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November 24th, 2006
TEM sample prep system with adaptive ion milling technology
Abstract:
At the Electronic Device Failure Analysis Society's 32nd International Symposium for Testing and Failure Analysis (ISTFA) in Austin, TX, USA last week, Sela Ltd of Upper Yokneam, Israel, which has supplied over 250 engineering and failure analysis systems since 1992, launched the Xact, the first transmission electron microscopy (TEM) sample preparation system using new AIM (Adaptive Ion Milling) technology.
Source:
semiconductor-today.com
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