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Home > News > ASML ships EUV tools to CNSE and IMEC

August 29th, 2006

ASML ships EUV tools to CNSE and IMEC

Abstract:
ASML Holding NV (ASML) announced today that it shipped two extreme ultraviolet (EUV) Alpha Demo Tools (ADT) to customers. Both the College of Nanoscale Science and Engineering (CNSE) of the State University of New York (SUNY) at Albany, N.Y., and the nanoelectronics research institute IMEC in Leuven, Belgium, have received these industry first, full field EUV systems.

Source:
euronext.com

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