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June 25th, 2003
Ultratech has shipped laser annealing tools
Ultratech Inc. has developed a laser thermal processing (LTP) capability that should scale down to down to the 20-nanometer manufacturing process technology node and has already shipped R&D tools, the company said Wednesday (June 25, 2003). The company said that it has shipped R&D tools for laser annealing over the past 12 months, that it has taken orders for the first production tools, which it plans to ship at the end of this year, with volume-production shipments expected to commence in 2004.
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