Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Fluorescence Technique Measures Photoacid Distribution in Photoresists with Nanoscale Resolution

Schematic showing fluorescence from UV-activated fluorophores excited by 532 nm light that reveals nanoscale photoacid distribution (left).  Activated fluorophore concentration corresponds to the inverse of the original photoacid distribution (right).
Schematic showing fluorescence from UV-activated fluorophores excited by 532 nm light that reveals nanoscale photoacid distribution (left). Activated fluorophore concentration corresponds to the inverse of the original photoacid distribution (right).

Abstract:
A team of researchers from the NIST Center for Nanoscale Science and Technology, the University of Maryland, and Korea University (Seoul, Korea) has measured the nanoscale distribution of photoacid molecules in photoresists using a fluorescence technique originally developed to provide images of biological structures smaller than the wavelength of light.* Photoresists are light-sensitive chemicals used for manufacturing the semiconductor integrated circuits found in computers and other electronics. By measuring the chemical reactions in photoresists at a smaller length scale, this method potentially opens a path to manufacturing smaller electronic devices.

Fluorescence Technique Measures Photoacid Distribution in Photoresists with Nanoscale Resolution

Gaithersburg, MD | Posted on April 17th, 2013

In today's photoresists, chemical amplification of light allows for the use of low-brightness short-wavelength light sources, which enable smaller feature sizes to be printed at higher throughputs. Each individual photon activates a molecule which generates a photoacid. During post-exposure baking, the photoacid diffuses, rendering a volume of the resist soluble to developer. This improves the sensitivity, or photospeed, of the resist, but at the cost of degraded image resolution: a result of the photoacid diffusion. Until now, it has only been possible to infer indirectly where the photoacid molecules are produced or how they diffuse by analyzing the resist images after the resist is fully exposed, either before or after it is developed. A more direct measurement is critically needed, however, because the distribution of the photoacid molecules within a resist film limits the minimum feature sizes that can be produced on computer chips. Precise measurements can help photoresist manufacturers understand the processes that lead to loss of image contrast and develop measures to mitigate blur induced by photoacid diffusion.

To observe the location of the photoacid molecules more directly, the research team used a novel fluorescent dye that can be switched from a dark to bright state either by exposure to ultraviolet light or by reaction with a nearby acid molecule. Over time, they fit the fluorescent signal of each dye molecule to a two-dimensional distribution, allowing them to map the locations of the associated photoacid molecules with single-molecule sensitivity. The team also developed new statistical analysis methods that enable them to extract high-resolution information even when there is a very low concentration of fluorescent molecules. This method allows them to be confident that the behavior of the system is not changed by the presence of the fluorophores.

Ultimately, the researchers believe that these techniques will be useful for measuring nanoscale transport processes in a wide variety of soft-matter systems beyond photoresists, such as in polymers.

*Super-resolution optical measurement of nanoscale photoacid distribution in lithographic materials, A. J. Berro, A. J. Berglund, P. T. Carmichael, J. S. Kim, and J. A. Liddle, ACS Nano 6, 9496-9502 (2012).

####

About National Institute of Standards and Technology (NIST)
The National Institute of Standards and Technology (NIST) is an agency of the U.S. Department of Commerce.

For more information, please click here

Contacts:
J. Alexander Liddle
301-975-6050

Copyright © National Institute of Standards and Technology (NIST)

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related Links

NIST Publication Database:

Journal Web Site:

Related News Press

News and information

Nanosensors could help determine tumors’ ability to remodel tissue: Measuring enzyme levels could help doctors select appropriate treatments September 29th, 2016

Innovation in Nanotechnology is Focus of Symposium: Annual event brings international experts to Northwestern Oct. 6 September 29th, 2016

Cambrios at CEATEC - Japan 2016 September 29th, 2016

Picosun patents ALD nanolaminate to prevent electronics from overheating September 28th, 2016

Imaging

Leti and Taiwanese Tech Organizations Sponsoring Workshop in Taipei on MEMS, IoT, Smart Lighting Applications, System Reliability & Security September 28th, 2016

Oxford Instruments is ‘Bringing the Nanoworld Together’ in India once again - 22 - 23 November 2016 | IISc Bangalore September 21st, 2016

Bruker Introduces Complete Commercial AFM-Based SECM Solution: PeakForce SECM Mode Enables Previously Unobtainable Electrochemical Information September 20th, 2016

Iran to hold intl. school on application of nanomaterials in medicine September 20th, 2016

Laboratories

Crystalline Fault Lines Provide Pathway for Solar Cell Current: New tomographic AFM imaging technique reveals that microstructural defects, generally thought to be detrimental, actually improve conductivity in cadmium telluride solar cells September 26th, 2016

Govt.-Legislation/Regulation/Funding/Policy

Crystalline Fault Lines Provide Pathway for Solar Cell Current: New tomographic AFM imaging technique reveals that microstructural defects, generally thought to be detrimental, actually improve conductivity in cadmium telluride solar cells September 26th, 2016

Tattoo therapy could ease chronic disease: Rice-made nanoparticles tested at Baylor College of Medicine may help control autoimmune diseases September 23rd, 2016

PHENOMEN is a FET-Open Research Project aiming to lay the foundations a new information technology September 19th, 2016

NIST Patents Single-Photon Detector for Potential Encryption and Sensing Apps September 16th, 2016

Nanomedicine

Nanosensors could help determine tumors’ ability to remodel tissue: Measuring enzyme levels could help doctors select appropriate treatments September 29th, 2016

Fighting cancer with sticky nanoparticles September 27th, 2016

Gold nanoparticles conjugated quercetin inhibits epithelial-mesenchymal transition, angiogenesis and invasiveness via EGFR/VEGFR-2 mediated pathway in breast cancer September 27th, 2016

Tattoo therapy could ease chronic disease: Rice-made nanoparticles tested at Baylor College of Medicine may help control autoimmune diseases September 23rd, 2016

Discoveries

Nanosensors could help determine tumors’ ability to remodel tissue: Measuring enzyme levels could help doctors select appropriate treatments September 29th, 2016

Fighting cancer with sticky nanoparticles September 27th, 2016

Gold nanoparticles conjugated quercetin inhibits epithelial-mesenchymal transition, angiogenesis and invasiveness via EGFR/VEGFR-2 mediated pathway in breast cancer September 27th, 2016

UNAM develops successful nano edible coating which increases life food September 27th, 2016

Announcements

Nanosensors could help determine tumors’ ability to remodel tissue: Measuring enzyme levels could help doctors select appropriate treatments September 29th, 2016

Innovation in Nanotechnology is Focus of Symposium: Annual event brings international experts to Northwestern Oct. 6 September 29th, 2016

Cambrios at CEATEC - Japan 2016 September 29th, 2016

Picosun patents ALD nanolaminate to prevent electronics from overheating September 28th, 2016

Research partnerships

Crystalline Fault Lines Provide Pathway for Solar Cell Current: New tomographic AFM imaging technique reveals that microstructural defects, generally thought to be detrimental, actually improve conductivity in cadmium telluride solar cells September 26th, 2016

Tattoo therapy could ease chronic disease: Rice-made nanoparticles tested at Baylor College of Medicine may help control autoimmune diseases September 23rd, 2016

Graphene nanoribbons show promise for healing spinal injuries: Rice University scientists develop Texas-PEG to help knit severed, damaged spinal cords September 19th, 2016

NIST Patents Single-Photon Detector for Potential Encryption and Sensing Apps September 16th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic