Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Fluorescence Technique Measures Photoacid Distribution in Photoresists with Nanoscale Resolution

Schematic showing fluorescence from UV-activated fluorophores excited by 532 nm light that reveals nanoscale photoacid distribution (left).  Activated fluorophore concentration corresponds to the inverse of the original photoacid distribution (right).
Schematic showing fluorescence from UV-activated fluorophores excited by 532 nm light that reveals nanoscale photoacid distribution (left). Activated fluorophore concentration corresponds to the inverse of the original photoacid distribution (right).

Abstract:
A team of researchers from the NIST Center for Nanoscale Science and Technology, the University of Maryland, and Korea University (Seoul, Korea) has measured the nanoscale distribution of photoacid molecules in photoresists using a fluorescence technique originally developed to provide images of biological structures smaller than the wavelength of light.* Photoresists are light-sensitive chemicals used for manufacturing the semiconductor integrated circuits found in computers and other electronics. By measuring the chemical reactions in photoresists at a smaller length scale, this method potentially opens a path to manufacturing smaller electronic devices.

Fluorescence Technique Measures Photoacid Distribution in Photoresists with Nanoscale Resolution

Gaithersburg, MD | Posted on April 17th, 2013

In today's photoresists, chemical amplification of light allows for the use of low-brightness short-wavelength light sources, which enable smaller feature sizes to be printed at higher throughputs. Each individual photon activates a molecule which generates a photoacid. During post-exposure baking, the photoacid diffuses, rendering a volume of the resist soluble to developer. This improves the sensitivity, or photospeed, of the resist, but at the cost of degraded image resolution: a result of the photoacid diffusion. Until now, it has only been possible to infer indirectly where the photoacid molecules are produced or how they diffuse by analyzing the resist images after the resist is fully exposed, either before or after it is developed. A more direct measurement is critically needed, however, because the distribution of the photoacid molecules within a resist film limits the minimum feature sizes that can be produced on computer chips. Precise measurements can help photoresist manufacturers understand the processes that lead to loss of image contrast and develop measures to mitigate blur induced by photoacid diffusion.

To observe the location of the photoacid molecules more directly, the research team used a novel fluorescent dye that can be switched from a dark to bright state either by exposure to ultraviolet light or by reaction with a nearby acid molecule. Over time, they fit the fluorescent signal of each dye molecule to a two-dimensional distribution, allowing them to map the locations of the associated photoacid molecules with single-molecule sensitivity. The team also developed new statistical analysis methods that enable them to extract high-resolution information even when there is a very low concentration of fluorescent molecules. This method allows them to be confident that the behavior of the system is not changed by the presence of the fluorophores.

Ultimately, the researchers believe that these techniques will be useful for measuring nanoscale transport processes in a wide variety of soft-matter systems beyond photoresists, such as in polymers.

*Super-resolution optical measurement of nanoscale photoacid distribution in lithographic materials, A. J. Berro, A. J. Berglund, P. T. Carmichael, J. S. Kim, and J. A. Liddle, ACS Nano 6, 9496-9502 (2012).

####

About National Institute of Standards and Technology (NIST)
The National Institute of Standards and Technology (NIST) is an agency of the U.S. Department of Commerce.

For more information, please click here

Contacts:
J. Alexander Liddle
301-975-6050

Copyright © National Institute of Standards and Technology (NIST)

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

NIST Publication Database:

Journal Web Site:

Related News Press

News and information

Yale researchersí technology turns wasted heat into power June 27th, 2016

FEI Launches Helios G4 DualBeam Series for Materials Science: The Helios G4 DualBeam Series features new capabilities to enable scientists and engineers to answer the most demanding and challenging scientific questions June 27th, 2016

Russian physicists create a high-precision 'quantum ruler': Physicists have devised a method for creating a special quantum entangled state June 25th, 2016

Nanoscientists develop the 'ultimate discovery tool': Rapid discovery power is similar to what gene chips offer biology June 25th, 2016

Ultrathin, flat lens resolves chirality and color: Multifunctional lens could replace bulky, expensive machines June 25th, 2016

Imaging

FEI Launches Helios G4 DualBeam Series for Materials Science: The Helios G4 DualBeam Series features new capabilities to enable scientists and engineers to answer the most demanding and challenging scientific questions June 27th, 2016

Laboratories

Titan shines light on high-temperature superconductor pathway: Simulation demonstrates how superconductivity arises in cuprates' pseudogap phase June 22nd, 2016

Discovery of gold nanocluster 'double' hints at other shape-changing particles: New analysis approach brings two unique atomic structures into focus June 19th, 2016

Efficient hydrogen production made easy: Sticking electrons to a semiconductor with hydrazine creates an electrocatalyst June 17th, 2016

Discovery of gold nanocluster 'double' hints at other shape changing particles: New analysis approach brings two unique atomic structures into focus June 15th, 2016

Govt.-Legislation/Regulation/Funding/Policy

Nanoscientists develop the 'ultimate discovery tool': Rapid discovery power is similar to what gene chips offer biology June 25th, 2016

Ultrathin, flat lens resolves chirality and color: Multifunctional lens could replace bulky, expensive machines June 25th, 2016

Particle zoo in a quantum computer: First experimental quantum simulation of particle physics phenomena June 23rd, 2016

Titan shines light on high-temperature superconductor pathway: Simulation demonstrates how superconductivity arises in cuprates' pseudogap phase June 22nd, 2016

Nanomedicine

Nanoscientists develop the 'ultimate discovery tool': Rapid discovery power is similar to what gene chips offer biology June 25th, 2016

Nanotechnology and math deliver two-in-one punch for cancer therapy resistance June 24th, 2016

Self-assembling icosahedral protein designed: Self-assembling icosahedral protein designed June 22nd, 2016

Stealth nanocapsules kill Chagas parasites in mouse models June 22nd, 2016

Discoveries

Yale researchersí technology turns wasted heat into power June 27th, 2016

Superheroes are real: Ultrasensitive nonlinear metamaterials for data transfer June 25th, 2016

Russian physicists create a high-precision 'quantum ruler': Physicists have devised a method for creating a special quantum entangled state June 25th, 2016

Nanoscientists develop the 'ultimate discovery tool': Rapid discovery power is similar to what gene chips offer biology June 25th, 2016

Announcements

Yale researchersí technology turns wasted heat into power June 27th, 2016

FEI Launches Helios G4 DualBeam Series for Materials Science: The Helios G4 DualBeam Series features new capabilities to enable scientists and engineers to answer the most demanding and challenging scientific questions June 27th, 2016

Russian physicists create a high-precision 'quantum ruler': Physicists have devised a method for creating a special quantum entangled state June 25th, 2016

Nanoscientists develop the 'ultimate discovery tool': Rapid discovery power is similar to what gene chips offer biology June 25th, 2016

Research partnerships

Superheroes are real: Ultrasensitive nonlinear metamaterials for data transfer June 25th, 2016

Soft decoupling of organic molecules on metal June 23rd, 2016

FEI and University of Liverpool Announce QEMSCAN Research Initiative: University of Liverpool will utilize FEIís QEMSCAN technology to gain a better insight into oil and gas reserves & potentially change the approach to evaluating them June 22nd, 2016

Tailored DNA shifts electrons into the 'fast lane': DNA nanowire improved by altering sequences June 22nd, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic