Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Groundbreaking nanotechnology research at CNSE spurs more than 60 technical papers at SPIE Advanced Lithography 2012

Abstract:
Faculty and corporate scientists working at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany continue to break new ground in nanotechnology-enabled innovation and discovery, with research conducted at the UAlbany NanoCollege contributing to more than 60 scientific and technical papers to be presented next week at the world's leading lithography forum.

Groundbreaking nanotechnology research at CNSE spurs more than 60 technical papers at SPIE Advanced Lithography 2012

Albany, NY | Posted on February 9th, 2012

The SPIE Advanced Lithography 2012 conference will feature the presentation of technical papers resulting from groundbreaking research performed by scientists from CNSE and its global corporate partners located at CNSE's Albany NanoTech Complex, including IBM, SEMATECH, GlobalFoundries, Tokyo Electron Ltd., Applied Materials, Novellus Systems, ASML, Dow Electronics and Nanometrics. They include a number of papers that result from collaborative programs involving research teams from CNSE and its industrial partners.

The papers focus on leading-edge innovations that address many of the challenges now facing lithography researchers. Topic areas include 193nm and extreme ultraviolet (EUV) photoresist materials development, mask blanks and process technologies for EUV lithography, and photoresist outgassing; double-patterning techniques for optical microlithography; lithographic techniques studying lens heating; and advances in electron-beam (e-beam) lithography.

"A product of the strategic vision and pioneering leadership of Governor Cuomo and Assembly Speaker Silver, the research being conducted at the UAlbany NanoCollege is continuing to push the boundaries of nanotechnology-enabled discovery and exploration," said Richard Brilla, CNSE Vice President for Strategy, Alliances and Consortia. "The fruits of this groundbreaking public-private partnership are accelerating new technologies that meet the critical challenges of CNSE's global corporate partners, while further establishing New York as the place to be in the 21st century economy catalyzed by nanotechnology innovations."

Also at the event, CNSE graduate Craig Higgins will be honored with the "2011 Hiroshi Ito Memorial Best Student Paper Award in Resist Materials and Processing Technology." His paper, "Coefficient of thermal expansion (CTE) in EUV lithography: LER and adhesion improvement," resulted from a joint research project funded by SEMATECH. Higgins received his Ph.D. in Nanoscience from CNSE last May and is now working as a principal EUV lithography engineer at GlobalFoundries.

The 38th annual SPIE Advanced Lithography conference, the world's premier nanoelectronics lithography conference and exhibition, is being held February 12 through 16 at the San Jose Convention Center and San Jose Marriott in California.

####

About UAlbany NanoCollege
The UAlbany CNSE is the first college in the world dedicated to education, research, development and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience and nanoeconomics. With more than $14 billon in high-tech investments, CNSE represents the world’s most advanced university-driven research enterprise, offering students a one-of-a-kind academic experience and providing over 300 corporate partners with access to an unmatched ecosystem for leading-edge R&D and commercialization of nanoelectronics and nanotechnology innovations. CNSE’s footprint spans upstate New York, including its Albany NanoTech Complex, an 800,000-square-foot megaplex with the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 85,000 square feet of Class 1 capable cleanrooms. More than 2,600 scientists, researchers, engineers, students and faculty work here, from companies including IBM, Intel, GlobalFoundries, SEMATECH, Samsung, TSMC, Toshiba, Applied Materials, Tokyo Electron, ASML and Novellus Systems. An expansion now underway, part of which will house the world’s first Global 450mm Consortium, will add nearly 500,000 square feet of next-generation infrastructure, an additional 50,000 square feet of Class 1 capable cleanrooms, and more than 1,000 scientists, researchers and engineers from CNSE and global corporations. In addition, CNSE’s Solar Energy Development Center in Halfmoon provides a prototyping and demonstration line for next-generation CIGS thin-film solar cells. CNSE’s Smart Systems Technology and Commercialization Center of Excellence (STC) in Rochester offers state-of-the-art capabilities for MEMS fabrication and packaging. CNSE also co-founded and manages operations at the Computer Chip Commercialization Center at SUNYIT in Utica and is a co-founder of the Nanotechnology Innovation and Commercialization Excelerator in Syracuse.

For more information, please click here

Contacts:
Steve Janack
CNSE
Vice President
Marketing and Communications
(518) 956-7322

Copyright © UAlbany NanoCollege

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

A new, tunable device for spintronics: An international team of scientists including physicist Jairo Sinova from the University of Mainz realises a tunable spin-charge converter made of GaAs August 29th, 2014

Nanoscale assembly line August 29th, 2014

New analytical technology reveals 'nanomechanical' surface traits August 29th, 2014

New Vice President Takes Helm at CNSE CMOST: Catherine Gilbert To Lead CNSE Children’s Museum of Science and Technology Through Expansion And Relocation August 29th, 2014

Academic/Education

New Vice President Takes Helm at CNSE CMOST: Catherine Gilbert To Lead CNSE Children’s Museum of Science and Technology Through Expansion And Relocation August 29th, 2014

RMIT delivers $30m boost to micro and nano-tech August 26th, 2014

SEMATECH and Newly Merged SUNY CNSE/SUNYIT Launch New Patterning Center to Further Advance Materials Development: Center to Provide Access to Critical Tools that Support Semiconductor Technology Node Development August 7th, 2014

Oxford Instruments Asylum Research and the Center for Nanoscale Systems at Harvard University Present a Workshop on AFM Nanomechanical and Nanoelectrical Characterization, Aug. 21-22 August 6th, 2014

Announcements

A new, tunable device for spintronics: An international team of scientists including physicist Jairo Sinova from the University of Mainz realises a tunable spin-charge converter made of GaAs August 29th, 2014

Nanoscale assembly line August 29th, 2014

New analytical technology reveals 'nanomechanical' surface traits August 29th, 2014

New Vice President Takes Helm at CNSE CMOST: Catherine Gilbert To Lead CNSE Children’s Museum of Science and Technology Through Expansion And Relocation August 29th, 2014

Events/Classes

SouthWest NanoTechnologies CEO Dave Arthur to Discuss “Carbon Nanotubes and Automotive Applications” at The Automotive Composites Conference and Expo 2014 (ACCE2014) August 28th, 2014

Aspen Aerogels, Inc. to Present at Barclays CEO Energy-Power Conference August 27th, 2014

Malvern specialists to deliver inaugural short course on polymer characterization at Interplas 2014 August 27th, 2014

Wyatt Technology’s 24th International Light Scattering Colloquium to Highlight Developments in Applications and Characterization of Nanoparticles August 21st, 2014

Printing/Lithography/Inkjet/Inks

RMIT delivers $30m boost to micro and nano-tech August 26th, 2014

SouthWest NanoTechnologies Appoints Matteson-Ridolfi for U.S. Distribution of its SMW™ Specialty Multiwall Carbon Nanotubes August 13th, 2014

An Inkjet-Printed Field-Effect Transistor for Label-Free Biosensing August 11th, 2014

SEMATECH and Newly Merged SUNY CNSE/SUNYIT Launch New Patterning Center to Further Advance Materials Development: Center to Provide Access to Critical Tools that Support Semiconductor Technology Node Development August 7th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE