Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Leading-Edge Research at SUNY NanoCollege Generates Nearly 50 Technical Papers to be Presented at Prestigious Lithography Forum

Abstract:
CNSE and its global corporate partners to showcase innovative technologies at SPIE 2013.

Advanced Lithography conference; Professor Alain Diebold to be recognized as SPIE Fellow.

Leading-Edge Research at SUNY NanoCollege Generates Nearly 50 Technical Papers to be Presented at Prestigious Lithography Forum

Albany, NY | Posted on February 21st, 2013

Continuing to support the vision and leadership of Governor Andrew Cuomo through which New York is being transformed into the worldwide epicenter for nanotechnology, the SUNY College of Nanoscale Science and Engineering (CNSE) announced today that pioneering scientific research conducted at CNSE's Albany NanoTech Complex has contributed to nearly 50 technical papers being presented at the world's preeminent lithography conference.

"As further testimony to Governor Andrew Cuomo's strategic blueprint that is establishing New York as the leading global hub for high-tech innovation and manufacturing, CNSE is delighted to showcase the industry-leading research capabilities at its world-class Albany NanoTech Complex as part of the world's foremost lithography conference," said CNSE Executive Vice President of Innovation and Technology and Vice President for Research Dr. Michael Liehr. "The papers presented by CNSE's faculty and researchers, along with its global corporate partners, highlight the success of this unique public-private model in shattering scientific boundaries and driving critical advances to meet the needs of industry."

The research conducted at CNSE to be featured at the SPIE 2013 Advanced Lithography conference is the culmination of efforts by both CNSE scientists and the college's global corporate partners, including a number of papers that showcase joint research resulting from the NanoCollege's unique collaborative partnerships. Presenting corporate partners include IBM, GLOBALFOUNDRIES, SEMATECH, Applied Materials, Tokyo Electron and Vistec Lithography.

Forum papers focus on a variety of research topics that are critical to moving the nanoelectronics industry forward and overcoming technical challenges, including extreme ultraviolet (EUV) micro-exposure tool use at CNSE; EUV photoresist development and imaging; EUV mask blank fabrication; outgassing effects in EUV photoresist; eBeam, X-ray, and optical metrology techniques; directed self-assembly used in finFET fabrication; phase defect detection in EUV mask blanks; phase shift focus monitors; KrF hybrid photo resist development; LER measurement and mitigation; multilayer deposition techniques for EUV mask blanks; resolution improvement using pupil filtering in EUV lithography; the out-of-band illumination effect on EUV lithography; and EUV mask inspection techniques.

Also at the conference, SPIE will officially recognize CNSE Empire Innovation Professor of Nanoscale Science Dr. Alain Diebold as an SPIE Fellow. He is one of only 69 members of distinction to earn the honor in 2013, which highlights technical achievements and service to the general optics community, as well as service to the society.

Known as the world's leading nanoelectronics lithography conference and exhibition, the 39th annual SPIE Advanced Lithography conference is being held February 24 through 28 in California at the San Jose Convention Center and San Jose Marriott.

For more information on the conference, visit spie.org/x10942.xml.

####

About UAlbany NanoCollege
The UAlbany CNSE is the first college in the world dedicated to education, research, development and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience and nanoeconomics. With more than $14 billion in high-tech investments, CNSE represents the world’s most advanced university-driven research enterprise, offering students a one-of-a-kind academic experience and providing over 300 corporate partners with access to an unmatched ecosystem for leading-edge R&D and commercialization of nanoelectronics and nanotechnology innovations. CNSE’s footprint spans upstate New York, including its Albany NanoTech Complex, an 800,000-square-foot megaplex with the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 85,000 square feet of Class 1 capable cleanrooms. More than 3,100 scientists, researchers, engineers, students and faculty work here, from companies including IBM, Intel, GlobalFoundries, SEMATECH, Samsung, TSMC, Toshiba, Applied Materials, Tokyo Electron, ASML and Lam Research. An expansion now underway, part of which will house the world’s first Global 450mm Consortium, will add nearly 500,000 square feet of next-generation infrastructure, an additional 50,000 square feet of Class 1 capable cleanrooms, and more than 1,000 scientists, researchers and engineers from CNSE and global corporations. In addition, CNSE’s Solar Energy Development Center in Halfmoon provides a prototyping and demonstration line for next-generation CIGS thin-film solar cells, supporting its leadership of the U.S. Photovoltaic Manufacturing Consortium (PVMC). CNSE’s Smart System Technology and Commercialization Center of Excellence (STC) in Rochester offers state-of-the-art capabilities for MEMS fabrication and packaging. CNSE also co-founded and manages operations at the Computer Chip Commercialization Center at SUNYIT in Utica and is a co-founder of the Nanotechnology Innovation and Commercialization Excelerator in Syracuse.

For more information, please click here

Contacts:
Steve Janack
CNSE
Vice President
Marketing and Communications
(518) 956-7322

Copyright © UAlbany NanoCollege

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Carbon nanotube optics poised to provide pathway to optical-based quantum cryptography and quantum computing: Researchers are exploring enhanced potential of carbon nanotubes for unique applications June 18th, 2018

Camouflaged nanoparticles used to deliver killer protein to cancer June 17th, 2018

Squeezing light at the nanoscale: Ultra-confined light could detect harmful molecules June 17th, 2018

Physicists devise method to reveal how light affects materials: The new method adds to the understanding of the fundamental laws governing the interaction of electrons and light June 15th, 2018

Govt.-Legislation/Regulation/Funding/Policy

Carbon nanotube optics poised to provide pathway to optical-based quantum cryptography and quantum computing: Researchers are exploring enhanced potential of carbon nanotubes for unique applications June 18th, 2018

Camouflaged nanoparticles used to deliver killer protein to cancer June 17th, 2018

Squeezing light at the nanoscale: Ultra-confined light could detect harmful molecules June 17th, 2018

Tripling the Energy Storage of Lithium-Ion Batteries: Scientists have synthesized a new cathode material from iron fluoride that surpasses the capacity limits of traditional lithium-ion batteries June 14th, 2018

Academic/Education

SUNY Poly Professor Eric Lifshin Selected for ‘Fellow of the Microanalysis Society’ Position for Significant Contributions to Microanalysis June 13th, 2018

Grand Opening of UC Irvine Materials Research Institute (IMRI) to Spotlight JEOL Center for Nanoscale Solutions: Renowned Materials Scientists to Present at the 1st International Symposium on Advanced Microscopy and Spectroscopy (ISAMS) April 18th, 2018

Lifeboat Foundation funds flying 3D-printed classroom cubesats with Perlan II April 16th, 2018

SUNY Poly’s Center for Semiconductor Research in Albany Earns World-Class TÜV SÜD AMERICA INC. ISO 9001:2015 Certification: Albany NanoTech Complex Certification Assures Top-Tier Quality in Semiconductor Test Structures; Certification a First for a SUNY Campus March 6th, 2018

Chip Technology

Carbon nanotube optics poised to provide pathway to optical-based quantum cryptography and quantum computing: Researchers are exploring enhanced potential of carbon nanotubes for unique applications June 18th, 2018

Making quantum puddles: Physicists discover how to create the thinnest liquid films ever June 13th, 2018

Leti Presenting Strategic Vision and Hosting a Workshop at SEMICON West: “From Electrons to Photons” Leti Workshop and CEO Media Briefing Set for Tuesday, July 10 in W Hotel, San Francisco June 12th, 2018

Nanometrics Updates Time of Webcast at Stifel 2018 Cross Sector Insight Conference June 12th, 2018

Announcements

Carbon nanotube optics poised to provide pathway to optical-based quantum cryptography and quantum computing: Researchers are exploring enhanced potential of carbon nanotubes for unique applications June 18th, 2018

Camouflaged nanoparticles used to deliver killer protein to cancer June 17th, 2018

Squeezing light at the nanoscale: Ultra-confined light could detect harmful molecules June 17th, 2018

Physicists devise method to reveal how light affects materials: The new method adds to the understanding of the fundamental laws governing the interaction of electrons and light June 15th, 2018

Events/Classes

Leti Presenting Strategic Vision and Hosting a Workshop at SEMICON West: “From Electrons to Photons” Leti Workshop and CEO Media Briefing Set for Tuesday, July 10 in W Hotel, San Francisco June 12th, 2018

180 Degree Capital Corp. to Provide Live Remote Access to Its Annual Meeting of Shareholders on June 12, 2018 June 12th, 2018

Nanometrics Updates Time of Webcast at Stifel 2018 Cross Sector Insight Conference June 12th, 2018

Arrowhead Pharmaceuticals to Present at Upcoming June 2018 Conferences May 31st, 2018

Alliances/Trade associations/Partnerships/Distributorships

Leti and Cellmic Join Forces to Speed Market Adoption of Lens-Free Imaging and Sensing Techniques May 3rd, 2018

Nanobiotix and Weill Cornell Medicine Partner on Pre-Clinical Research Inbox x May 3rd, 2018

New era in high field superconducting magnets – opening new frontiers in science, nanotechnology and materials discovery January 9th, 2018

Leti Field Trials Demonstrate New Multicarrier Waveform for Rural, Maritime Broadband Radio: Field Trial in Orkney Islands Used New Filtered Multicarrier Waveform at 700MHz Band with Flexible Bandwidth Usage (Fragmented and Continuous Spectrum) December 18th, 2017

Printing/Lithography/Inkjet/Inks/Bio-printing

Making carbon nanotubes as usable as common plastics: Researchers discover that cresols disperse carbon nanotubes at unprecedentedly high concentrations May 15th, 2018

New 4-D printer could reshape the world we live in March 20th, 2018

Leti & Mapper announce cyber-security breakthrough that encrypts individual chips with a code: Low-Cost Cyber-Security Breakthrough that Encrypts Individual Chips With a Unique Code Presented at SPIE Advanced Lithography 2018 in San Jose March 2nd, 2018

Basque researchers turn light upside down February 23rd, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project