Nanotechnology Now - News Story: "Carl Zeiss ships first EUV optics to ASML"

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December 7th, 2005

Carl Zeiss ships first EUV optics to ASML

Abstract:
EUV lithography is a likely next-generation chip processing technology, based on 13-nanometer wavelength illumination, allowing chip makers to print features sizes of 32 nm and below on integrated circuits.

Source:
EETimes

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