Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > News > Nikon launches EUV lithography development

January 15th, 2004

Nikon launches EUV lithography development

Abstract:
Nikon Corp. said Wednesday it will begin full-scale development of extreme ultraviolet lithography systems in 2004 and will begin offering working tools by 2006. Nikon had already announced an aggressive development plan for 193-nm ArF immersion lithography, with shipments planned as early as 2005. Nikon intends to offer an ArF dry tool with high NA of 0.9, then an ArF immersion tool for the 45-nm node and, finally, EUV for 45-nm manufacturing and beyond.

Source:
EETimes

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

The latest fashion: Graphene edges can be tailor-made: Rice University theory shows it should be possible to tune material's properties January 24th, 2015

New method to generate arbitrary optical pulses January 21st, 2015

New signal amplification process set to transform communications, imaging, computing: UC San Diego researchers discover a mechanism to amplify signals in optoelectronic systems that is far more efficient than standard processes January 21st, 2015

Solving an organic semiconductor mystery: Berkeley Lab researchers uncover hidden structures in domain interfaces that hamper performance January 16th, 2015

Tools

Graphene brings quantum effects to electronic circuits January 22nd, 2015

EnvisioNano: An image contest hosted by the National Nanotechnology Initiative (NNI) January 22nd, 2015

New Molecular Beam Epitaxy deposition equipment at the ICN2 January 22nd, 2015

New method to generate arbitrary optical pulses January 21st, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE