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Home > News > Tegal Receives Order for MEMS Applications

October 23rd, 2003

Tegal Receives Order for MEMS Applications

Abstract:
Tegal Corporation (Nasdaq:TGAL) today announced a large European semiconductor manufacturer has ordered two Tegal 980 Series diode plasma etch systems, which will be of key importance for its expansion into fabricating commercial quantities of specialized MEMS (Microelectromechanical Systems) and other nanotechnology devices.

Source:
Businesswire

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