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Abstract:
A new low-noise controller and a compact closed-loop XYZ piezo scanner provide picometer resolution and very fast response.

AFM Scanner Controller Provides 25 Picometers Resolution

Auburn, MA | Posted on March 29th, 2007

A new high-resolution positioning & scanning system providing 25 picometers resolution is available.
The minute P-363 PicoCubeÆ, together with its low noise E-536 driver / controller, provide significantly higher resolution and positional stability than previous multi-axis scanning stages.

How Do PicoCubeÆ Scanners Differ from Traditional Scanner Tubes?
PicoCube systems were designed to overcome the limitations of open-loop piezo-tube based scanners which provide high resolution motion but poor linearity and trajectory guidance.
The compact PicoCube is based on exceptionally robust, high-stiffness piezo drives rather than tubes and employs non-contact, direct-measuring, parallel-metrology capacitive sensors for position feedback. The low-inertia drives allow for a resonant frequency of 10 kHz, important for high speed scanning applications

Why Parallel Metrology?
Parallel metrology can 'see' all controlled degrees of freedom simultaneously and compensate for off-axis motion in real time. The benefits are a reduction of runout and off-axis errors, straighter multi-axis motion and improved repeatability.

Features & Advantages:
* High-Speed XYZ Scanner for AFM / SPM & Manipulation Tool for Nanotechnology
* Custom, High-Stiffness Shear Piezo Drives Provide up to 10 kHz Resonant Frequency for Faster Response and Higher Scanning Performance
* Ultra-Low-Noise Controller Enables 25 Picometers (0.025 nm) Resolution
* Capacitive Feedback for Exceptional Precision and Linearity
* Parallel Metrology for Better Multi-Axis Accuracy
* Small & Rugged Design with Titanium Case
* Vacuum Compatible

Typical Applications: AFM (Atomic Force Microscopy), SPM (Scanning Probe Microscopy) and Nanomanipulation, Bio-Technology, Nanotechnology, Nano-Imprint, Semiconductor & Data-Storage Test Equipment.

Controller
The new ultra-low-noise E-536 closed-loop controller provides unprecedented positional stability and can be controlled with analog or digital signals. Extensive software support including LabViewô drivers is provided.

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About Physik Instrumente
PI is a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications. PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 400+.

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Contacts:
Stefan Vorndran
Phone: 508 832 3456
Fax: 508 832 0506
E-mail:

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