Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Imec presents an ultra-thin hybrid floating gate cell at IEDM2012: The results are an important enabler for further scaling of NAND Flash technology

TEM of Ultra thin Hybrid Floating Gate (HFG) with high-k Inter Gate Dielectric (IGD) extending Flash scaling beyond 1x node
TEM of Ultra thin Hybrid Floating Gate (HFG) with high-k Inter Gate Dielectric (IGD) extending Flash scaling beyond 1x node

Abstract:
Imec announces that it has developed an ultra-thin hybrid floating gate cell with demonstrated functionality. The results, which are presented at this week's 2012 IEEE International Electron Devices Meeting (IEDM, San Francisco, USA, December 10-12, 2012), are an important step for further scaling of NAND Flash technology towards the 10nm half pitch node and beyond.

The increasing need for high density flash memory has driven the scaling of the technology down to the 19nm half pitch node which is currently in production. However, from such dimensions on, the Control Gate (CG) can no longer be wrapped around the Floating Gate (FG), urging for a planar floating gate architecture. But planarising the technology results in a reduced coupling of the CG and FG. Consequently, the performance degrades due to leakage through the Interpoly dielectric (IPD). In order to recover the performance in planar devices, imec has developed a Hybrid Floating Gate (HFG) architecture featuring a low work function material at the bottom and a high work function material at the top. The functionality has been successfully demonstrated in integrated cells. Moreover, to limit the cell to cell interference occurring in a high-density NAND array, imec scaled down the thickness of the hybrid floating gate to only 4nm.

Imec presents an ultra-thin hybrid floating gate cell at IEDM2012: The results are an important enabler for further scaling of NAND Flash technology

San Francisco, CA | Posted on December 12th, 2012

Jan Van Houdt, Director of the Flash memory program at imec: "Flash memory is the state-of-the-art technology in all mobile devices, ranging from cell phones, digital cameras, USB sticks, MP3 players and tablets, to solid state drives. To address the exploding demand for memory capacity in such devices, imec is pushing the roadmap of the current Flash technology. We are excited to have demonstrated this functional ultra-thin hybrid floating gate cell technology, as an enabling solution for our partners to scale Flash memory down to 10nm and further increase the memory capacity in next-generation mobile devices".

These results were obtained in cooperation with imec's key memory partners INTEL, Micron, Samsung, SanDisk, Toshiba and SK Hynix.

####

About IMEC
Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of close to 2,000 people includes more than 600 industrial residents and guest researchers. In 2011, imec's revenue (P&L) was about 300 million euro. Further information on imec can be found at www.imec.be.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.) and imec India (Imec India Private Limited).

For more information, please click here

Contacts:
Hanne Degans
External communications officer
T: +32 16 28 17 69
Mobile : +32 486 06 51 75


Olga Walsh
Business Technology
[ f o r m u l a ]
Formula PR, Inc.
1215 Cushman Avenue
San Diego, CA 92110
Office 619-234-0345

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Northwestern researchers achieve unprecedented control of polymer grids: Materials could find applications in water purification, solar energy storage, body armor June 22nd, 2018

Nanobiotix Publishes Positive Phase 2/3 Data For Nanomedicine in Soft Tissue Cancer (Webcast June 22) June 22nd, 2018

Alzheimer's breakthrough: Brain metals that may drive disease progression revealed: In brains affected by Alzheimer's, researchers identify chemically reduced iron species, with mineral forms including a magnetic iron oxide June 22nd, 2018

Collaboration yields discovery of 12-sided silica cages June 20th, 2018

Chip Technology

Carbon nanotube optics poised to provide pathway to optical-based quantum cryptography and quantum computing: Researchers are exploring enhanced potential of carbon nanotubes for unique applications June 18th, 2018

Making quantum puddles: Physicists discover how to create the thinnest liquid films ever June 13th, 2018

Leti Presenting Strategic Vision and Hosting a Workshop at SEMICON West: “From Electrons to Photons” Leti Workshop and CEO Media Briefing Set for Tuesday, July 10 in W Hotel, San Francisco June 12th, 2018

Nanometrics Updates Time of Webcast at Stifel 2018 Cross Sector Insight Conference June 12th, 2018

Memory Technology

Tunable diamond string may hold key to quantum memory: A process similar to guitar tuning improves storage time of quantum memory May 24th, 2018

A powerful laser breakthrough: Lehigh research team demonstrates terahertz semiconductor laser with record-high output power May 2nd, 2018

Researchers develop nanoparticle films for high-density data storage: April 3rd, 2018

Design approach developed for important new catalysts for energy conversion and storage: New method could aid in design of pharmaceuticals and optical and data storage materials March 21st, 2018

Announcements

Northwestern researchers achieve unprecedented control of polymer grids: Materials could find applications in water purification, solar energy storage, body armor June 22nd, 2018

Nanobiotix Publishes Positive Phase 2/3 Data For Nanomedicine in Soft Tissue Cancer (Webcast June 22) June 22nd, 2018

Alzheimer's breakthrough: Brain metals that may drive disease progression revealed: In brains affected by Alzheimer's, researchers identify chemically reduced iron species, with mineral forms including a magnetic iron oxide June 22nd, 2018

Collaboration yields discovery of 12-sided silica cages June 20th, 2018

Events/Classes

Nanobiotix Publishes Positive Phase 2/3 Data For Nanomedicine in Soft Tissue Cancer (Webcast June 22) June 22nd, 2018

Executives Explore Key Megatrends and Innovations in MEMS, Sensors, Imaging Tech at SEMI-MSIG European Summits: Speakers to share developments in smart automotive, smart cities, smart industrial, biomedical, consumer and IoT, September 19-21, 2018 in Grenoble, France June 19th, 2018

Leti Presenting Strategic Vision and Hosting a Workshop at SEMICON West: “From Electrons to Photons” Leti Workshop and CEO Media Briefing Set for Tuesday, July 10 in W Hotel, San Francisco June 12th, 2018

180 Degree Capital Corp. to Provide Live Remote Access to Its Annual Meeting of Shareholders on June 12, 2018 June 12th, 2018

Research partnerships

Alzheimer's breakthrough: Brain metals that may drive disease progression revealed: In brains affected by Alzheimer's, researchers identify chemically reduced iron species, with mineral forms including a magnetic iron oxide June 22nd, 2018

Powering the 21st Century with Integrated Photonics: UCSB-Led Team Selected for Demonstration of a Novel Waveguide Platform Which is Transparent Throughout the MWIR and LWIR Spectral Bands June 19th, 2018

Evidence for a new property of quantum matter revealed: Electrical dipole activity detected in a quantum material unlike any other tested June 11th, 2018

Scientists use photonic chip to make virtual movies of molecular motion June 6th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project