Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Leading-Edge Research at SUNY NanoCollege Generates Nearly 50 Technical Papers to be Presented at Prestigious Lithography Forum

Abstract:
CNSE and its global corporate partners to showcase innovative technologies at SPIE 2013.

Advanced Lithography conference; Professor Alain Diebold to be recognized as SPIE Fellow.

Leading-Edge Research at SUNY NanoCollege Generates Nearly 50 Technical Papers to be Presented at Prestigious Lithography Forum

Albany, NY | Posted on February 21st, 2013

Continuing to support the vision and leadership of Governor Andrew Cuomo through which New York is being transformed into the worldwide epicenter for nanotechnology, the SUNY College of Nanoscale Science and Engineering (CNSE) announced today that pioneering scientific research conducted at CNSE's Albany NanoTech Complex has contributed to nearly 50 technical papers being presented at the world's preeminent lithography conference.

"As further testimony to Governor Andrew Cuomo's strategic blueprint that is establishing New York as the leading global hub for high-tech innovation and manufacturing, CNSE is delighted to showcase the industry-leading research capabilities at its world-class Albany NanoTech Complex as part of the world's foremost lithography conference," said CNSE Executive Vice President of Innovation and Technology and Vice President for Research Dr. Michael Liehr. "The papers presented by CNSE's faculty and researchers, along with its global corporate partners, highlight the success of this unique public-private model in shattering scientific boundaries and driving critical advances to meet the needs of industry."

The research conducted at CNSE to be featured at the SPIE 2013 Advanced Lithography conference is the culmination of efforts by both CNSE scientists and the college's global corporate partners, including a number of papers that showcase joint research resulting from the NanoCollege's unique collaborative partnerships. Presenting corporate partners include IBM, GLOBALFOUNDRIES, SEMATECH, Applied Materials, Tokyo Electron and Vistec Lithography.

Forum papers focus on a variety of research topics that are critical to moving the nanoelectronics industry forward and overcoming technical challenges, including extreme ultraviolet (EUV) micro-exposure tool use at CNSE; EUV photoresist development and imaging; EUV mask blank fabrication; outgassing effects in EUV photoresist; eBeam, X-ray, and optical metrology techniques; directed self-assembly used in finFET fabrication; phase defect detection in EUV mask blanks; phase shift focus monitors; KrF hybrid photo resist development; LER measurement and mitigation; multilayer deposition techniques for EUV mask blanks; resolution improvement using pupil filtering in EUV lithography; the out-of-band illumination effect on EUV lithography; and EUV mask inspection techniques.

Also at the conference, SPIE will officially recognize CNSE Empire Innovation Professor of Nanoscale Science Dr. Alain Diebold as an SPIE Fellow. He is one of only 69 members of distinction to earn the honor in 2013, which highlights technical achievements and service to the general optics community, as well as service to the society.

Known as the world's leading nanoelectronics lithography conference and exhibition, the 39th annual SPIE Advanced Lithography conference is being held February 24 through 28 in California at the San Jose Convention Center and San Jose Marriott.

For more information on the conference, visit spie.org/x10942.xml.

####

About UAlbany NanoCollege
The UAlbany CNSE is the first college in the world dedicated to education, research, development and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience and nanoeconomics. With more than $14 billion in high-tech investments, CNSE represents the world’s most advanced university-driven research enterprise, offering students a one-of-a-kind academic experience and providing over 300 corporate partners with access to an unmatched ecosystem for leading-edge R&D and commercialization of nanoelectronics and nanotechnology innovations. CNSE’s footprint spans upstate New York, including its Albany NanoTech Complex, an 800,000-square-foot megaplex with the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 85,000 square feet of Class 1 capable cleanrooms. More than 3,100 scientists, researchers, engineers, students and faculty work here, from companies including IBM, Intel, GlobalFoundries, SEMATECH, Samsung, TSMC, Toshiba, Applied Materials, Tokyo Electron, ASML and Lam Research. An expansion now underway, part of which will house the world’s first Global 450mm Consortium, will add nearly 500,000 square feet of next-generation infrastructure, an additional 50,000 square feet of Class 1 capable cleanrooms, and more than 1,000 scientists, researchers and engineers from CNSE and global corporations. In addition, CNSE’s Solar Energy Development Center in Halfmoon provides a prototyping and demonstration line for next-generation CIGS thin-film solar cells, supporting its leadership of the U.S. Photovoltaic Manufacturing Consortium (PVMC). CNSE’s Smart System Technology and Commercialization Center of Excellence (STC) in Rochester offers state-of-the-art capabilities for MEMS fabrication and packaging. CNSE also co-founded and manages operations at the Computer Chip Commercialization Center at SUNYIT in Utica and is a co-founder of the Nanotechnology Innovation and Commercialization Excelerator in Syracuse.

For more information, please click here

Contacts:
Steve Janack
CNSE
Vice President
Marketing and Communications
(518) 956-7322

Copyright © UAlbany NanoCollege

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Toyocolor to Launch New Carbon Nanotube Materials at nano tech 2015 January 24th, 2015

NANOPOSTER 2015 - 5th Virtual Nanotechnology Conference - call for abstracts January 24th, 2015

Nanosensor Used for Simultaneous Determination of Effective Tea Components January 24th, 2015

The latest fashion: Graphene edges can be tailor-made: Rice University theory shows it should be possible to tune material's properties January 24th, 2015

Govt.-Legislation/Regulation/Funding/Policy

The latest fashion: Graphene edges can be tailor-made: Rice University theory shows it should be possible to tune material's properties January 24th, 2015

Scientists 'bend' elastic waves with new metamaterials that could have commercial applications: Materials could benefit imaging and military enhancements such as elastic cloaking January 23rd, 2015

Harper Government Supports Research Innovation in Western Canada January 22nd, 2015

EnvisioNano: An image contest hosted by the National Nanotechnology Initiative (NNI) January 22nd, 2015

Academic/Education

Rice's Naomi Halas to direct Smalley Institute: Optics pioneer will lead Rice's multidisciplinary science institute January 15th, 2015

SUNY Board Appoints Dr. Alain Kaloyeros as Founding President of SUNY Polytechnic Institute January 13th, 2015

CNSE's Smart System Technology & Commercialization Center Successfully Recertifies as ISO 9001:2008 January 12th, 2015

SUNY Poly Now Accepting Applications to the Colleges of Nanoscale Science and Engineering for Fall 2015: Full Scholarships Available to Incoming CNSE Students January 7th, 2015

Chip Technology

The latest fashion: Graphene edges can be tailor-made: Rice University theory shows it should be possible to tune material's properties January 24th, 2015

New method to generate arbitrary optical pulses January 21st, 2015

New signal amplification process set to transform communications, imaging, computing: UC San Diego researchers discover a mechanism to amplify signals in optoelectronic systems that is far more efficient than standard processes January 21st, 2015

Solving an organic semiconductor mystery: Berkeley Lab researchers uncover hidden structures in domain interfaces that hamper performance January 16th, 2015

Announcements

Toyocolor to Launch New Carbon Nanotube Materials at nano tech 2015 January 24th, 2015

NANOPOSTER 2015 - 5th Virtual Nanotechnology Conference - call for abstracts January 24th, 2015

Nanosensor Used for Simultaneous Determination of Effective Tea Components January 24th, 2015

The latest fashion: Graphene edges can be tailor-made: Rice University theory shows it should be possible to tune material's properties January 24th, 2015

Events/Classes

Toyocolor to Launch New Carbon Nanotube Materials at nano tech 2015 January 24th, 2015

NANOPOSTER 2015 - 5th Virtual Nanotechnology Conference - call for abstracts January 24th, 2015

PEN Inc. New Product Development Highlighted for Emerging Nanotechnology Enterprises: Scott Rickert, PEN Chairman, Addresses Webinar for National Nanotechnology Coordination Office January 22nd, 2015

Teijin to Participate in Nano Tech 2015 January 22nd, 2015

Alliances/Partnerships/Distributorships

Smart keyboard cleans and powers itself -- and can tell who you are January 21st, 2015

DNA 'glue' could someday be used to build tissues, organs January 14th, 2015

GLOBALFOUNDRIES and Linear Dimensions to Offer Joint Analog Solution For Fast-Growing Wearables and MEMs Sensors Markets January 9th, 2015

Nanowire clothing could keep people warm -- without heating everything else January 7th, 2015

Printing/Lithography/Inkjet/Inks

Toyocolor to Launch New Carbon Nanotube Materials at nano tech 2015 January 24th, 2015

Teijin to Participate in Nano Tech 2015 January 22nd, 2015

A new step towards using graphene in electronic applications January 14th, 2015

Nanoshaping method points to future manufacturing technology December 11th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE