Home > News > Ultratech has shipped laser annealing tools
June 25th, 2003
Ultratech has shipped laser annealing tools
Ultratech Inc. has developed a laser thermal processing (LTP) capability that should scale down to down to the 20-nanometer manufacturing process technology node and has already shipped R&D tools, the company said Wednesday (June 25, 2003). The company said that it has shipped R&D tools for laser annealing over the past 12 months, that it has taken orders for the first production tools, which it plans to ship at the end of this year, with volume-production shipments expected to commence in 2004.
Heinrich Rohrer dies at 79; a father of nanotechnology: With IBM colleague Gerd Binnig, Rohrer invented the scanning tunneling microscope, which can show individual atoms on a surface and move them around May 23rd, 2013
Gold nanocrystal vibration captured on billion-frames-per-second film May 23rd, 2013
Precision Positioning Systems go Nano: New Miniaturized Piezo-Motor Driven Nanopositioning Stage by PI May 22nd, 2013
Researchers Stitch Defects into the World’s Thinnest Semiconductor May 22nd, 2013