Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Leading-Edge Research at SUNY NanoCollege Generates Nearly 50 Technical Papers to be Presented at Prestigious Lithography Forum

Abstract:
CNSE and its global corporate partners to showcase innovative technologies at SPIE 2013.

Advanced Lithography conference; Professor Alain Diebold to be recognized as SPIE Fellow.

Leading-Edge Research at SUNY NanoCollege Generates Nearly 50 Technical Papers to be Presented at Prestigious Lithography Forum

Albany, NY | Posted on February 21st, 2013

Continuing to support the vision and leadership of Governor Andrew Cuomo through which New York is being transformed into the worldwide epicenter for nanotechnology, the SUNY College of Nanoscale Science and Engineering (CNSE) announced today that pioneering scientific research conducted at CNSE's Albany NanoTech Complex has contributed to nearly 50 technical papers being presented at the world's preeminent lithography conference.

"As further testimony to Governor Andrew Cuomo's strategic blueprint that is establishing New York as the leading global hub for high-tech innovation and manufacturing, CNSE is delighted to showcase the industry-leading research capabilities at its world-class Albany NanoTech Complex as part of the world's foremost lithography conference," said CNSE Executive Vice President of Innovation and Technology and Vice President for Research Dr. Michael Liehr. "The papers presented by CNSE's faculty and researchers, along with its global corporate partners, highlight the success of this unique public-private model in shattering scientific boundaries and driving critical advances to meet the needs of industry."

The research conducted at CNSE to be featured at the SPIE 2013 Advanced Lithography conference is the culmination of efforts by both CNSE scientists and the college's global corporate partners, including a number of papers that showcase joint research resulting from the NanoCollege's unique collaborative partnerships. Presenting corporate partners include IBM, GLOBALFOUNDRIES, SEMATECH, Applied Materials, Tokyo Electron and Vistec Lithography.

Forum papers focus on a variety of research topics that are critical to moving the nanoelectronics industry forward and overcoming technical challenges, including extreme ultraviolet (EUV) micro-exposure tool use at CNSE; EUV photoresist development and imaging; EUV mask blank fabrication; outgassing effects in EUV photoresist; eBeam, X-ray, and optical metrology techniques; directed self-assembly used in finFET fabrication; phase defect detection in EUV mask blanks; phase shift focus monitors; KrF hybrid photo resist development; LER measurement and mitigation; multilayer deposition techniques for EUV mask blanks; resolution improvement using pupil filtering in EUV lithography; the out-of-band illumination effect on EUV lithography; and EUV mask inspection techniques.

Also at the conference, SPIE will officially recognize CNSE Empire Innovation Professor of Nanoscale Science Dr. Alain Diebold as an SPIE Fellow. He is one of only 69 members of distinction to earn the honor in 2013, which highlights technical achievements and service to the general optics community, as well as service to the society.

Known as the world's leading nanoelectronics lithography conference and exhibition, the 39th annual SPIE Advanced Lithography conference is being held February 24 through 28 in California at the San Jose Convention Center and San Jose Marriott.

For more information on the conference, visit spie.org/x10942.xml.

####

About UAlbany NanoCollege
The UAlbany CNSE is the first college in the world dedicated to education, research, development and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience and nanoeconomics. With more than $14 billion in high-tech investments, CNSE represents the world’s most advanced university-driven research enterprise, offering students a one-of-a-kind academic experience and providing over 300 corporate partners with access to an unmatched ecosystem for leading-edge R&D and commercialization of nanoelectronics and nanotechnology innovations. CNSE’s footprint spans upstate New York, including its Albany NanoTech Complex, an 800,000-square-foot megaplex with the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 85,000 square feet of Class 1 capable cleanrooms. More than 3,100 scientists, researchers, engineers, students and faculty work here, from companies including IBM, Intel, GlobalFoundries, SEMATECH, Samsung, TSMC, Toshiba, Applied Materials, Tokyo Electron, ASML and Lam Research. An expansion now underway, part of which will house the world’s first Global 450mm Consortium, will add nearly 500,000 square feet of next-generation infrastructure, an additional 50,000 square feet of Class 1 capable cleanrooms, and more than 1,000 scientists, researchers and engineers from CNSE and global corporations. In addition, CNSE’s Solar Energy Development Center in Halfmoon provides a prototyping and demonstration line for next-generation CIGS thin-film solar cells, supporting its leadership of the U.S. Photovoltaic Manufacturing Consortium (PVMC). CNSE’s Smart System Technology and Commercialization Center of Excellence (STC) in Rochester offers state-of-the-art capabilities for MEMS fabrication and packaging. CNSE also co-founded and manages operations at the Computer Chip Commercialization Center at SUNYIT in Utica and is a co-founder of the Nanotechnology Innovation and Commercialization Excelerator in Syracuse.

For more information, please click here

Contacts:
Steve Janack
CNSE
Vice President
Marketing and Communications
(518) 956-7322

Copyright © UAlbany NanoCollege

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

NanoSummit in Luxembourg: single wall carbon nanotubes have entered our lives as we approach a nanoaugmented future November 23rd, 2017

JPK reports on the exciting research in the School of Medicine at Sungkyunkwan University (SKKU), Suwon, South Korea using the NanoWizard® ULTRA Speed AFM to understand the binding of transcription factor Sox2 with super enhancers November 23rd, 2017

Precision NanoSystems to host nanomedicines roundtable November 23rd, 2017

Fine felted nanotubes : Research team of Kiel University develops new composite material made of carbon nanotubes November 22nd, 2017

Govt.-Legislation/Regulation/Funding/Policy

EC Project Aims at Creating and Commercializing Cyber-Physical-System Solutions November 14th, 2017

Nanobiotix presented new clinical and pre-clinical data confirming NBTXR3’s significant potential role in Immuno-Oncology at SITC Annual Meeting November 14th, 2017

Leti Joins DARPA-Funded Project to Develop Implantable Device for Restoring Vision November 9th, 2017

Nanoshells could deliver more chemo with fewer side effects: In vitro study verifies method for remotely triggering release of cancer drugs November 8th, 2017

Academic/Education

Luleĺ University of Technology is using the Deben CT5000TEC stage to perform x-ray microtomography experiments with the ZEISS Xradia 510 Versa to understand deformation and strain inside inhomogeneous materials November 7th, 2017

Park Systems Announces the Grand Opening of the Park NanoScience Center at SUNY Polytechnic Institute November 3rd, 2017

Two Scientists Receive Grants to Develop New Materials: Chad Mirkin and Monica Olvera de la Cruz recognized by Sherman Fairchild Foundation August 16th, 2017

Moving at the Speed of Light: University of Arizona selected for high-impact, industrial demonstration of new integrated photonic cryogenic datalink for focal plane arrays: Program is major milestone for AIM Photonics August 10th, 2017

Chip Technology

Quantum optics allows us to abandon expensive lasers in spectroscopy: Lomonosov Moscow State University scientists have invented a new method of spectroscopy November 21st, 2017

Nano Global, Arm Collaborate on Artificial Intelligence Chip to Drive Health Revolution by Capturing and Analyzing Molecular Data in Real Time November 21st, 2017

ICN2 researchers compute unprecedented values for spin lifetime anisotropy in graphene November 17th, 2017

Nanometrics to Participate in the 6th Annual NYC Investor Summit 2017 November 16th, 2017

Announcements

NanoSummit in Luxembourg: single wall carbon nanotubes have entered our lives as we approach a nanoaugmented future November 23rd, 2017

JPK reports on the exciting research in the School of Medicine at Sungkyunkwan University (SKKU), Suwon, South Korea using the NanoWizard® ULTRA Speed AFM to understand the binding of transcription factor Sox2 with super enhancers November 23rd, 2017

Precision NanoSystems to host nanomedicines roundtable November 23rd, 2017

Fine felted nanotubes : Research team of Kiel University develops new composite material made of carbon nanotubes November 22nd, 2017

Events/Classes

NanoSummit in Luxembourg: single wall carbon nanotubes have entered our lives as we approach a nanoaugmented future November 23rd, 2017

Precision NanoSystems to host nanomedicines roundtable November 23rd, 2017

Nanometrics to Participate in the 6th Annual NYC Investor Summit 2017 November 16th, 2017

Arrowhead to Present at 29th Annual Piper Jaffray Healthcare Conference November 14th, 2017

Alliances/Trade associations/Partnerships/Distributorships

Nano Global, Arm Collaborate on Artificial Intelligence Chip to Drive Health Revolution by Capturing and Analyzing Molecular Data in Real Time November 21st, 2017

EC Project Aims at Creating and Commercializing Cyber-Physical-System Solutions November 14th, 2017

GLOBALFOUNDRIES, Fudan Team to Deliver Next Generation Dual Interface Smart Card November 14th, 2017

Leti Coordinating Project to Develop Innovative Drivetrains for 3rd-generation Electric Vehicles: CEA Tech’s Contribution Includes Liten’s Knowhow in Magnetic Materials and Simulation And Leti’s Expertise in Wide-bandgap Semiconductors October 20th, 2017

Printing/Lithography/Inkjet/Inks/Bio-printing

Math gets real in strong, lightweight structures: Rice University researchers use 3-D printers to turn century-old theory into complex schwarzites November 16th, 2017

Creation of coherent states in molecules by incoherent electrons October 21st, 2017

Graphene based terahertz absorbers: Printable graphene inks enable ultrafast lasers in the terahertz range September 13th, 2017

Researchers printed graphene-like materials with inkjet August 17th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project