Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > SEMATECH and Canon ANELVA Partner to Develop Advanced Materials and Processes for Future Non-volatile Memory Devices

Abstract:
Collaboration to drive development of scalable materials for sub 40 nm memory nodes

SEMATECH and Canon ANELVA Partner to Develop Advanced Materials and Processes for Future Non-volatile Memory Devices

Austin, TX and Albany, NY | Posted on April 16th, 2009

SEMATECH, a global consortium of chipmakers, announced today that Canon ANELVA Corporation, a leading manufacturer of semiconductor equipment, has joined its Front End Processes (FEP) Program. The joint partnership will expand on current collaborative efforts to develop suitable materials and process techniques for future non-volatile memory (NVM) applications.

To further advance scaling of next-generation memory materials for sub 40 nm nodes, Canon ANELVA will collaborate with experts from SEMATECH's FEP program on the development of nanoscale, uniform dielectrics and metal films for non-volatile memory applications, using Canon ANELVA's physical vapor deposition (PVD) technology for memory-based applications. These dielectric and electrode materials are expected to improve data retention and the speed of program and erase in both charge trap and floating gate flash memory architectures.

"We are excited to work with the most advanced technologists in developing manufacturable solutions for tunnel oxide, charge trap materials, high-k and metal electrodes for advanced flash and other non-volatile memories," said Naoki Watanabe, General Manager, Engineering Division2, Electronic Devices Engineering Headquarters. "The collaboration combines Canon ANELVA's experience in precision materials, low damage PVD, and related equipment platforms and SEMATECH's strengths in the development of fundamental materials and advanced memory technologies."

Within the NVM semiconductor industry, shrinkage of device dimensions to reduce cost per function presents several critical issues for flash memory scaling, such as tunnel oxide integrity, capacitive coupling between control and floating gate, and cross talk between adjacent devices. SEMATECH and Canon ANELVA's collaboration will focus on developing a new set of materials to address these scaling challenges for flash memory.

"This collaborative effort reinforces SEMATECH's commitment to develop cutting-edge memory technologies utilizing advanced materials for continued performance improvement of semiconductor technologies," said Raj Jammy, vice president of emerging technologies, SEMATECH. "The joint research initiative with Canon ANELVA will aim to develop the various materials components needed for advanced NVM and evaluate the reliability of these materials."

The collaboration will be conducted between the research teams of SEMATECH's FEP device and reliability experts and Canon ANELVA's semiconductor equipment engineers.

SEMATECH's FEP program is aimed at developing new techniques for extending high-k dielectrics, metal gates, high mobility channels, and advanced memory technologies in collaboration with member companies, universities, national labs and supplier partners.

####

About SEMATECH
For 20 years, SEMATECH® (www.sematech.org) has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.



About Canon ANELVA

Canon ANELVA Corporation (www.canon-anelva.co.jp) was established in 1967 and has developed and sold many kinds of manufacturing equipments for multiple applications such as semiconductor, storage and flat panel displays, and vacuum components, with its unique ultra high vacuum technologies utilizing plasma and thin-film technologies. Canon ANELVA has lead and opened up various de-facto standard products as a pioneer in this field by unique technologies.

For more information, please click here

Contacts:
Erica McGill
SEMATECH | Media Relations
257 Fuller Road | Suite 2200 | Albany, NY | 12203
o: 518-649-1041 | m: 518-487-8256

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Bringing the atomic world into full color: Researchers turn atomic force microscope measurements into color images October 19th, 2017

'Find the Lady' in the quantum world: International team of researchers presents method for quantum-mechanical swapping of positions October 18th, 2017

Long nanotubes make strong fibers: Rice University researchers advance characterization, purification of nanotube wires and films October 17th, 2017

Spinning strands hint at folding dynamics: Rice University lab uses magnetic beads to model microscopic proteins, polymers October 17th, 2017

Chip Technology

Bringing the atomic world into full color: Researchers turn atomic force microscope measurements into color images October 19th, 2017

Spin current detection in quantum materials unlocks potential for alternative electronics October 15th, 2017

Quantum manipulation power for quantum information processing gets a boost: Improving the efficiency of quantum heat engines involves reducing the number of photons in a cavity, ultimately impacting quantum manipulation power October 14th, 2017

Injecting electrons jolts 2-D structure into new atomic pattern: Berkeley Lab study is first to show potential of energy-efficient next-gen electronic memory October 13th, 2017

Memory Technology

Injecting electrons jolts 2-D structure into new atomic pattern: Berkeley Lab study is first to show potential of energy-efficient next-gen electronic memory October 13th, 2017

First on-chip nanoscale optical quantum memory developed: Smallest-yet optical quantum memory device is a storage medium for optical quantum networks with the potential to be scaled up for commercial use September 11th, 2017

High-speed quantum memory for photons September 9th, 2017

Fast magnetic writing of data September 7th, 2017

Announcements

Bringing the atomic world into full color: Researchers turn atomic force microscope measurements into color images October 19th, 2017

Long nanotubes make strong fibers: Rice University researchers advance characterization, purification of nanotube wires and films October 17th, 2017

Spinning strands hint at folding dynamics: Rice University lab uses magnetic beads to model microscopic proteins, polymers October 17th, 2017

Rice U. study: Vibrating nanoparticles interact: Placing nanodisks in groups can change their vibrational frequencies October 16th, 2017

Alliances/Trade associations/Partnerships/Distributorships

More 22 of 59,885 Print all In new window Leti to Present Update of CoolCube/3DVLSI Technologies Development at 2017 IEEE S3S: Future Developments and Tape-Out Vehicles to Be Presented during Oct. 17 Workshop October 12th, 2017

Quorum announces new customer support and demonstration facilities for users worldwide October 10th, 2017

GLOBALFOUNDRIES and Soitec Enter Into Long-term Supply Agreement on FD-SOI Wafers: Strategic milestone to help guarantee a secure, high-volume supply of FD-SOI technology September 20th, 2017

GLOBALFOUNDRIES Unveils Vision and Roadmap for Next-Generation 5G Applications: Technology platforms are uniquely positioned to enable a new era of ‘connected intelligence’ with the transition to 5G September 20th, 2017

Research partnerships

Bringing the atomic world into full color: Researchers turn atomic force microscope measurements into color images October 19th, 2017

'Find the Lady' in the quantum world: International team of researchers presents method for quantum-mechanical swapping of positions October 18th, 2017

Long nanotubes make strong fibers: Rice University researchers advance characterization, purification of nanotube wires and films October 17th, 2017

Rice U. lab surprised by ultraflat magnets: Researchers create atom-thick alloys with unanticipated magnetic properties October 13th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project