Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > New Microscope Features Ultra Stable Specimen Stage For High Magnification Navigation

Abstract:
The new SU8040 Field Emission Scanning Electron Microscope (FE-SEM) from Hitachi High-Technologies features a newly developed Regulus (REGULated Ultra Stable) Specimen Stage for unprecedented smooth sample control even at ultra-high magnification.

New Microscope Features Ultra Stable Specimen Stage For High Magnification Navigation

UK | Posted on August 31st, 2010

The SU8040 is an outstanding tool for the leading nanotechnology industries, such as the semiconductor industry and cutting-edge nanotechnology material analysis.

Nanotechnology and semiconductor samples contain structures of nanometre dimensions which need to be imaged and measured at hundreds of thousand times magnification and ultra high resolution. The Regulus stage provides the extremely fine specimen stage control that is needed for smooth operation at such high magnifications in order to be able to locate and maintain the regions of interest. The Regulus stage uses a proven conventional motor drive with a newly developed motor drivetrain to give seamless stage operation throughout the magnification range.

Also new for the SU8040 is the optional cell count assist' software. This software recognises the repeat patterns of DRAM/SRAM samples, and makes use of the outstanding Regulus stage performance to allow automated identification of patterns for measurement and defect analysis. The automated approach eliminates tedious manual searching for the regions of interest.

The SU8040 offers outstanding imaging capabilities, with a resolution capability of 1.3nm at a landing voltage of 1.0kV. The SU8040 benefits from Hitachi's revolutionary in-lens triple detection system, originally introduced on the SU8000. This novel, ultra-sensitive detection system allows high efficiency simultaneous multi-signal imaging and energy filtering. The extraordinary versatility of this detection system not only provides high sensitivity detection for ultra-low current imaging of sensitive materials, but also allows the imaging of structures and surface properties never seen before - taking SEM imaging into whole new areas of materials examination and development.

Secondary electrons, low angle and high angle backscattered electrons can be detected and displayed either independently or as a mixed signal image using a primary beam of as little as 100v, providing the capability to observe the absolute surface structure as well as properties such as surface potential contrast.

####

For more information, please click here

Contacts:
Press Contact:
Denis Bulgin
Tel: +44 1763 262621


Other Enquiries:
Hitachi High-Technologies Corporation, Whitebrook Park, Lower Cookham Road,
Maidenhead, Berkshire UK, SL6 8YA. Tel: + 44 (0) 800 316 1500.


Copyright © Hitachi High-Technologies

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Announcements

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Tools

Carbon nanodots do an ultrafine job with in vitro lung tissue: New experiments highlight the role of charge and size when it comes to carbon nanodots that mimic the effect of nanoscale pollution particles on the human lung. September 12th, 2018

Terahertz spectroscopy enters the single-molecule regime September 7th, 2018

Mirrorcle Demonstrates MEMS-based Programmable Light Source at CES and PW18 August 30th, 2018

Stress-free ALD from Picosun August 28th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project