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Home > News > Suss Microtec announces nano-imprint lithography tool

April 6th, 2005

Suss Microtec announces nano-imprint lithography tool

Abstract:
Suss MicroTec AG has developed a nano-imprint lithography tool. The NPS300 NanoPatterning Stepper was developed within the Sixth Framework Program in cooperation with the VTT Microelectronics Center during a one-year project.

Source:
EETimes

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