- About Us
- Nano-Social Network
- Nano Consulting
- My Account
|TEM of Ultra thin Hybrid Floating Gate (HFG) with high-k Inter Gate Dielectric (IGD) extending Flash scaling beyond 1x node|
Imec announces that it has developed an ultra-thin hybrid floating gate cell with demonstrated functionality. The results, which are presented at this week's 2012 IEEE International Electron Devices Meeting (IEDM, San Francisco, USA, December 10-12, 2012), are an important step for further scaling of NAND Flash technology towards the 10nm half pitch node and beyond.
The increasing need for high density flash memory has driven the scaling of the technology down to the 19nm half pitch node which is currently in production. However, from such dimensions on, the Control Gate (CG) can no longer be wrapped around the Floating Gate (FG), urging for a planar floating gate architecture. But planarising the technology results in a reduced coupling of the CG and FG. Consequently, the performance degrades due to leakage through the Interpoly dielectric (IPD). In order to recover the performance in planar devices, imec has developed a Hybrid Floating Gate (HFG) architecture featuring a low work function material at the bottom and a high work function material at the top. The functionality has been successfully demonstrated in integrated cells. Moreover, to limit the cell to cell interference occurring in a high-density NAND array, imec scaled down the thickness of the hybrid floating gate to only 4nm.
Jan Van Houdt, Director of the Flash memory program at imec: "Flash memory is the state-of-the-art technology in all mobile devices, ranging from cell phones, digital cameras, USB sticks, MP3 players and tablets, to solid state drives. To address the exploding demand for memory capacity in such devices, imec is pushing the roadmap of the current Flash technology. We are excited to have demonstrated this functional ultra-thin hybrid floating gate cell technology, as an enabling solution for our partners to scale Flash memory down to 10nm and further increase the memory capacity in next-generation mobile devices".
These results were obtained in cooperation with imec's key memory partners INTEL, Micron, Samsung, SanDisk, Toshiba and SK Hynix.
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of close to 2,000 people includes more than 600 industrial residents and guest researchers. In 2011, imec's revenue (P&L) was about 300 million euro. Further information on imec can be found at www.imec.be.
Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.) and imec India (Imec India Private Limited).
For more information, please click here
External communications officer
T: +32 16 28 17 69
Mobile : +32 486 06 51 75
[ f o r m u l a ]
Formula PR, Inc.
1215 Cushman Avenue
San Diego, CA 92110
Copyright © IMECIf you have a comment, please Contact us.
Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
|Related News Press|
News and information
Smart multi-layered magnetic material acts as an electric switch: New study reveals characteristic of islands of magnetic metals between vacuum gaps, displaying tunnelling electric current March 1st, 2017
National Conference on Nanomaterials, (NCN-2017) April 21st, 2017
Nanomechanics, Inc. Unveils New Product at ICMCTF Show April 25th: Nanoindentation experts will launch the new Gemini that measures the interaction of two objects that are sliding across each other – not merely making contact April 21st, 2017
Forge Nano 2017: 1st Quarter Media Update April 20th, 2017
Better living through pressure: Functional nanomaterials made easy April 19th, 2017
Shedding light on the absorption of light by titanium dioxide April 14th, 2017