Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > SEMATECH to Collaborate with TOK at New Resist Materials and Development Center at UAlbany NanoCollege

Abstract:
SEMATECH, a global consortium of chipmakers, and Tokyo Ohka Kogyo Co., Ltd. (TOK), a leading manufacturer of photoresists, announced today that TOK has joined SEMATECH's Resist Materials and Development Center (RMDC) at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.

SEMATECH to Collaborate with TOK at New Resist Materials and Development Center at UAlbany NanoCollege

Albany, NY | Posted on April 29th, 2009

The RMDC's mission is to develop resist and materials for 22 nm patterning technologies and beyond, and consists of both extreme ultraviolet (EUV) exposure capability and a portfolio of sponsored university research programs. TOK will team with researchers at SEMATECH to develop and demonstrate EUV materials and resists for use at the 22 nm node and beyond.

"We are pleased to welcome TOK as a member, and we are confident this collaboration will help us build upon the excellent work that SEMATECH's lithography researchers have undertaken to drive the development of resist and materials that are critical for continued progress in manufacturing," said John Warlaumont, vice president of advanced technologies at SEMATECH. "This new partnership is the latest example of SEMATECH's ongoing effort to create flexible participation options that will enable broader and deeper partnerships for advanced materials development."

"The critical effort to develop and commercialize EUVL technology for the manufacturing of future nanoelectronics devices will be enhanced by the addition of Tokyo Ohka Kogyo to SEMATECH's Resist Materials and Development Center at CNSE's Albany NanoTech," said Richard Brilla, CNSE Vice President for Strategy, Alliances and Consortia. "This new partnership will enable additional cutting-edge capabilities at the UAlbany NanoCollege, building on the global leadership of New York State in nanotechnology education, research and development, and economic outreach."

At the RMDC, leading resist and materials suppliers have access to SEMATECH's two micro-exposure tools (METs) located at the University at Albany's College of Nanoscale Science and Engineering and University of California at Berkeley, and can participate in focused, cooperative R&D with SEMATECH member companies. They also have access to the several metrology tools located in SEMATECH's RMDC.

"The RMDC brings together the critical capabilities needed to enable manufacturable EUV," said Bryan Rice, director of Lithography at SEMATECH. "Partnering with resist suppliers such as TOK will accelerate EUV resist development and, in turn, will support timely EUVL introduction."



About TOK:

Tokyo Ohka Kogyo Co.,Ltd is a leading manufacturer of photoresists, focusing on semiconductor photoresists and photoresist, ancillary chemical l, as well as LCD photoresists, dielectric materials, and processing equipment for semiconductors and LCDs. TOK, as it is commonly referred to in the industry (www.tok.co.jp), also has subsidiaries in the United States, Europe, and several Asian countries.

####

About SEMATECH
For 20 years, SEMATECH® (www.sematech.org) has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.

About CNSE:

The UAlbany CNSE is the first college in the world dedicated to research, development, education, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. In May 2007, it was ranked as the world's number one college for nanotechnology and microtechnology in the Annual College Ranking by Small Times magazine. CNSE's Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world: a $4.5 billion, 800,000-square-foot megaplex that attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,000 scientists, researchers, engineers, students, and faculty work on site at CNSE's Albany NanoTech, from companies including IBM, AMD, SEMATECH, Toshiba, ASML, Applied Materials, Tokyo Electron, Vistec Lithography and Atotech. For more information, visit www.cnse.albany.edu/.

For more information, please click here

Contacts:
Erica McGill
SEMATECH | Media Relations
257 Fuller Road | Suite 2200 | Albany, NY | 12203
o: 518-649-1041 | m: 518-487-8256

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

In IEDM 2016 Keynote, Leti CEO Says ‘Hyperconnectivity’, Human-focused Research and the IOT Promise Profound, Positive Changes December 7th, 2016

Leti IEDM 2016 Paper Clarifies Correlation between Endurance, Window Margin and Retention in RRAM for First Time: Paper Presented at IEDM 2016 Offers Ways to Reconcile High-cycling Requirements and Instability at High Temperatures in Resistive RAM December 6th, 2016

Tokyo Institute of Technology research: 3D solutions to energy savings in silicon power transistors December 6th, 2016

Physicists decipher electronic properties of materials in work that may change transistors December 6th, 2016

Chip Technology

Leti IEDM 2016 Paper Clarifies Correlation between Endurance, Window Margin and Retention in RRAM for First Time: Paper Presented at IEDM 2016 Offers Ways to Reconcile High-cycling Requirements and Instability at High Temperatures in Resistive RAM December 6th, 2016

Tokyo Institute of Technology research: 3D solutions to energy savings in silicon power transistors December 6th, 2016

Physicists decipher electronic properties of materials in work that may change transistors December 6th, 2016

Construction of practical quantum computers radically simplified: Scientists invent ground-breaking new method that puts quantum computers within reach December 5th, 2016

Announcements

In IEDM 2016 Keynote, Leti CEO Says ‘Hyperconnectivity’, Human-focused Research and the IOT Promise Profound, Positive Changes December 7th, 2016

Leti IEDM 2016 Paper Clarifies Correlation between Endurance, Window Margin and Retention in RRAM for First Time: Paper Presented at IEDM 2016 Offers Ways to Reconcile High-cycling Requirements and Instability at High Temperatures in Resistive RAM December 6th, 2016

Tokyo Institute of Technology research: 3D solutions to energy savings in silicon power transistors December 6th, 2016

Physicists decipher electronic properties of materials in work that may change transistors December 6th, 2016

Tools

Deep insights from surface reactions: Researchers use Stampede supercomputer to study new chemical sensing methods, desalination and bacterial energy production December 2nd, 2016

Controlled electron pulses November 30th, 2016

Scientists shrink electron gun to matchbox size: Terahertz technology has the potential to enable new applications November 25th, 2016

News from Quorum: The Agricultural Research Service of the USDA uses a Quorum Cryo-SEM preparation system for the study of mites, ticks and other soft bodied organisms November 22nd, 2016

Alliances/Trade associations/Partnerships/Distributorships

Infrared instrumentation leader secures exclusive use of Vantablack coating December 5th, 2016

Leti and Grenoble Partners Demonstrate World’s 1st Qubit Device Fabricated in CMOS Process: Paper by Leti, Inac and University of Grenoble Alpes Published in Nature Communications November 28th, 2016

Mechanism for sodium storage in 2-D material: Tin selenide is an effective host for storing sodium ions, making it a promising material for sodium ion batteries October 27th, 2016

Enterprise In Space Partners with Sketchfab and 3D Hubs for NewSpace Education October 13th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project