Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > News > Low Cost Nanolithography

April 25th, 2005

Low Cost Nanolithography

Abstract:
Leading edge photolithography is now operating at a wavelength of l = 193 nm, and can pattern structures at the 90 nm node. Concurrently, l = 157 nm followed by extreme ultraviolet lithography (EUV, l = 13.2 nm) are being researched to succeed 193 nm optical lithography. This continuous reduction is wavelength combined with highly sophisticated designs of lenses and mirrors, design of advanced and complex masks, innovation in materials, processes, and precision machines will probably enable sub-70nm lithography, and may even enable sub-50 nm lithography.

Source:
siliconindia.com

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Possible Futures

Air Forceís 30-year plan seeks 'strategic agility' August 1st, 2014

IBM Announces $3 Billion Research Initiative to Tackle Chip Grand Challenges for Cloud and Big Data Systems: Scientists and engineers to push limits of silicon technology to 7 nanometers and below and create post-silicon future July 10th, 2014

Virus structure inspires novel understanding of onion-like carbon nanoparticles April 10th, 2014

Local girl does good March 22nd, 2014

Chip Technology

Graphene chips are close to significant commercialization October 1st, 2014

Speed at its limits September 30th, 2014

Research mimics brain cells to boost memory power September 30th, 2014

'Pixel' engineered electronics have growth potential: Rice, Oak Ridge, Vanderbilt, Penn scientists lead creation of atom-scale semiconducting composites September 29th, 2014

Nanoelectronics

Grenoble Hosting SEMICON Europa Oct. 7-9, First Time Event Held in France: Letiís 90-square-meter Booth Will Feature Portable Showroom To Demonstrate New Technology Innovations September 24th, 2014

SouthWest NanoTechnologies (SWeNT) Receives NIST Small Business Innovation Research (SBIR) Phase 1 Award to Produce Greater than 99% Semiconducting Single-Wall Carbon Nanotubes September 19th, 2014

Rice rolls 'neat' nanotube fibers: Rice University researchers' acid-free approach leads to strong conductive carbon threads September 15th, 2014

Excitonic Dark States Shed Light on TMDC Atomic Layers: Berkeley Lab Discovery Holds Promise for Nanoelectronic and Photonic Applications September 11th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE