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Home > Press > New JEOL Through-the-Lens System for Ultrahigh Resolution SEM

Abstract:
JEOL Scanning Electron Microscope Offers Versatile Through-the-Lens System for Ultrahigh Resolution

New JEOL Through-the-Lens System for Ultrahigh Resolution SEM

Peabody, MA | Posted on August 26th, 2010

JEOL has introduced a unique Scanning Electron Microscope with optics that enable ultrahigh resolution imaging at low kV and high spatial resolution microanalysis. The Through-the-Lens System (TTLS) combines new objective lens and detector technologies with the proven JEOL in-lens Field Emission Gun. The TTLS is designed to enable imaging of a wide variety of samples, including magnetic materials. The model JSM-7001FTTLS LV also features low vacuum operation and a large specimen exchange airlock.

In the TTL System, in-lens detectors with energy filtering provide both topography (SE) and Z contrast (BSE) images. Short working distance, low currents, and low kV sensitivity ensure high resolution BSE images. Gentle Beam technology reduces charging and improves resolution, signal-to-noise, and beam brightness, especially at low beam voltages (down to 100V). The TTLS operates at low magnification (10X) with no distortion of the image or the EBSD pattern, allowing collection of large area EBSD maps of large grain materials.

The flexibility of this SEM is displayed in its ability to run in low vacuum (LV) mode for imaging nonconductive samples at high kV and beam currents for a variety of analytical applications that include analysis with EDS, WDS, EBSD, and CL. An optional STEM detector allows imaging of thin samples with sub 0.8nm resolution.

To learn more about the JEOL JSM-7001FTTLS LV SEM, please visit www.jeolusa.com or contact your local sales representative.

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About JEOL
JEOL is a world leader in electron optical equipment and instrumentation for high-end scientific and industrial research and development. Core product groups include electron microscopes (SEMs and TEMs), instruments for the semiconductor industry (electron beam lithography and a series of defect review and inspection tools), and analytical instruments including mass spectrometers, NMRs and ESRs.

JEOL USA, Inc., is a wholly owned subsidiary of JEOL, Ltd., Japan, was incorporated in the United States in 1962. The company has 13 regional service centers that offer unlimited emergency service and support in the U.S.

For more information, please click here

Contacts:
Press Contact:
Patricia Corkum
Marketing Manager
JEOL USA

978-536-2273

Pamela Mansfield
JEOL USA
11 Dearborn Road
Peabody, MA 01960
978-536-2309

Copyright © JEOL

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