Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Groundbreaking nanotechnology research at CNSE spurs more than 60 technical papers at SPIE Advanced Lithography 2012

Abstract:
Faculty and corporate scientists working at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany continue to break new ground in nanotechnology-enabled innovation and discovery, with research conducted at the UAlbany NanoCollege contributing to more than 60 scientific and technical papers to be presented next week at the world's leading lithography forum.

Groundbreaking nanotechnology research at CNSE spurs more than 60 technical papers at SPIE Advanced Lithography 2012

Albany, NY | Posted on February 9th, 2012

The SPIE Advanced Lithography 2012 conference will feature the presentation of technical papers resulting from groundbreaking research performed by scientists from CNSE and its global corporate partners located at CNSE's Albany NanoTech Complex, including IBM, SEMATECH, GlobalFoundries, Tokyo Electron Ltd., Applied Materials, Novellus Systems, ASML, Dow Electronics and Nanometrics. They include a number of papers that result from collaborative programs involving research teams from CNSE and its industrial partners.

The papers focus on leading-edge innovations that address many of the challenges now facing lithography researchers. Topic areas include 193nm and extreme ultraviolet (EUV) photoresist materials development, mask blanks and process technologies for EUV lithography, and photoresist outgassing; double-patterning techniques for optical microlithography; lithographic techniques studying lens heating; and advances in electron-beam (e-beam) lithography.

"A product of the strategic vision and pioneering leadership of Governor Cuomo and Assembly Speaker Silver, the research being conducted at the UAlbany NanoCollege is continuing to push the boundaries of nanotechnology-enabled discovery and exploration," said Richard Brilla, CNSE Vice President for Strategy, Alliances and Consortia. "The fruits of this groundbreaking public-private partnership are accelerating new technologies that meet the critical challenges of CNSE's global corporate partners, while further establishing New York as the place to be in the 21st century economy catalyzed by nanotechnology innovations."

Also at the event, CNSE graduate Craig Higgins will be honored with the "2011 Hiroshi Ito Memorial Best Student Paper Award in Resist Materials and Processing Technology." His paper, "Coefficient of thermal expansion (CTE) in EUV lithography: LER and adhesion improvement," resulted from a joint research project funded by SEMATECH. Higgins received his Ph.D. in Nanoscience from CNSE last May and is now working as a principal EUV lithography engineer at GlobalFoundries.

The 38th annual SPIE Advanced Lithography conference, the world's premier nanoelectronics lithography conference and exhibition, is being held February 12 through 16 at the San Jose Convention Center and San Jose Marriott in California.

####

About UAlbany NanoCollege
The UAlbany CNSE is the first college in the world dedicated to education, research, development and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience and nanoeconomics. With more than $14 billon in high-tech investments, CNSE represents the world’s most advanced university-driven research enterprise, offering students a one-of-a-kind academic experience and providing over 300 corporate partners with access to an unmatched ecosystem for leading-edge R&D and commercialization of nanoelectronics and nanotechnology innovations. CNSE’s footprint spans upstate New York, including its Albany NanoTech Complex, an 800,000-square-foot megaplex with the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 85,000 square feet of Class 1 capable cleanrooms. More than 2,600 scientists, researchers, engineers, students and faculty work here, from companies including IBM, Intel, GlobalFoundries, SEMATECH, Samsung, TSMC, Toshiba, Applied Materials, Tokyo Electron, ASML and Novellus Systems. An expansion now underway, part of which will house the world’s first Global 450mm Consortium, will add nearly 500,000 square feet of next-generation infrastructure, an additional 50,000 square feet of Class 1 capable cleanrooms, and more than 1,000 scientists, researchers and engineers from CNSE and global corporations. In addition, CNSE’s Solar Energy Development Center in Halfmoon provides a prototyping and demonstration line for next-generation CIGS thin-film solar cells. CNSE’s Smart Systems Technology and Commercialization Center of Excellence (STC) in Rochester offers state-of-the-art capabilities for MEMS fabrication and packaging. CNSE also co-founded and manages operations at the Computer Chip Commercialization Center at SUNYIT in Utica and is a co-founder of the Nanotechnology Innovation and Commercialization Excelerator in Syracuse.

For more information, please click here

Contacts:
Steve Janack
CNSE
Vice President
Marketing and Communications
(518) 956-7322

Copyright © UAlbany NanoCollege

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Nanoscale worms provide new route to nano-necklace structures March 29th, 2015

Solving molybdenum disulfide's 'thin' problem: Research team increases material's light emission by twelve times March 29th, 2015

A first glimpse inside a macroscopic quantum state March 28th, 2015

DFG to Establish One Clinical Research Unit and Five Research Units: New Projects to Investigate Complications in Pregnancy, Particle Physics, Nanoparticles, Implants and Transport Planning / Approximately 13 Million Euros in Funding for an Initial Three-Year Period March 28th, 2015

Academic/Education

LAMDAMAP 2015 hosted by the University March 26th, 2015

SUNY Poly & M+W Make Major Announcement: Major Expansion To Include M+W Owned Gehrlicher Solar America Corporation That Will Create up to 400 Jobs to Develop Solar Power Plants at SUNY Poly Sites Across New York State March 26th, 2015

SUNY POLY CNSE to Host First Ever Northeast Semi Supply Conference (NESCO) Conference Will Connect New and Emerging Innovators in the Northeastern US and Canada with Industry Leaders and Strategic Investors to Discuss Future Growth Opportunities in NYS March 25th, 2015

FEI Joins University of Ulm and CEOS on SALVE Project Research Collaboration: The Sub-Ångström Low Voltage Electron (SALVE) microscope should improve contrast and reduce damage on bio-molecules and two-dimensional nanomaterials, such as graphene March 18th, 2015

Announcements

Nanoscale worms provide new route to nano-necklace structures March 29th, 2015

Solving molybdenum disulfide's 'thin' problem: Research team increases material's light emission by twelve times March 29th, 2015

A first glimpse inside a macroscopic quantum state March 28th, 2015

DFG to Establish One Clinical Research Unit and Five Research Units: New Projects to Investigate Complications in Pregnancy, Particle Physics, Nanoparticles, Implants and Transport Planning / Approximately 13 Million Euros in Funding for an Initial Three-Year Period March 28th, 2015

Events/Classes

State-of-the-art online system unveiled to pinpoint metrology software accuracy March 27th, 2015

LAMDAMAP 2015 hosted by the University March 26th, 2015

SUNY POLY CNSE to Host First Ever Northeast Semi Supply Conference (NESCO) Conference Will Connect New and Emerging Innovators in the Northeastern US and Canada with Industry Leaders and Strategic Investors to Discuss Future Growth Opportunities in NYS March 25th, 2015

NNI Publishes Workshop Report Assessing the Status of EHS Risk Science: Report examines progress three years after the release of the 2011 NNI EHS Research Strategy March 23rd, 2015

Printing/Lithography/Inkjet/Inks

Haydale Announce Dedicated Graphene Inks Manufacturing Capability March 25th, 2015

NC State researchers create 'nanofiber gusher': Report method of fabricating larger amounts of nanofibers in liquid March 19th, 2015

'Additive manufacturing' could greatly improve diabetes management March 17th, 2015

Advantest to Exhibit at SEMICON China in Shanghai, China, March 17-19: Showcasing Broad Portfolio of Semiconductor Products, Technologies and Solutions March 10th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE