Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Metryx and IMEC Enter Joint Development Program for Sub-32nm Metrology

Abstract:
Metryx Limited, a supplier of mass metrology equipment to the semiconductor manufacturing industry, today announced that it has entered into a joint development program with leading research institute IMEC. The program is designed to evaluate and develop mass metrology at both the application and tool level for sub-32nm process manufacturing. The signed collaboration follows the installation at IMEC of Metryx's Mentor SF3 300 mm tool and a Mentor OC23 200mm tool, announced earlier this year.

Metryx and IMEC Enter Joint Development Program for Sub-32nm Metrology

BRISTOL, UK | Posted on January 7th, 2008

"The measurement of mass change at the atomic level, from one process step to another, has gained, and continues to gain, rapid market acceptance for a variety of manufacturing applications in IC fabs around the world," said Dr. Adrian Kiermasz, President and CEO of Metryx Ltd. "As we continue to scale down line widths to the sub-32nm level, observing the mass characteristics and the changes of a wafer's mass becomes even more critical. Collaborating with IMEC provides us with an excellent platform to demonstrate the effectiveness and versatility of the technology across a number of process applications."

Metryx's Mentor metrology tools monitor the mass of any wafer following a process step to quickly determine whether device manufacture process steps are operating consistently using passive data collection (PDC) and normal distribution analysis. The ability to quickly and accurately identify any process drift allows the process to be corrected or stopped immediately, saving scrap and preventing yield loss. The tools can be used to monitor a number of applications including shallow trench isolation, etch, deposition and CMP for both metal and dielectric layers.

"Mass metrology gives us extremely good insight into both process development and process stability," said Serge Vanhaelemeersch, Director of Advanced Materials and Process Steps at IMEC. "At the sub-32nm level, any slight variation in a deposition or etch process can be highlighted immediately and with a great deal of accuracy. With such precision, we know whether we are right or wrong at a very early stage, which could significantly reduce development time and scrap."

The Mentor tool can be used as an inline metrology tool and, because it is non-destructive, can be used directly on device wafers. The tool offers atomic level repeatability, low cost of ownership and high return on investment. The small-footprint Mentor is capable of throughput of up to 60 wafers per hour to enable nanotechnology mass measurement of production wafers, as well as test and blanket wafers, independent of substrate size or material.

####

About Metryx Limited
Metryx is a semiconductor equipment manufacturer specializing in unique nanotechnology mass measurement techniques. Based in Bristol, England, Metryx’ non-destructive 200mm and 300mm metrology tools offer atomic layer accuracy making them ideal for material characterization and device manufacture process control.

For more information, please click here

Contacts:
Metryx, Limited
Adrian Kiermasz
+44 (0)1275 859 988
e:
or
Impress Public Relations
Dave Richardson
+1-415-994-1423 (Press)
e:

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Promising use of nanodiamonds in delivering cancer drug to kill cancer stem cells: NUS study shows that delivery of Epirubicin by nanodiamonds resulted in a normally lethal dosage of Epirubicin becoming a safe and effective dosage for treatment of liver cancer January 26th, 2015

GS7 Graphene Sensor maybe Solution in Fight Against Cancer January 25th, 2015

NANOPOSTER 2015 - 5th Virtual Nanotechnology Conference - call for abstracts January 24th, 2015

Nanosensor Used for Simultaneous Determination of Effective Tea Components January 24th, 2015

Chip Technology

The latest fashion: Graphene edges can be tailor-made: Rice University theory shows it should be possible to tune material's properties January 24th, 2015

New method to generate arbitrary optical pulses January 21st, 2015

New signal amplification process set to transform communications, imaging, computing: UC San Diego researchers discover a mechanism to amplify signals in optoelectronic systems that is far more efficient than standard processes January 21st, 2015

Solving an organic semiconductor mystery: Berkeley Lab researchers uncover hidden structures in domain interfaces that hamper performance January 16th, 2015

Announcements

Promising use of nanodiamonds in delivering cancer drug to kill cancer stem cells: NUS study shows that delivery of Epirubicin by nanodiamonds resulted in a normally lethal dosage of Epirubicin becoming a safe and effective dosage for treatment of liver cancer January 26th, 2015

GS7 Graphene Sensor maybe Solution in Fight Against Cancer January 25th, 2015

NANOPOSTER 2015 - 5th Virtual Nanotechnology Conference - call for abstracts January 24th, 2015

Nanosensor Used for Simultaneous Determination of Effective Tea Components January 24th, 2015

Alliances/Partnerships/Distributorships

Smart keyboard cleans and powers itself -- and can tell who you are January 21st, 2015

DNA 'glue' could someday be used to build tissues, organs January 14th, 2015

GLOBALFOUNDRIES and Linear Dimensions to Offer Joint Analog Solution For Fast-Growing Wearables and MEMs Sensors Markets January 9th, 2015

Nanowire clothing could keep people warm -- without heating everything else January 7th, 2015

Research partnerships

Promising use of nanodiamonds in delivering cancer drug to kill cancer stem cells: NUS study shows that delivery of Epirubicin by nanodiamonds resulted in a normally lethal dosage of Epirubicin becoming a safe and effective dosage for treatment of liver cancer January 26th, 2015

Wearable sensor clears path to long-term EKG, EMG monitoring January 20th, 2015

Graphene enables all-electrical control of energy flow from light emitters: First signatures of graphene plasmons at telecommunications wavelength revealed January 20th, 2015

Charge instability detected across all types of copper-based superconductors: Findings may help researchers synthesize materials that can superconduct at room temperature January 16th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE