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Home > News > Atomic-level lithography to enable nano era

February 23rd, 2004

Atomic-level lithography to enable nano era

Abstract:
Atomic-level lithography is expected to emerge and enable a new class of nanotechnology devices over time, but the nanofabrication technique faces cost and integration issues, according to a researcher at IBM Corp. during the SPIE Microlithography conference here today.

Source:
* Silicon Strategies

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