Nanotechnology Now

• About Us
  
  • Advertising
  • Our Mission
  • Our Team
  • Comments
  • Friends
  • Contact
• Nanotechnology
• News
  
  • Current News
  • Press Releases
  • Submit Press
  • Press kit
  • Interviews
• Columns
• Products
  
  • Our Products
  • Books
  • Featured Books
• Directories
  
  • Companies/Academic
  • Events
  • Glossary
  • Best Of
• Career Center
• Nano-Social Network
• Nano Consulting
• My Account

Home > News > Lithography Progress Reported

July 16th, 2007

Lithography Progress Reported

Abstract:
One year after shifting the objective of its lithography program to the 32nm half pitch node, IMEC reports progress on high-index 193nm immersion lithography, double-patterning schemes for 193nm water-based immersion lithography and extreme UV (EUV) lithography.

"Over the last year, we've made significant progress in the three litho approaches we are investigating within our advanced lithography program. Driven by the needs to quickly develop 32nm processes for memory applications and based on the promising results, we are quite confident that double patterning will be taken up as an intermediate solution for 32nm half pitch before a single exposure solution is ready for production," said Luc Van den hove, Executive Vice President and Chief Operating Officer at IMEC.

Source:
chipdesignmag.com

Bookmark:

Related News Press

Chip Technology

Sound waves precisely position nanowires June 19th, 2013

Nanometrics Announces Participation in 5th Annual CEO Investor Summit: Accredited Investor and Publishing Research Analyst Event to be Held Concurrently With SEMICON West and Intersolar 2013 in San Francisco June 19th, 2013

Which qubit my dear? New method to distinguish between neighbouring quantum bits June 18th, 2013

SEMATECH to Address Critical Supply Chain Challenges and Present Latest Technology Advances at SEMICON West 2013 June 17th, 2013

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals

Production of Bioactive Material for Quick Treatment of Bone Damages June 19th, 2013

3-D printing could lead to tiny medical implants, electronics, robots, more June 18th, 2013

Pioneering breakthrough of chemical nanoengineering to design drugs controlled by light June 18th, 2013

New Method to Synthesize Zinc Oxide Nanoparticles with High Catalytic Activity June 18th, 2013

Printing/Lithography/Inkjet

Sound waves precisely position nanowires June 19th, 2013

Light-Carved ‘Nano-Volcanoes’ Hold Promise for Drug Delivery June 13th, 2013

Further research on effects of nanomaterials: BASF participates in BMBF research project on safety of nanomaterials: Results allow easier and faster evaluation of nanoparticle behavior June 12th, 2013

Spooky action put to order Different types of 'entanglement' classified June 6th, 2013