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Home > News > IBM claims to make first processors with immersion lithography

December 2nd, 2004

IBM claims to make first processors with immersion lithography

Abstract:
IBM claims to have made processors built around its Power architecture, based on immersion lithography techniques.

The technology could potentially extend 193-nm tools down to 45-nm and possibly below - thereby pushing out extreme ultraviolet (EUV) tools, according to analysts.

Source:
EETimes

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