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June 16th, 2004
Tegal Completes Acquisition of First Derivative Systems
Tegal Corporation, a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits and nanotechnology devices, today announced the closing of the transaction to acquire First Derivative Systems, Inc. (FDSI), the developer of a unique physical vapor deposition (PVD) system for 300mm applications.
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