Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Imec presents an ultra-thin hybrid floating gate cell at IEDM2012: The results are an important enabler for further scaling of NAND Flash technology

TEM of Ultra thin Hybrid Floating Gate (HFG) with high-k Inter Gate Dielectric (IGD) extending Flash scaling beyond 1x node
TEM of Ultra thin Hybrid Floating Gate (HFG) with high-k Inter Gate Dielectric (IGD) extending Flash scaling beyond 1x node

Abstract:
Imec announces that it has developed an ultra-thin hybrid floating gate cell with demonstrated functionality. The results, which are presented at this week's 2012 IEEE International Electron Devices Meeting (IEDM, San Francisco, USA, December 10-12, 2012), are an important step for further scaling of NAND Flash technology towards the 10nm half pitch node and beyond.

The increasing need for high density flash memory has driven the scaling of the technology down to the 19nm half pitch node which is currently in production. However, from such dimensions on, the Control Gate (CG) can no longer be wrapped around the Floating Gate (FG), urging for a planar floating gate architecture. But planarising the technology results in a reduced coupling of the CG and FG. Consequently, the performance degrades due to leakage through the Interpoly dielectric (IPD). In order to recover the performance in planar devices, imec has developed a Hybrid Floating Gate (HFG) architecture featuring a low work function material at the bottom and a high work function material at the top. The functionality has been successfully demonstrated in integrated cells. Moreover, to limit the cell to cell interference occurring in a high-density NAND array, imec scaled down the thickness of the hybrid floating gate to only 4nm.

Imec presents an ultra-thin hybrid floating gate cell at IEDM2012: The results are an important enabler for further scaling of NAND Flash technology

San Francisco, CA | Posted on December 12th, 2012

Jan Van Houdt, Director of the Flash memory program at imec: "Flash memory is the state-of-the-art technology in all mobile devices, ranging from cell phones, digital cameras, USB sticks, MP3 players and tablets, to solid state drives. To address the exploding demand for memory capacity in such devices, imec is pushing the roadmap of the current Flash technology. We are excited to have demonstrated this functional ultra-thin hybrid floating gate cell technology, as an enabling solution for our partners to scale Flash memory down to 10nm and further increase the memory capacity in next-generation mobile devices".

These results were obtained in cooperation with imec's key memory partners INTEL, Micron, Samsung, SanDisk, Toshiba and SK Hynix.

####

About IMEC
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of close to 2,000 people includes more than 600 industrial residents and guest researchers. In 2011, imec's revenue (P&L) was about 300 million euro. Further information on imec can be found at www.imec.be.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.) and imec India (Imec India Private Limited).

For more information, please click here

Contacts:
Hanne Degans
External communications officer
T: +32 16 28 17 69
Mobile : +32 486 06 51 75


Olga Walsh
Business Technology
[ f o r m u l a ]
Formula PR, Inc.
1215 Cushman Avenue
San Diego, CA 92110
Office 619-234-0345

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

A nano-roundabout for light December 10th, 2016

Keeping electric car design on the right road: A closer look at the life-cycle impacts of lithium-ion batteries and proton exchange membrane fuel cells December 9th, 2016

Further improvement of qubit lifetime for quantum computers: New technique removes quasiparticles from superconducting quantum circuits December 9th, 2016

Scientists track chemical and structural evolution of catalytic nanoparticles in 3-D: Up-close, real-time, chemical-sensitive 3-D imaging offers clues for reducing cost/improving performance of catalysts for fuel-cell-powered vehicles and other applications December 8th, 2016

Chip Technology

A nano-roundabout for light December 10th, 2016

Further improvement of qubit lifetime for quantum computers: New technique removes quasiparticles from superconducting quantum circuits December 9th, 2016

Chemical trickery corrals 'hyperactive' metal-oxide cluster December 8th, 2016

Leti IEDM 2016 Paper Clarifies Correlation between Endurance, Window Margin and Retention in RRAM for First Time: Paper Presented at IEDM 2016 Offers Ways to Reconcile High-cycling Requirements and Instability at High Temperatures in Resistive RAM December 6th, 2016

Memory Technology

New technology of ultrahigh density optical storage researched at Kazan University: The ever-growing demand for storage devices stimulates scientists to find new ways of improving the performance of existing technologies November 30th, 2016

A Tiny Machine: UCSB electrical and computer engineers design an infinitesimal computing device October 28th, 2016

How nanoscience will improve our health and lives in the coming years: Targeted medicine deliveries and increased energy efficiency are just two of many ways October 26th, 2016

Making the switch, this time with an insulator: Colorado State University physicists, joining the fundamental pursuit of using electron spins to store and manipulate information, have demonstrated a new approach to doing so, which could prove useful in the application of low-powe September 2nd, 2016

Announcements

A nano-roundabout for light December 10th, 2016

Keeping electric car design on the right road: A closer look at the life-cycle impacts of lithium-ion batteries and proton exchange membrane fuel cells December 9th, 2016

Further improvement of qubit lifetime for quantum computers: New technique removes quasiparticles from superconducting quantum circuits December 9th, 2016

Chemical trickery corrals 'hyperactive' metal-oxide cluster December 8th, 2016

Events/Classes

Arrowhead Pharmaceuticals to Webcast Fiscal 2016 Year End Results December 7th, 2016

In IEDM 2016 Keynote, Leti CEO Says ‘Hyperconnectivity’, Human-focused Research and the IOT Promise Profound, Positive Changes December 7th, 2016

IEDM: Leti CEO Marie Semeria to Give Opening-day Keynote on Impact of ‘Hyperconnectivity’ and IoT: Speech to Portray Key Role Nonprofit Research and Technology Organizations Play in Making Technology More Efficient and Ensuring Safety and Security November 29th, 2016

Leti and Grenoble Partners Demonstrate World’s 1st Qubit Device Fabricated in CMOS Process: Paper by Leti, Inac and University of Grenoble Alpes Published in Nature Communications November 28th, 2016

Research partnerships

Further improvement of qubit lifetime for quantum computers: New technique removes quasiparticles from superconducting quantum circuits December 9th, 2016

Researchers peer into atom-sized tunnels in hunt for better battery: May improve lithium ion for larger devices, like cars December 8th, 2016

Exotic insulator may hold clue to key mystery of modern physics: Johns Hopkins-led research shows material living between classical and quantum worlds December 8th, 2016

Deep insights from surface reactions: Researchers use Stampede supercomputer to study new chemical sensing methods, desalination and bacterial energy production December 2nd, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project