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May 28th, 2004
UMC says 90-nm process is offered in low-k, glass versions
United Microelectronics Corp. executives fired back at a Canadian semiconductor engineering services company's analysis of its 90-nm technology, saying the process can be offered in either a low-k and fluoro-silicate glass (FSG) configuration. UMC also claims that its 90-nm transistors meet specifications in the International Technology Roadmap for Semiconductors (ITRS) roadmap.
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