics Launches ‘makeChip’ Design Service Platform for GLOBALFOUNDRIES’ 22FDX® Technology: Racyics will provide IP and design services as a part of the foundry’s FDXcelerator™ Partner Program May 11th, 2017

Researchers develop transistors that can switch between two stable energy states May 9th, 2017

Announcements

Zap! Graphene is bad news for bacteria: Rice, Ben-Gurion universities show laser-induced graphene kills bacteria, resists biofouling May 22nd, 2017

Leti Will Demo World’s-first WVGA 10-µm Pitch GaN Microdisplays for Augmented Reality Video at Display Week in Los Angles: Invited Paper also Will Present Leti’s Success with New Augmented Reality Technology That Reduces Pixel Pitch to Less than 5 Microns May 22nd, 2017

Sensors detect disease markers in breath May 19th, 2017

Graphene-nanotube hybrid boosts lithium metal batteries: Rice University prototypes store 3 times the energy of lithium-ion batteries May 19th, 2017

Tools

Plasmon-powered upconversion nanocrystals for enhanced bioimaging and polarized emission: Plasmonic gold nanorods brighten lanthanide-doped upconversion superdots for improved multiphoton bioimaging contrast and enable polarization-selective nonlinear emissions for novel nanoscal May 19th, 2017

The brighter side of twisted polymers: Conjugated polymers designed with a twist produce tiny, brightly fluorescent particles with broad applications May 16th, 2017

Racyics Launches ‘makeChip’ Design Service Platform for GLOBALFOUNDRIES’ 22FDX® Technology: Racyics will provide IP and design services as a part of the foundry’s FDXcelerator™ Partner Program May 11th, 2017

UnitySC Announces Wafer Thinning Inspection System; Win from Power Semiconductor IDM for Automotive: Leading IDM Selects New 4See Series Automated Defect Inspection Platform for Power Semiconductor Automotive Applications May 11th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project