Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Entegris Partners with SEMATECH to Advance Surface Conditioning and Wafer Cleaning Technology for Semiconductor Device Manufacturing

Abstract:
Entegris, Inc. (Nasdaq:ENTG), a leader in contamination control and materials handling technologies for highly advanced manufacturing environments, and SEMATECH announced they have partnered to move forward the development of advanced nanoscale particle removal processes and cleaning technologies for next-generation wafers and devices.

Entegris Partners with SEMATECH to Advance Surface Conditioning and Wafer Cleaning Technology for Semiconductor Device Manufacturing

Albany, NY | Posted on September 16th, 2013

This collaboration will address some of the profound changes taking place in the semiconductor industry that are impacting fundamental aspects of process and equipment design—such as integration of new materials and process technology for sub-20 nm node manufacturing, next-generation lithography requirements and the progression to 450 mm wafers. One key issue relates to the preparation of critical surfaces through the entire semiconductor manufacturing process. Entegris will work with experts from SEMATECH's Nanodefect Center to develop new technologies and solutions to reduce nano-scale particle contamination during wafer processing.

"We are pleased to partner with SEMATECH to provide early solutions for wafer surface cleaning," said Bertrand Loy, president and CEO of Entegris. "Our goal is to leverage our contamination control expertise to develop filtration and particle detection methods for the most advanced cleaning processes."

"SEMATECH's Nanodefect Center aims to build industry participation in detecting, modeling, characterizing, and providing solutions for defect issues as geometries shrink below the 10 nm node," said Michael Lercel, senior director of Nanodefectivity and Metrology. "Our partnership with Entegris brings additional expertise to SEMATECH, and in turn will raise the level of our research efforts and further strengthen SEMATECH's commitment in identifying the challenges of future technology nodes."

Built on more than a decade of technical expertise in surface cleaning, particle removal and cleaning technology development, SEMATECH's Nanodefect Center provides a world leading suite of metrology and analysis capabilities to investigate the generation, propagation, removal, and impact of defects generated by equipment, equipment components, and materials used in advanced semiconductor processes such as lithography, etch, CMP, deposition, and cleaning.

####

About SEMATECH
SEMATECH®, the international consortium of leading semiconductor device, equipment, and materials manufacturers, this year celebrates 25 years of excellence in accelerating the commercialization of technology innovations into manufacturing solutions. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org.

Twitter: www.twitter.com/sematechnews

About Entegris

Entegris is a leading provider of a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in the semiconductor and other high-tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.

For more information, please click here

Contacts:
Media Contact:
Erica McGill
SEMATECH
518-649-1041


Media Contact:
Steve Cantor
Entegris
978-436-6750

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Graphene and quantum dots put in motion a CMOS-integrated camera that can see the invisible May 29th, 2017

Ag/ZnO-Nanorods Schottky diodes based UV-PDs are fabricated and tested May 26th, 2017

New metamaterial-enhanced MRI technique tested on humans May 26th, 2017

Controlling 3-D behavior of biological cells using laser holographic techniques May 26th, 2017

Chip Technology

Graphene and quantum dots put in motion a CMOS-integrated camera that can see the invisible May 29th, 2017

Researchers find new way to control light with electric fields May 25th, 2017

Nanometrics Announces Retirement Plans of CEO Timothy Stultz: Dr. Stultz to Continue as Director May 25th, 2017

GLOBALFOUNDRIES and Chengdu Partner to Expand FD-SOI Ecosystem in China: More than $100M investment to establish a center of excellence for FDXTM FD-SOI design May 23rd, 2017

Announcements

Graphene and quantum dots put in motion a CMOS-integrated camera that can see the invisible May 29th, 2017

Ag/ZnO-Nanorods Schottky diodes based UV-PDs are fabricated and tested May 26th, 2017

New metamaterial-enhanced MRI technique tested on humans May 26th, 2017

Controlling 3-D behavior of biological cells using laser holographic techniques May 26th, 2017

Alliances/Trade associations/Partnerships/Distributorships

California Research Alliance by BASF establishes more than 25 research projects in three years April 26th, 2017

BASF and Landa partner to create revolutionary pigments for automotive coatings: The alliance combines BASF innovations with Landa nano-pigment technology April 5th, 2017

Leti Announces EU/South Korean Project for World’s First 5G-system Prototype: Coinciding with the 2018 Winter Games in PyeongChang, Korea, Prototype Will Be First Time State-of-the-art Terrestrial Wireless Communication Is Seamlessly Combined with Disruptive Satellite Communicati April 4th, 2017

ATTOPSEMI Technology Joins FDXcelerator Program to Deliver Advanced Non-Volatile Memory IP to GLOBALFOUNDRIES 22 FDX® Technology Platform: Leading-edge I-fuse™ brings higher reliability, smaller cell size and ease of programmability for consumer, automotive, and IoT applications March 27th, 2017

Research partnerships

Graphene and quantum dots put in motion a CMOS-integrated camera that can see the invisible May 29th, 2017

Ag/ZnO-Nanorods Schottky diodes based UV-PDs are fabricated and tested May 26th, 2017

Three-dimensional graphene: Experiment at BESSY II shows that optical properties are tuneable May 24th, 2017

Zap! Graphene is bad news for bacteria: Rice, Ben-Gurion universities show laser-induced graphene kills bacteria, resists biofouling May 22nd, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project