Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button

Home > Press > SEMATECH and Canon ANELVA Partner to Develop Advanced Materials and Processes for Future Non-volatile Memory Devices

Abstract:
Collaboration to drive development of scalable materials for sub 40 nm memory nodes

SEMATECH and Canon ANELVA Partner to Develop Advanced Materials and Processes for Future Non-volatile Memory Devices

Austin, TX and Albany, NY | Posted on April 16th, 2009

SEMATECH, a global consortium of chipmakers, announced today that Canon ANELVA Corporation, a leading manufacturer of semiconductor equipment, has joined its Front End Processes (FEP) Program. The joint partnership will expand on current collaborative efforts to develop suitable materials and process techniques for future non-volatile memory (NVM) applications.

To further advance scaling of next-generation memory materials for sub 40 nm nodes, Canon ANELVA will collaborate with experts from SEMATECH's FEP program on the development of nanoscale, uniform dielectrics and metal films for non-volatile memory applications, using Canon ANELVA's physical vapor deposition (PVD) technology for memory-based applications. These dielectric and electrode materials are expected to improve data retention and the speed of program and erase in both charge trap and floating gate flash memory architectures.

"We are excited to work with the most advanced technologists in developing manufacturable solutions for tunnel oxide, charge trap materials, high-k and metal electrodes for advanced flash and other non-volatile memories," said Naoki Watanabe, General Manager, Engineering Division2, Electronic Devices Engineering Headquarters. "The collaboration combines Canon ANELVA's experience in precision materials, low damage PVD, and related equipment platforms and SEMATECH's strengths in the development of fundamental materials and advanced memory technologies."

Within the NVM semiconductor industry, shrinkage of device dimensions to reduce cost per function presents several critical issues for flash memory scaling, such as tunnel oxide integrity, capacitive coupling between control and floating gate, and cross talk between adjacent devices. SEMATECH and Canon ANELVA's collaboration will focus on developing a new set of materials to address these scaling challenges for flash memory.

"This collaborative effort reinforces SEMATECH's commitment to develop cutting-edge memory technologies utilizing advanced materials for continued performance improvement of semiconductor technologies," said Raj Jammy, vice president of emerging technologies, SEMATECH. "The joint research initiative with Canon ANELVA will aim to develop the various materials components needed for advanced NVM and evaluate the reliability of these materials."

The collaboration will be conducted between the research teams of SEMATECH's FEP device and reliability experts and Canon ANELVA's semiconductor equipment engineers.

SEMATECH's FEP program is aimed at developing new techniques for extending high-k dielectrics, metal gates, high mobility channels, and advanced memory technologies in collaboration with member companies, universities, national labs and supplier partners.

####

About SEMATECH
For 20 years, SEMATECH® (www.sematech.org) has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.



About Canon ANELVA

Canon ANELVA Corporation (www.canon-anelva.co.jp) was established in 1967 and has developed and sold many kinds of manufacturing equipments for multiple applications such as semiconductor, storage and flat panel displays, and vacuum components, with its unique ultra high vacuum technologies utilizing plasma and thin-film technologies. Canon ANELVA has lead and opened up various de-facto standard products as a pioneer in this field by unique technologies.

For more information, please click here

Contacts:
Erica McGill
SEMATECH | Media Relations
257 Fuller Road | Suite 2200 | Albany, NY | 12203
o: 518-649-1041 | m: 518-487-8256

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Nanoparticle versus cancer: Scientists have created nanoparticles which cure cancer harmlessly July 22nd, 2016

Quantum drag:University of Iowa physicist says current in one iron magnetic sheet can create quantized spin waves in another, separate sheet July 22nd, 2016

New Yale-developed device lengthens the life of quantum information July 22nd, 2016

RMIT researchers make leap in measuring quantum states July 21st, 2016

Chip Technology

Quantum drag:University of Iowa physicist says current in one iron magnetic sheet can create quantized spin waves in another, separate sheet July 22nd, 2016

New Yale-developed device lengthens the life of quantum information July 22nd, 2016

New reaction for the synthesis of nanostructures July 21st, 2016

Research team led by NUS scientists develop plastic flexible magnetic memory device: Novel technique to implant high-performance magnetic memory chip on a flexible plastic surface without compromising performance July 21st, 2016

Memory Technology

Research team led by NUS scientists develop plastic flexible magnetic memory device: Novel technique to implant high-performance magnetic memory chip on a flexible plastic surface without compromising performance July 21st, 2016

The birth of quantum holography: Making holograms of single light particles! July 21st, 2016

Smallest hard disk to date writes information atom by atom July 20th, 2016

Atomic bits despite zero-point energy? Jülich scientists explore novel ways of developing stable nanomagnets July 11th, 2016

Announcements

Nanoparticle versus cancer: Scientists have created nanoparticles which cure cancer harmlessly July 22nd, 2016

Quantum drag:University of Iowa physicist says current in one iron magnetic sheet can create quantized spin waves in another, separate sheet July 22nd, 2016

New Yale-developed device lengthens the life of quantum information July 22nd, 2016

Graphene photodetectors: Thinking outside the 2-D box July 21st, 2016

Alliances/Trade associations/Partnerships/Distributorships

Leti and Korea Institute of Science and Technology to Explore Collaboration on Advanced Technologies for Digital Era July 14th, 2016

Nanosystem and Digital Surf launch NanoMap Alpha: New surface imaging & metrology software based on Mountains® Technology July 14th, 2016

FEI and King Abdullah University of Science and Technology Establish New Electron Microscopy ‘Centre of Excellence’: Centre of Excellence involves materials and life sciences research and technical collaboration July 5th, 2016

FEI and University of Liverpool Announce QEMSCAN Research Initiative: University of Liverpool will utilize FEI’s QEMSCAN technology to gain a better insight into oil and gas reserves & potentially change the approach to evaluating them June 22nd, 2016

Research partnerships

Quantum drag:University of Iowa physicist says current in one iron magnetic sheet can create quantized spin waves in another, separate sheet July 22nd, 2016

Rice's 'antenna-reactor' catalysts offer best of both worlds: Technology marries light-harvesting nanoantennas to high-reaction-rate catalysts July 18th, 2016

Researchers invent 'smart' thread that collects diagnostic data when sutured into tissue: Advances could pave way for new generation of implantable and wearable diagnostics July 18th, 2016

Leti and Korea Institute of Science and Technology to Explore Collaboration on Advanced Technologies for Digital Era July 14th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic