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Home > News > Optical litho: there are no fundamental limits

July 6th, 2004

Optical litho: there are no fundamental limits

Abstract:
Illuminating silicon wafers with a pattern of light has long been the process of choice for making microelectronics, but there are fears that it will not be able to meet future demands. Steven Brueck, a supporter of the technology, argues why it is here to stay.

Source:
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