Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > ATMI and Ovonyx Produce Electrical Performance and Endurance Data in Key Step Toward Developing Commercially Viable CVD Phase Change Material Depositi

Abstract:
Process and Material Expertise From ATMI, Phase Change Materials, Process and Device Architecture Know-How From Ovonyx, Enable Chemical Vapor Deposition of Dense 3-D Structures With Robust Phase Change Performance

ATMI and Ovonyx Produce Electrical Performance and Endurance Data in Key Step Toward Developing Commercially Viable CVD Phase Change Material Depositi

DANBURY, CT and ROCHESTER HILLS, MI | Posted on December 9th, 2008

ATMI, Inc. (Nasdaq:ATMI) and Ovonyx, Inc., today announced that the companies successfully demonstrated Germanium Antimony Telluride (GST) -based Phase Change Memory (PCM) devices made with Chemical Vapor Deposition (CVD) processes. These methods were scalable to sub-40 nanometers (nm), high aspect ratio, high density, and three-dimensional structures. PCM devices built with the CVD processes demonstrated endurance exceeding 10(6) write-erase cycles.

PCM devices incorporating GST materials are commercially available today, and are generally produced using traditional physical vapor deposition techniques. Working with optimized GST precursor materials from ATMI and phase change technologies from Ovonyx, the companies have now deposited GST films using more scalable CVD processes. It enables deposition into small, 3-D features and results in functional phase change devices of the size, speed, and endurance (able to operate over a million cycles without degrading) that will allow smaller cell size and more scalable application in upcoming high-performance Flash and DRAM applications.

"Today's forms of memory are fast approaching their physical limits in speed and density," said Tod Higinbotham, ATMI Executive Vice President, Process Solutions. "The ability to apply a high-volume process like CVD to this challenge enables future generation phase change memory products with greater scalability and lower cost. The strength of Ovonyx's expertise in PCM developments and the results of a collaboration announced only last March have already cracked the door open to commercial steps for this CVD approach to PCM technology."

Using ATMI's GST precursor materials, the companies achieved excellent amorphous film morphology in sub-40 nm contact-like structures with aspect ratios of up to 5:1. The ability to use CVD processing allowed Ovonyx and ATMI to deposit the GST material into the 3-D, high aspect ratio structures, which permits implementation of the highly scalable "confined cell" PCM technology. Confined cell allows fast write-times and high density packing of bits, thereby making PCM increasingly competitive compared with Flash and DRAM. The CVD-deposited GST films exhibited phase change functions with an endurance exceeding 10(6) cycles, exceeding typical flash write-erase cycle specifications.

"ATMI has supplied chemicals and process solutions to a number of leading research projects on GST-based phase change memory," said Chuck Dennison, Chief Operating Officer of Ovonyx. "Capitalizing on ATMI's experience and enabling conformal deposition processes like CVD have resulted in significant progress in efforts to demonstrate high performance CVD deposited phase change memory and to define a scalable and efficient path to future PCM products."

Ovonyx's PCM technology is an emerging non-volatile memory with expected scalability down to sub-10 nm dimensions. CVD based confined-cell technology allows the increased scaling and cost-reduction required to pursue next-generation products. ATMI's new GST precursors enable the use of mature CVD technologies for deposition into small, high aspect ratio structures consistent with confined cells.

####

About ATMI, Inc.
ATMI provides specialty materials and high-purity materials handling and delivery solutions to the worldwide semiconductor industry.

About Ovonyx, Inc.

Ovonyx was formed with the charter to commercialize its proprietary phase-change semiconductor memory technology originally invented at Energy Conversion Devices, Inc. Ovonyx nonvolatile PCM technology offers significantly faster write and erase speeds through its capability for byte-write in either direction (avoiding the need to erase a block to write a bit), higher cycling endurance, and better scaling performance with new generations of photolithography than conventional Flash memory. Relative to DRAM, PCM eliminates the refresh power by retaining its memory without power. PCM also has the advantage of a simple fabrication process that allows the design of semiconductor chips with embedded nonvolatile memory using only a few additional mask steps. Ovonyx is pursuing commercialization of its array-addressed memory systems through licenses and joint development programs with semiconductor manufacturers including BAE Systems, Intel Corporation, ST Microelectronics, Elpida Memory, Samsung Electronics, Qimonda AG, and Hynix Semiconductor Inc. For more information, please visit www.ovonyx.com.

Statements contained herein that relate to ATMI's future performance, including, without limitation, statements with respect to ATMI's anticipated results of operations or level of business for 2008 or any other future period, are forward-looking statements within the safe harbor provisions of the Private Securities Litigation Reform Act of 1995. Such statements are based on current expectations only and are subject to certain risks, uncertainties, and assumptions, including, but not limited to, changes in semiconductor industry growth (including, without limitation, wafer starts) or ATMI's markets; competition, problems, or delays developing, commercializing and delivering new products; problems or delays in integrating acquired operations and businesses; uncertainty in the credit and financial markets; and other factors described in ATMI's Form 10-K for the year ended December 31, 2007, and other subsequent filings with the Securities and Exchange Commission. Such risks and uncertainties may cause actual results to differ materially from those expressed in our forward-looking statements. ATMI undertakes no obligation to update any forward-looking statements.

ATMI and the ATMI logo are trademarks or registered trademarks of Advanced Technology Materials, Inc., in the United States, other countries or both.

For more information, please click here

Contacts:
ATMI, Inc.
Dean Hamilton, Director, ATMI Investor Relations & Corporate
Communications
203.207.9349
203.794.1100 x4202


Ovonyx, Inc.
Karen Connolly, Director, Communications
248.842.6096

Copyright © GlobeNewswire, Inc.

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

The George Washington University Opens Science and Engineering Hall, Largest Building of Its Kind in D.C.: Building Represents Significant Investment in Research Programs and Facilities; Commitment to Solve Global Problems, Improve Lives of Millions March 5th, 2015

Anousheh Ansari Wins the National Space Society's Space Pioneer Award for "Service to the Space Community" March 5th, 2015

Enhanced Graphene Components for Next Generation Racing Yacht March 5th, 2015

Get ready for NanoDays! March 5th, 2015

Chip Technology

French Institutes IRT Nanoelec and CMP Team up to Offer World’s First Service for Post-process 3D Technologies on Multi-Project-Wafer March 5th, 2015

Experiment and theory unite at last in debate over microbial nanowires: New model and experiments settle debate over metallic-like conductivity of microbial nanowires in bacterium March 4th, 2015

Magnetic vortices in nanodisks reveal information: Researchers from Dresden and Jülich use microwaves to read out information from smallest storage devices March 4th, 2015

The taming of magnetic vortices: Unified theory for skyrmion-materials March 3rd, 2015

Memory Technology

Magnetic vortices in nanodisks reveal information: Researchers from Dresden and Jülich use microwaves to read out information from smallest storage devices March 4th, 2015

The taming of magnetic vortices: Unified theory for skyrmion-materials March 3rd, 2015

Insight into inner magnetic layers: Measurements at BESSY II have shown how spin filters forming within magnetic sandwiches influence tunnel magnetoresistance -- results that can help in designing spintronic component- February 17th, 2015

Dance of the nanovortices February 2nd, 2015

Announcements

The George Washington University Opens Science and Engineering Hall, Largest Building of Its Kind in D.C.: Building Represents Significant Investment in Research Programs and Facilities; Commitment to Solve Global Problems, Improve Lives of Millions March 5th, 2015

Anousheh Ansari Wins the National Space Society's Space Pioneer Award for "Service to the Space Community" March 5th, 2015

Enhanced Graphene Components for Next Generation Racing Yacht March 5th, 2015

Get ready for NanoDays! March 5th, 2015

Alliances/Partnerships/Distributorships

French Institutes IRT Nanoelec and CMP Team up to Offer World’s First Service for Post-process 3D Technologies on Multi-Project-Wafer March 5th, 2015

American Chemical Society Presidential Symposia: nanoscience, international chemistry March 5th, 2015

Keysight Technologies Shifts to Direct Sales of High-Performance Products in North America March 3rd, 2015

Cambrios and Heraeus Jointly Create New, High-Conductivity Transparent Conductors: Two Companies' Combined Products Dramatically Extend Flexible Substrate Capabilities for Next-Generation Mass-Market Technology Products March 3rd, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE