Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > CEA-Leti and Arkema set up a platform dedicated to lithography based on nanostructured polymers

Abstract:
The semiconductor industry forecasts a doubling of the performances of electronic components every 18 months. However, the current printing technology - lithography - has to address the physical constraints of ever-greater miniaturization of silicon chips. CEA-Leti and Arkema, in association with LCPO (Laboratoire de Chimie des Polymères Organiques) of Bordeaux, have succeeded in going beyond the boundaries of the infinitely small by showing the unique resolution potential of lithography based on nanostructured polymers. These initial results meet the requirements of the next 4 generations of electronic chips. Building on this success, CEA-Leti and Arkema have created a development platform dedicated to this technology.

CEA-Leti and Arkema set up a platform dedicated to lithography based on nanostructured polymers

Colombes, France | Posted on May 11th, 2012

As part of their joint laboratory, Arkema and CEA-Leti, with the help of Professor Hadziioannou's team of LCPO, have successfully obtained a 20 nanometer (nm) pitch* and reduced the diameter of contacts down to 7 nm thanks to nanostructured polymers, thereby demonstrating the compatibility of this technology for technological nodes ranging from 20 nm to sub-10 nm.

A collaborative research platform

On the strength of these initial positive results, Arkema and CEA-Leti have created IDEAL (Insertion of DSA** lithography for CMOS*** application), a collaborative research platform dedicated to the development and industrialization of lithography based on nanostructured polymers. This platform relies on CEA-Leti's expertise in process and electronic component integration, and on Arkema's know-how in the development and industrialization of nanostructured polymers. These complementary capabilities will help adapt materials and processes to achieve optimum results and make the technology available to the semiconductor industry without delay.

Going beyond the boundaries of « classic » lithography

The semiconductor industry has had to contend with the limits of conventional optical lithography for several years now. The cost and the problems encountered with the EUV**** technology undermine the feasibility of the technological roadmap of micro-electronics. Lithography by self-assembly (or nanostructuring) of polymers is a highly promising technological alternative due to its low manufacturing costs and its straightforward integration in existing processes for the manufacture of microprocessors and other electronic chips.

Since the early 2000s, Arkema has been developing for various applications a block copolymer technology that yields innovative nanostructured materials boasting a wide range of properties, some of which are particularly suited to self-assembled lithography.

CEA-Leti operates at the heart of developments for the most advanced CMOS technologies within its 300 mm pilot line and in partnership with this sector's world players.

« The creation of this platform is an initial success for our brand-new collaboration, and it illustrates the importance of combining material, process and integration know-how at an early stage. It also bears testimony to Arkema's ability to develop new copolymers and to adapt its industrial resources to this demanding micro-electronics sector in terms of product performance and purity », declares Ian Cayrefourcq, Director Emerging Technologies at Arkema.

« Lithography based on nanostructured copolymers opens up very encouraging prospects in terms of performance and cost for the semiconductor industry. Cooperation between Arkema, an innovative world-leading chemical company, and CEA-Leti, a world-renowned institute in the integration of CMOS technologies, will help develop materials and processes directly transferrable and compatible with the industry's standards », points out Laurent Malier, CEA-Leti Director.

* Pitch: distance separating two interconnecting lines

** DSA: Directed Self-Assembly

*** CMOS: Complementary Metal Oxide Silicon

**** EUV: Extreme Ultra Violet

####

About CEA-Leti
Leti (Laboratoire d'Électronique de Technologie de l'Information) is an institute of CEA, a French research and technology organization with activities in energy, IT, healthcare, defense and security. Leti is focused on creating value and innovation through technology transfer to its industrial partners. It specializes in micro- and nanotechnologies and their applications, from wireless devices and systems, to biology, healthcare and photonics, as well as in Micro-Nano Systems (MNS). An anchor of the MINATEC campus, CEA-Leti operates 8,000-m² of state-of-the-art clean room space on 200mm and 300mm wafer platforms. It counts 1,700 scientists and engineers, including 240 Ph.D. students and post-doctoral researchers and 200 assignees from partner companies. CEA-Leti owns more than 1,880 patent families.

For more information, visit www.leti.fr


A global chemical company and France’s leading chemicals producer, Arkema is building the future of the chemical industry every day. Deploying a responsible, innovation-based approach, we produce state-of-the-art specialty chemicals that provide customers with practical solutions to such challenges as climate change, access to drinking water, the future of energy, fossil fuel preservation and the need for lighter materials. With operations in more than 40 countries, some 13,200 employees and 9 research centers, Arkema generates annual revenue of €5.9 billion*, and holds leadership positions in all its markets with a portfolio of internationally recognized brands. The world is our inspiration.

*Sales and headcount for continuing activities at end 2011, excluding vinyl products activities, which are part of a divestment plan.

For more information, please click here

Contacts:
Press Contacts

CEA
Vincent Coronini

+33 4 38 78 44 30

Arkema
Sybille Chaix

+ 33 1 49 00 70 30

Copyright © CEA-Leti

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Oxford Instruments announces Dr Brad Ramshaw of Cornell University, as winner of the 2017 Lee Osheroff Richardson Science Prize February 20th, 2017

Nominations Invited for $250,000 Kabiller Prize in Nanoscience: Major international prize recognizes a visionary nanotechnology researcher February 20th, 2017

Breakthrough with a chain of gold atoms: In the field of nanoscience, an international team of physicists with participants from Konstanz has achieved a breakthrough in understanding heat transport February 20th, 2017

'Lossless' metamaterial could boost efficiency of lasers and other light-based devices February 20th, 2017

Chip Technology

Particles from outer space are wreaking low-grade havoc on personal electronics February 19th, 2017

Liquid metal nano printing set to revolutionize electronics: Creating integrated circuits just atoms thick February 18th, 2017

Research opens door to smaller, cheaper, more agile communications tech February 16th, 2017

Research reveals novel quantum state in strange insulating materials February 14th, 2017

Announcements

Oxford Instruments announces Dr Brad Ramshaw of Cornell University, as winner of the 2017 Lee Osheroff Richardson Science Prize February 20th, 2017

Nominations Invited for $250,000 Kabiller Prize in Nanoscience: Major international prize recognizes a visionary nanotechnology researcher February 20th, 2017

Breakthrough with a chain of gold atoms: In the field of nanoscience, an international team of physicists with participants from Konstanz has achieved a breakthrough in understanding heat transport February 20th, 2017

'Lossless' metamaterial could boost efficiency of lasers and other light-based devices February 20th, 2017

Alliances/Trade associations/Partnerships/Distributorships

Leti Coordinating Project to Adapt Obstacle-Detection Technology Used in Autonomous Cars for Portable and Wearable Systems: INSPEX to Combine Knowhow of Nine European Organizations to Create Portable and Wearable Spatial-Exploration Systems February 2nd, 2017

GLOBALFOUNDRIES Expands Partner Program to Speed Time-to-Market of FDX™ Solutions: Increased support affirms FDXcelerator™ Program’s vital role in promoting broader deployment of GLOBALFOUNDRIES’ FDX™ portfolio December 15th, 2016

Infrared instrumentation leader secures exclusive use of Vantablack coating December 5th, 2016

Leti and Grenoble Partners Demonstrate World’s 1st Qubit Device Fabricated in CMOS Process: Paper by Leti, Inac and University of Grenoble Alpes Published in Nature Communications November 28th, 2016

Research partnerships

Graphene foam gets big and tough: Rice University's nanotube-reinforced material can be shaped, is highly conductive February 13th, 2017

Cedars-Sinai, UCLA Scientists Use New ‘Blood Biopsies’ With Experimental Device to Speed Cancer Diagnosis and Predict Disease Spread: Leading-Edge Research Is Part of National Cancer Moonshot Initiative February 13th, 2017

Highly sensitive gas sensors for volatile organic compound detection February 6th, 2017

UCLA physicists map the atomic structure of an alloy: Researchers measured the coordinates of more than 23,000 atoms in a technologically important material February 3rd, 2017

Printing/Lithography/Inkjet/Inks/Bio-printing

Liquid metal nano printing set to revolutionize electronics: Creating integrated circuits just atoms thick February 18th, 2017

New stem cell technique shows promise for bone repair January 25th, 2017

NUS researchers achieve major breakthrough in flexible electronics: New classes of printable electrically conducting polymer materials make better electrodes for plastic electronics and advanced semiconductor devices January 14th, 2017

Nanowire 'inks' enable paper-based printable electronics: Highly conductive films make functional circuits without adding high heat January 4th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project