Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Surrey NanoSystems at nanotech 2008, Tokyo 13-15 February, booth B-49

Abstract:
Surrey Nanosystems takes its 'next-generation semiconductor tool' technology to Asian industry at Nanotech 2008

* tool and processes provide platform for progress at the 32 nm process node and beyond

Surrey NanoSystems at nanotech 2008, Tokyo 13-15 February, booth B-49

Newhaven UK | Posted on February 1st, 2008

The carbon nanotube and nanomaterials tool innovator Surrey NanoSystems is taking its 'next-generation semiconductor tool' message to the Asian semiconductor industry at nanotech 2008.

"There are fundamental barriers to progress in semiconductor integration, because of the need to find viable processes for next-generation interconnect and dielectric applications," says Duncan Cooper of Surrey NanoSystems. "Surrey NanoSystems has developed carbon nanotube processes and a nanomaterial deposition tool with the precision and repeatability necessary for these critical applications."

"Our presence at nanotech 2008 gives us an opportunity to meet with leading companies in the field, and we are additionally part of a JETRO* program to establish high-level contacts with key Japanese firms in this field," he adds.

Surrey NanoSystems' NanoGrowth tool for fabricating carbon nanotube and nanomaterial structures has an extremely high degree of precision and repeatability plus the ability to grow materials at low temperatures that are compatible with commercial semiconductor processes.

"The tool's intrinsic modularity allows users to gain automated control over all aspects of nanomaterial synthesis" adds Duncan Cooper. "We are able to discuss the processing techniques and results that the company has gained from our development partnership with the University of Surrey's Advanced Technology Institute, plus a parallel agreement that we have in place with a major laboratory that is helping us with independent test-bed services for our unique processes. We will bring our approach to high volume manufacture in tools aimed at the 32 nm process node and beyond."

The company's first tool is NanoGrowth 1000n, and comes with both CVD (chemical vapour deposition) and PECVD (plasma-enhanced CVD) processing capability. These two techniques provide great processing versatility for users. Among many quality-oriented architectural features are an ultra-high purity gas delivery system and flexible closed-loop control systems that allow users to define target tolerances to achieve a high level of repeatability during all phases of the process. Field-proven carbon nanotube fabrication programs are provided with the tool in the form of software templates that may be adapted easily by users for their own applications.

A high degree of hardware modularity further extends the capability of the tool's design, as it facilitates easy expansion and configuration to meet current and future fabrication requirements. Among many options are further processing techniques such as ICP (inductively coupled plasma), dual sputter sources for catalyst deposition - including a module for delivery of vapour-phase catalysts like ferrocene - and modules to add process stages for automated pilot production or high throughput. Included in the latter category are an automated wafer transport load/lock system, integrated etching capability, and a PECVD module for deposition of thin-film silicon-based materials.

*JETRO: Japan External Trade Organization; www.jetro.go.jp

####

About Surrey Nanosystems
Surrey NanoSystems produces the world's most advanced tools and Carbon Nanotube processing recipes - making precision, repeatable nanotube and nanowire fabrication a reality. Our designed-for-purpose tools bridge the gap between R&D initiatives, and the volume production of commercial nanotechnology-based products.

For more information, please click here

Contacts:
Surrey NanoSystems
Euro Business Park, Building 24
Newhaven, BN9 0DQ, UK.
+44 (0)1273 515899


Copyright © Surrey NanoSystems

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Sopping up proteins with thermosponges: Researchers develop novel nanoparticle platform that proves effective in delivering protein-based drugs October 22nd, 2014

Brookhaven Lab Launches Computational Science Initiative:Leveraging computational science expertise and investments across the Laboratory to tackle "big data" challenges October 22nd, 2014

Bipolar Disorder Discovery at the Nano Level: Tiny structures found in brain synapses help scientists better understand disorder October 22nd, 2014

NIST offers electronics industry 2 ways to snoop on self-organizing molecules October 22nd, 2014

Chip Technology

NIST offers electronics industry 2 ways to snoop on self-organizing molecules October 22nd, 2014

Materials for the next generation of electronics and photovoltaics: MacArthur Fellow develops new uses for carbon nanotubes October 21st, 2014

Nitrogen Doped Graphene Characterized by Iranian, Russian, German Scientists October 21st, 2014

Crystallizing the DNA nanotechnology dream: Scientists have designed the first large DNA crystals with precisely prescribed depths and complex 3D features, which could create revolutionary nanodevices October 20th, 2014

Announcements

NanoTechnology for Defense (NT4D) October 22nd, 2014

Mechanism behind nature's sparkles revealed October 22nd, 2014

TARA Biosystems and Harris & Harris Group Form Company to Improve Safety and Efficacy of New Therapies October 22nd, 2014

Researchers patent a nanofluid that improves heat conductivity October 22nd, 2014

Events/Classes

NanoTechnology for Defense (NT4D) October 22nd, 2014

Ucore's McKenzie to Deliver Presentation to Rare Earths Conference in Singapore as Highlight of Fall 2014 Marketplace Schedule October 19th, 2014

Aspen Aerogels, Inc. Schedules Third Quarter 2014 Earnings Release and Conference Call for November 6, 2014 October 17th, 2014

New VDMA Association "Electronics, Micro and Nano Technologies" founded: Inaugural Meeting in Frankfurt/Main, Germany October 15th, 2014

NanoNews-Digest
The latest news from around the world, FREE





  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE