Nanotechnology Now

• About Us
  
  • Advertising
  • Our Mission
  • Our Team
  • Comments
  • Friends
  • Contact
• Nanotechnology
• News
  
  • Current News
  • Press Releases
  • Submit Press
  • Press kit
  • Interviews
• Columns
• Products
  
  • Our Products
  • Books
  • Featured Books
• Directories
  
  • Companies/Academic
  • Events
  • Glossary
  • Best Of
• Career Center
• Nano-Social Network
• Nano Consulting
• My Account

Home > News > Rohm & Haas, IBM eye Cu CMP for 32nm-22nm

February 27th, 2008

Rohm & Haas, IBM eye Cu CMP for 32nm-22nm

Abstract:
Rohm & Haas Electronic Materials/CMP Technologies and IBM are adding to their collaborative plate, following news of joint work on 32nm and below implant materials/processes with a pact to develop CMP processes for integrating copper and low-k dielectrics, in order to create copper CMP consumables for 32nm and 22nm device manufacturing. Research will take place at IBM's Research facility in Yorktown Heights, NY, as well as the U. of Albany's NanoTech complex and Rohm and Haas's Technology Centers in Newark, DE, and Phoenix, AZ.

Source:
sst.pennnet.com

Bookmark:

Related News Press

News and information

Pioneering breakthrough of chemical nanoengineering to design drugs controlled by light June 18th, 2013

Study Shows How the Nanog Protein Promotes Growth of Head and Neck Cancer June 18th, 2013

New Method to Synthesize Zinc Oxide Nanoparticles with High Catalytic Activity June 18th, 2013

Production of Polyaniline Biosensors Modified with Conductive Polymer Composites June 18th, 2013

Chip Technology

Which qubit my dear? New method to distinguish between neighbouring quantum bits June 18th, 2013

SEMATECH to Address Critical Supply Chain Challenges and Present Latest Technology Advances at SEMICON West 2013 June 17th, 2013

Imec shows multiple enhancement options for next-generation FinFETs: Leading nano-electronics R&D center addresses key challenges of Germanium finFET technology at VLSI 2013 June 14th, 2013

Imec showcases innovation in RRAM R&D at VLSI Technology Symposium June 14th, 2013

Announcements

Pioneering breakthrough of chemical nanoengineering to design drugs controlled by light June 18th, 2013

Study Shows How the Nanog Protein Promotes Growth of Head and Neck Cancer June 18th, 2013

New Method to Synthesize Zinc Oxide Nanoparticles with High Catalytic Activity June 18th, 2013

Production of Polyaniline Biosensors Modified with Conductive Polymer Composites June 18th, 2013

Alliances/Partnerships/Distributorships

European Technology Platform for Nanomedicine and Nanomed2020 European Consortium Launch the Nanomedicine Award June 17th, 2013

SEMATECH to Address Critical Supply Chain Challenges and Present Latest Technology Advances at SEMICON West 2013 June 17th, 2013

SEMATECH Names William R. Rozich Chairman of the Board June 13th, 2013

Applied Seals North America Partners with SEMATECH to Improve Semiconductor Manufacturing Sealing Solutions for Vacuum Processing Tools June 12th, 2013