Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > CEA-Leti and Entegris to Study Cross-Molecular Contamination Between Wafers and Containers in Chip Industry

Abstract:
CEA-Leti and Entegris, a provider of critical products and materials used in advanced high-technology manufacturing, have signed a two-year agreement to study cross-molecular contamination to and from semiconductor wafers and containers.

CEA-Leti and Entegris to Study Cross-Molecular Contamination Between Wafers and Containers in Chip Industry

Grenoble, France and Billerica, MA | Posted on July 11th, 2011

The chip industry's need for increased device performance has spurred the introduction of new materials, while the need to improve yield has led to new methodologies for wafer production. But these developments have spawned new challenges.

New materials introduce new contamination issues that must be managed and avoided. Meanwhile, new methodologies in wafer production will lead to new types of containers and new approaches for cleaning and managing them.

In particular, airborne molecular contaminants as well as cross-contamination issues emerging from the interaction between the cleanroom environment, the process tool mini-environment, the wafer-container system and the pod-mask system must be addressed. Therefore, it will be crucial to have the appropriate methodologies to understand the physics and chemistry behind the contamination process.

Leti's 8,000m² cleanroom facilities with 200mm and 300mm pilot lines, used for advanced development at the 32nm node and below and its tight collaboration with key semiconductor manufacturers, meet all the conditions for conducting contamination studies in production conditions.

Moreover, Leti will share its high-level technical competencies in studying the contamination process together with access to its Nanocharacterization Platform, which can eventually provide complementary analytical techniques. Entegris will provide different microenvironment platforms designed to protect critical materials from molecular contaminants as well as share its expertise in material science.

"Advanced technology nodes are increasingly sensitive to molecular contamination. Leti can characterize the microenvironment and correlate it to the sensitivity of critical substrates and surfaces," said Dr. Jim Ohlsen, Entegris director of materials characterization. "Entegris will contribute to the project by providing polymer materials and products based on our deep knowledge of material science and microenvironment control."

"This project is aligned with our roadmaps on the development of new methodologies analysis related to the study of all aspects of contamination in the semiconductor- production environment," said Narciso Gambacorti, CEA-Leti program manager. "Leti will contribute its knowhow on contamination analysis, while Entegris will have the opportunity to test new polymer materials and new carrier designs in Leti's production-like environment."

####

About CEA-Leti
Leti is an institute of CEA, a French research-and-technology organization with activities in energy, IT, healthcare, defence and security. Leti is focused on creating value and innovation through technology transfer to its industrial partners. It specializes in nanotechnologies and their applications, from wireless devices and systems, to biology, healthcare and photonics. NEMS and MEMS are at the core of its activities. An anchor of the MINATEC campus, CEA-Leti operates 8,000-m² of state-of-the-art cleanroom space on 200mm and 300mm wafer platforms. It employs 1,400 scientists and engineers and hosts more than 190 Ph.D. students and 200 assignees from partner companies. CEA-Leti owns more than 1,700 patent families.

About ENTEGRIS

Entegris' products purify, protect and transport critical materials in the semiconductor, data storage, flat panel display, solar and other high-technology industries. As the materials science and contamination control expert, Entegris enables its customers to meet the demands of the market with products and services that improve productivity, reduce cost and enhance yield. Entegris' solutions include wafer carriers and shippers, filtration products, liquid systems and components, specialty coating, premium graphite materials, shippers and trays and on- or off-site services.

Entegris is ISO 9001 certified and has manufacturing, customer service or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com

For more information, please click here

Contacts:
CEA-Leti Contacts:
Jim Ohlsen
Phone: +1 612 325 7823


ENTEGRIS Contact:
Thierry Bosc
Phone: +33 4 38 78 31 95


Agency
Amélie Ravier
Phone: +33 1 58 18 59 30

Copyright © CEA-Leti

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

PetLife Comments on CNN Story on Scorpion Venom Health Benefits August 27th, 2014

Nanodiamonds Are Forever: A UCSB professor’s research examines 13,000-year-old nanodiamonds from multiple locations across three continents August 27th, 2014

Aspen Aerogels, Inc. to Present at Barclays CEO Energy-Power Conference August 27th, 2014

Nanotech Security Corp. to Acquire Fortress Optical Features Ltd., a Leading Producer of Banknote Security Features August 27th, 2014

Chip Technology

Scientists craft atomically seamless, thinnest-possible semiconductor junctions August 26th, 2014

RMIT delivers $30m boost to micro and nano-tech August 26th, 2014

Competition for Graphene: Berkeley Lab Researchers Demonstrate Ultrafast Charge Transfer in New Family of 2D Semiconductors August 26th, 2014

Symphony of nanoplasmonic and optical resonators leads to magnificent laser-like light emission August 26th, 2014

Announcements

Nanodiamonds Are Forever: A UCSB professor’s research examines 13,000-year-old nanodiamonds from multiple locations across three continents August 27th, 2014

Aspen Aerogels, Inc. to Present at Barclays CEO Energy-Power Conference August 27th, 2014

Nanotech Security Corp. to Acquire Fortress Optical Features Ltd., a Leading Producer of Banknote Security Features August 27th, 2014

Malvern specialists to deliver inaugural short course on polymer characterization at Interplas 2014 August 27th, 2014

Patents/IP/Tech Transfer/Licensing

AQUANOVA receives Technology Leadership Award 2014 FROST & SULLIVAN honors NovaSOL® Technology again August 12th, 2014

Blacktrace Holdings Ltd. to in-license PerkinElmer Technology August 8th, 2014

Silicene Labs Announces the Launch of Patent-Pending, 2D Materials Composite Index™ : The Initial 2D Materials Composite Index™ for Q2 2014 Is: 857.3; Founders Include World-Renowned Physicist and Seasoned Business and IP Professionals July 24th, 2014

UCF Nanotech Spinout Developing Revolutionary Battery Technology: Power the Next Generation of Electronics with Carbon July 23rd, 2014

Research partnerships

The thunder god vine, assisted by nanotechnology, could shake up future cancer treatment: Targeted therapy for hepatocellular carcinoma using nanotechnology August 27th, 2014

Scientists craft atomically seamless, thinnest-possible semiconductor junctions August 26th, 2014

Competition for Graphene: Berkeley Lab Researchers Demonstrate Ultrafast Charge Transfer in New Family of 2D Semiconductors August 26th, 2014

Symphony of nanoplasmonic and optical resonators leads to magnificent laser-like light emission August 26th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE